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이성혁(Seong Hyuk Lee),정순철(Soon Chul Jung),이재응(Jae Eung Lee),김혁(Hyuk Kim),최형길(Hyoung Gil Choi),류제형(Je Hyoung Ryu),이동진(Dong-Jin Lee),지홍규(Hong Kyu Ji) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
The present study investigates the static and dynamic stiffness characteristics of porous air bearing which is mainly used for the ultra precision positioning machines. In this study, the static and dynamic stiffness of air bearing is measured with the accuracy of 1 ㎛. The permeability of porous medium is also estimated by comparing the predicted results with the experimental data for the static case. The numerical analysis is extensively conducted by using the commercial CFD code (FLUENT V6). In particular, the deforming and remeshing technique is adopted for solving the fluid-solid interaction problem. As a result, it is found that the predictions for the static stiffness show good agreement with experimental data when the appropriate permeability value is used and the dynamic stiffness appears to be relatively smaller than the static stiffness.