삼차원 집적화를 위한 초박막 실리콘 웨이퍼 연삭 공정이 웨이퍼 표면에 미치는 영향

최미경,김은경,Choi, Mi-Kyeung,Kim, Eun-Kyung 한국마이크로전자및패키징학회 2008 마이크로전자 및 패키징학회지 Vol.15 No.2

전자산업의 소형화와 경량화 추세에 맞추어 최근 집적 칩(IC)이나 패키지를 적층시키는 삼차원 집적화(3D integration) 기술 개발은 차세대 핵심기술로 중요시되고 있다. 본 연구에서는 삼차원 집적화 공정 기술 중 하나인 초박막 실리콘 웨이퍼 연삭(grinding)공정이 웨이퍼 표면에 미치는 영향에 대해서 조사하였다. 실리콘 웨이퍼를 약 $30{\mu}m$과 $50{\mu}m$ 두께까지 연삭한 후, 미세연삭(fine grinding) 단계까지 처리된 시편을 건식 연마(dry polishing) 또는 습식 애칭(wet etching)으로 표면 처리된 시편들과 비교 분석하였다. 박막 웨이퍼 두께는 전계방시형 주사전자현미경과 적외선 분광기로 측정하였고, 표면 특성 분석을 위해선 표면주도(roughness), 표면손상(damage), 경도를 원자현미경, 투과정자현미경 그리고 나노인덴터(nano-indentor)를 이용하여 측정하였다. 표면 처리된 시편의 특성이 표면 처리되지 않은 시편보다 표면주도와 표면손상 등에서 현저히 우수함을 확인 할 수 있었으나, 경도의 경우 표면 처리의 유무에 관계없이 기존의 벌크(bulk)실리콘 웨이퍼와 오차범위 내에서 동일한 것으로 보였다. 3D integration technology has been a major focus of the next generation of IC industries. In this study Si wafer ultra-thinning has been investigated especially for the effect of ultra-thinning on the silicon surface. Wafers were grinded down to $30{\mu}m\;or\;50{\mu}m$ thickness and then grinded only samples were compared with surface treated samples in terms of surface roughness, surface damages, and hardness. Dry polishing or wet etching treatment has been applied as a surface treatment. Surface treated samples definitely showed much less surface damages and better roughness. However, ultra-thinned Si samples have the almost same hardness as a bulk Si wafer.

탄천 하도사주의 지형 형성과정과 식생분포 연구

최미경,이삼희,최정권,Choi, Mi-Kyoung,Lee, Sam-Hee,Choi, Jung-Kwon 한국조경학회 2010 韓國造景學會誌 Vol.37 No.6

본 연구는 하천 경관요소 중에서 비교적 단시간에 걸쳐 변화하는 사주 지형과 식생 분포의 역동적 형성과정을 밝히기 위해 수행되었으며, 연구 대상 하천은 2002년 이후 생태계보전지역으로 관리되고 있는 탄천 하류부 구간이다. 이를 위해서 사주지형의 변화는 항공사진과 경관사진을 통해 그 형성과정을 파악하고 현재 사주 지형 위에 형성된 식생의 분포를 현장조사를 통해 분석하였다. 분석한 연구 결과는 다음과 같다. 첫째, 1980년대 후반에 직강화 되었던 하도 내에서 1990년대에 들어 사주의 발달이 현저하여 다양한 형태의 사주가 형성되었고 이는 지속적으로 변화하였다. 초기에 사주가 형성되고 시간이 경과함에 따라, 하도 내 흐름 특성에 따라 사주의 면적과 높이가 변하였다. 둘째, 식생의 분포에 있어서는 물과 접촉 빈도가 높은 하안부는 교란의 정도가 심하기 때문에 무식생 상태이거나, 간헐적인 식생이 분포하여 피도가 낮게 나타났으며, 고수부지 쪽으로 형성된 사주에는 목본류나 정수식물군락이 활착되면서 식생 피도가 높게 나타나 안정식생역을 형성하였다. 셋째, 사주와 식생형성과정의 관계는 사주의 형태와 식생의 안정성 여부에 따라 저수로변 사주, 불안정 식생 저수로변사주, 안정식생 하중주 그리고 불안정식생 하중주 4가지 유형으로 나타났다. 본 연구를 통해 밝힌 하도 내 사주와 하천식생의 형성과정에 있어서의 상호관계는 모래하상의 하천부지에서 식물종이나 식재위치 선정에 유용할 것이나, 하천생태계 복원을 위한 실행사업의 식재 지침으로 활용되기 위해서는 다양한 특성을 지닌 하천에 대한 보다 폭 넓은 사례연구가 뒷받침되어야 할 것이다. This study identified the dynamic process of sandbar and vegetation distribution of the sandbar on the Tan-cheon River. The study area is located in the lower reaches of the Tan-cheon River that has been managed as an Ecosystem Reserve Area since 2002. For the study, the geomorphological process was analyzed through mapping analysis using a satellite image followed by analysis of the vegetation distribution through an on-site survey. The major findings were as follows : First, In the fluvial geomorphic process, various kinds of sandbars were developed in 1990s, the morphologic characteristics changing continuously. Second, In the distribution of vegetation on the sandbar, the sandbar shore was covered with bare sand substrate or intermittent annual vegetation because of the periodic fluctuation of the water-level due to intensive disturbances. Third, In the relationship between the sandbar formation and vegetation, four types of sandbars were classified: channel-shore stable bar, channel-shore unstable bar, mid-channel stable bar and mid-channel unstable bar, according to the fluvial disturbance & vegetation process. The study verifies that the vegetation distribution is reciprocally related to the geomorphological process. Accordingly, it is meaningful in the selection of plant species and the planting area of the sand bar. However, it is limited to the planting guidelines on river restoration projects. More diverse on-site experimental studies should be conducted.

한국 성인의 김치이용음식 섭취 현황: 2015년 국민건강영양조사 자료 이용

최미경,Choi, Mi-Kyung 한국식품조리과학회 2018 한국식품조리과학회지 Vol.34 No.3

Purpose: This study analyzed the types and consumption status of foods containing kimchi by Korean adults using the 2015 Korea National Health and Nutrition Examination Survey (KNHANES) to provide basic data for the development of recipes using kimchi. Methods: The food intake survey (24-hour recall survey) data from the 2015 KNHANES were used and 83 kinds of foods cooked with kimchi consumed by adults aged 19-64 years were selected. A total of 1,014 foods cooked with kimchi were used for the analysis and complex sample ${\chi}^2$-tests of independence were conducted using SPSS 23.0 for windows. Results: The foods containing kimchi revealed a high frequency of stews & hot pots (55.6%), stir fried dishes (15.9%), rice & porridge dishes (9.7%), and soups (8.5%). The ${\chi}^2$-test of independence using a complex sample module showed that the consumption ratios of each food differed significantly according to gender (p<0.05), age (p<0.001), meal place (p<0.001), and meal time (p<0.001). As a result of the analysis of additional ingredients, the frequency of using pork (19.6%), tuna (7.7%), bean sprouts (3.1%), and other seafood, such as saury and mackerel (2.1%), were high. Conclusion: Recipes need to be developed for foods containing kimchi appropriate for the subjects and situations considering the general characteristics, meal places, and meal times. The development of recipe using pork could be more diversified because pork is the preferred ingredient in various foods containing kimchi, and recipe development using various ingredients found in this study should be attempted.

웨이퍼 레벨 3D 패키징을 위한 초박막 Si 웨이퍼 공정기술

최미경,김은경,Choi, Mi-Kyeung,Kim, Eun-Kyung 대한용접접합학회 2008 대한용접·접합학회지 Vol.26 No.1

본 보고에서는 3D 패키징에서 중요한 공정의 하나인 초박막 Si 웨이퍼 Thinning 공정에 대해 간략히 소개하였고, 표면처리에 대해 살펴보았다. 기계적, 특히 전기적 Damage를 줄이기 위한 최적화된 Thinning 공정과 신뢰성 분석 및 평가, 그리고 초박막 웨이퍼 핸들링 방법 등이 시스템적으로 개발되는 것이 중요하다. 칩 소형화 추세와 더불어 3D 패키징 기술이 중요시되는 산업 요구에 맞추어 향후 웨이퍼 Thinning 기술을 포함한 3D 기술의 핵심 공정기술들은 그 중요성이 증대할 것이고, 이에 대한 활발한 연구가 진행되리라 기대한다.

대사증후군을 가진 성인남녀의 영양소 섭취상태와 혈액성상에 관한 연구

최미경,전예숙,배윤정,승정자,Choi, Mi-Kyeong,Jun, Ye-Sook,Bae, Yun-Jung,Sung, Chung-Ja 한국식품영양과학회 2007 한국식품영양과학회지 Vol.36 No.3

본 연구에서는 대사증후군의 예방과 관리를 위한 식사지침을 마련하기 위한 기초자료를 제시하고자 일부 성인을 대상으로 NCEP-ATP Ⅲ와 WHO 아시아태평양 비만 기준에 의해 대사증후군 성인을 분류한 후 영양소섭취상태와 혈액성상을 살펴보았으며, 그 결과를 요약하면 다음과 같다. 대사증후군 대상자의 평균 연령, 신장, 체중 및 체질량지수는 각각 58.8세, 158.0 cm, 66.3 kg, $26.5\;kg/m^{2}$이었으며, 대조군은 각각 58.4세, 158.9 cm, 59.6 kg, $23.5\;kg/m^{2}$로 대사증후군 대상자의 체중과 체질량지수가 대조군보다 유의하게 높았다(p<0.001, p<0.001). 총 식품섭취량은 대사증후군 대상자와 대조군이 각각 1063.8 g과 1183.4 g으로 유의한 차이가 없었다. 각 식품군별 섭취량도 두 군 간에 유의한 차이가 없었다. 남자 대상자의 경우 대사증후군 대상자의 버섯류 섭취는 대조군보다 유의적으로 높은 반면(p<0.05), 난류 섭취량은 대조군보다 유의하게 낮았다(p<0.01). 또한 여자 대상자의 경우 대사증후군 대상자의 채소류 섭취가 대조군보다 유의하게 낮았다(p<0.05). 에너지 섭취량은 대사증후군 대상자가 1527.9 kcal, 대조군이 1578.9 kcal로 유의한 차이가 없었으며, 그 밖의 영양소 섭취량도 두 군 간에 유의한 차이가 없었다. 여자 대상자의 경우 대사증후군 대상자의 식이섬유 섭취량이 대조군보다 유의하게 낮았다(p<0.05). 대사증후군 진단기준으로 사용한 혈청 HDL-콜레스테롤, 중성지질, 혈당 및 혈압은 대사증후군 대상자가 각각 39.9 mg/dL, 183.9 mg/dL, 126.6 mg/dL, 138.1/78.8 mmHg로 대조군의 45.8 mg/dL, 125.5 mg/dL, 93.6 mg/dL, 120.8/72.8 mmHg와 비교할 때 HDL-콜레스테롤은 유의하게 낮고 나머지는 유의하게 높았다(p<0.001, p<0.001, p<0.001, p< 0.001, p<0.001). 혈청 GPT, 동맥경화지수, 백혈구수는 대사증후군 대상자가 각각 27.8 IU/L, 3.7, $5964.2\;{\mu}/L$로 대조군의 22.6 IU/L, 3.2, $5250.0\;{\mu}/L$보다 유의하게 높았다(p<0.01, p<0.001, p<0.01). 이상의 결과를 종합할 때 대사증후군의 여성 대상자의 경우 섬유소 및 채소류의 섭취가 정상 성인보다 낮게 나타나, 이들 식품 및 영양소의 섭취가 대사증후군의 증상에 도움이 될 수 있음이 제시되어 이러한 결과는 대사증후군의 예방과 관리를 위한 식사지침을 마련하기 위한 기초자료로서 활용될 수 있을 것으로 사료된다. 또한 대사증후군 대상자의 혈청 GPT와 동맥경화지수가 정상 성인보다 유의하게 높게 나타나, 본 연구를 기초로 하여 향후 염증과 군집으로서의 대사증후군과의 관계를 밝히는 연구를 수행하는 것이 필요하다고 생각한다. The purpose of this study is to evaluate the nutrient intake and selected blood parameters of adults with metabolic syndrome (MS) and to provide data in forming a dietary guideline for the prevention of chronic diseases. Subjects were recruited and divided into two groups according to the NCEP-ATP III criteria and WHO Asia-Pacific Area criteria for obesity. MS group was defined as subjects who have three or more risk factors and control group was defined as those with two or less of the risk factors. The average age, height, weight, body mass index (BMI) were 58.8 years, 158.0 cm, 66.3 kg, $26.5\;kg/m^{2}$, respectively, in the MS group; and 58.4 years, 158.9 cm, 59.6 kg, $23.5\;kg/m^{2}$, respectively, in the control group. The weight and BMI in the MS group were significantly higher than those in the control (p<0.001). There was no significant difference in the food and nutrient intake between the MS and control group. Male subjects in the MS group showed significantly higher intake of mushrooms than those in the control (p<0.05). Egg consumption in the MS group was significantly lower than those in the control (p<0.01). Consumption of vegetables and fiber was significantly lower for female subjects in the MS group than those in the control (p<0.05). Serum GPT, AI and WBC count in the MS group (27.8 IU/L, 3.7, $5964.2\;{\mu}/L$) were significantly higher than those in the control (22.6 IU/L, 3.2, $5250.0\;{\mu}/L$; p<0.01, p<0.001, p<0.01). In conclusion, consuming fiber and vegetables may prevent and reduce metabolic syndrome in adult men and women, and this study demonstrates the need for proper dietary management for them.

한국인 상용 식품 중 망간 함량 분석

최미경,김은영,Choi, Mi-Kyeong,Kim, Eun-Young 한국영양학회 2007 Journal of Nutrition and Health Vol.40 No.8

Using ICP-AES, we analyzed manganese content in 366 foods consumed frequently by Koreans. For the analysis, it was included a total of 366 foods such as 51 kinds of grains, 7 kinds of potatoes and starches, 7 kinds of sugars and sweeteners, 12 kinds of legumes, 11 kinds of nuts and seeds, 68 kinds of vegetables, 7 kinds of mushrooms, 33 kinds of fruits, 13 kinds of meats, 4 kinds of eggs, 48 kinds of fishes and shellfishes, 7 kinds of seaweeds, 16 kinds of milks, 8 kinds of oils and fats, 27 kinds of beverages, 34 kinds of seasonings, 13 kinds of processed foods and others. Among the grains, starches and sugars, manganese content of rice was 0.745 mg/100g. As for legumes, the content of manganese in soybean milk was 0.033 mg/100g and in black beans was 4.075 mg/100g. In nuts and seeds, the content of manganese in gingko nuts was 0.268 mg/100g while that in pine nuts was 8.872 mg/100g. Among the vegetables, manganese contents were 0.061 mg/100g in cherry tomato and 14.017 mg/100g in ginger. In mushrooms, the highest manganese content was displayed in ear mushroom at 10.382 mg/100g. Dried jujube and shrimp were found to be the fruits and fishes with high manganese contents at 2.985 mg/100g and 3.512 mg/100g, respectively. Among dairy foods, oils and beverages, manganese content was the highest in instant coffee powder at 2.577 mg/100g. Seasonings and processed foods posted 0.010 mg/100g in Sagolgomtang, instant soup and 23.846 mg/100g in pepper. In a furture, more various food for manganese content needs to be analyzed and a reliable food database should be compiled from the findings of researches in order to estimate manganese consumption accurately.

비만 초등학생의 에너지 섭취량 및 에너지 소비량 평가

최미경,전예숙,Choi, Mi-Kyeong,Jun, Ye-Sook 동아시아식생활학회 2007 동아시아식생활학회지 Vol.17 No.2

The purpose of this study was to evaluate the energy intake and energy expenditure of obese children. The body weight and height were measured, and the daily energy intake and activity pattern assessed for one day, using the 24 hour recall method and interviews in 83 elementary school children (59 boys and 24 girls). The average age, height, weight, ideal body weight and obesity index in boys and girls were 11.8 years, 144.8 cm, 54.2 kg, 39.9 kg and 35.9% and 11.5 years, 140.8 cm, 48.9 kg, 36.9 kg and 33.7%, respectively. The mean daily energy intakes of boys and girls were 1,670.5 and 1,656.5 kcal; these being 76.4 and 88.5% of estimated energy requirement for Koreans, respectively. The energy intake ratio from carbohydrates, proteins and fats in boys and girls were 61.5:14.7:23.6 and 62.0:14.7:23.7, respectively. The resting energy expenditure, as estimated by the Harris-Benedict, WHO/NAO/FAO and Korean DRI formulae in boys and girls were 1,452.7, 1,239.2 and 1,629.2 kcal and 1,323.9, 1,156.0 and 1,252.4 kcal, respectively. The activity coefficient for both the boys and girls was 1.39. The daily energy expenditure of boys (1,990.7 kcal) was significantly higher than that of girls (1712.1 kcal). No significant correlations were found between the obesity index, energy intake and energy expenditure. These results suggested that a nutrition and exercise program is required to increase the energy expenditure of elementary school children. Further research will be needed to assess multiple dietary factors and dove]lop a standard method for assessing the energy expenditure of obese children.

골관절염 환자의 타이치 자조관리 프로그램 효과

최미경,원동희,김연주,최미옥,임난영,송정희,Choi, Mi-Kyung,Won, Dong-Hee,Kim, Yeoun-Ju,Choi, Mi-Ok,Lim, Nan-Young,Song, Jung-Hee 대한근관절건강학회 2007 근관절건강학회지 Vol.14 No.1

Purpose: The purpose of this study was to examine the effects of Tai-Chi self-help program for osteoarthritis patients. Method: This study was performed from 1th August. to 30th Dec. 2006. 27 osteoarthritis patients were participated in the Tai-Chi self-help program. Outcome measures were pain, flexibility and balance, self-efficacy. Data were analysed by SPSS WIN 12.0. Result: There were statistically significant in balance and knee flexibility. but no significant differences were found in pain and self-efficacy. Conclusion: In conclusion, Tai-Chi self-help program was proved to be an effective nursing intervention to increase the balance and flexibility. Also 12 forms of Tai-Chi self-help program has been found safely applicable to the patients with osteoarthritis for 8 weeks. A rigorous research design should be further considered to identify the long-term benefit for this population.

논문편 : 부모교육경험이 부모의 자녀교육관에 미치는 영향

최미경,박성연 ( Mi Kyung Choi,Seong Yeon Park ) 대한가정학회 1991 Human Ecology Research(HER) Vol.29 No.3

한국 성인들이 섭취한 음식의 제공 장소별 조리법에 따른 음식 유형 분석: 2015년 국민건강영양조사 자료 이용

최미경,Choi, Mi-Kyung 한국식품조리과학회 2017 한국식품조리과학회지 Vol.33 No.3

Purpose: The purpose of this study was to analyze the meal types by cooking methods provided at different meal provision places using the 2015 Korea National Health and Nutrition Examination Survey. Methods: A total of 42,441 meal data on adults from the 2015 Korea National Health and Nutrition Examination Survey were used for analysis. The data were analyzed by complex sample $x^2-test$ of independence and complex sample logistic regression analysis using SPSS 23.0 for Windows. Results: The meal provision place showing the highest frequency was home (60.2%), followed by commercial (32.5%) and institutional foodservices (7.3%). The meal types by cooking method most frequently consumed were rices (18.3%) and kimchis (16.6%). The results of the complex sample logistic regression analysis showed that breads & snacks, steamed or braised dishes, fried dishes, and fresh seasoned vegetables were more likely to be consumed at commercial or institutional foodservices than at home. In addition, noodles & dumplings were more likely to be consumed at commercial places, and Korean soups were consumed at institutional foodservices. Conclusion: From the results of this study, it is suggested to develop recipes for substitution of fried dishes and to develop low sodium recipes at commercial and institutional foodservices. In addition, education of consumers of commercial foodservice is needed to reduce consumption of fried dishes, salted seafoods, and pickled vegetables and encourage consumers to choose meals from institutional foodservice managed by dietitians.