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조용재,Cho, Yong Jai 한국진공학회 2015 진공 이야기 Vol.2 No.3
We developed a real-time three-polarizer spectroscopic ellipsometer based on a new data acquisition algorithm and a general data reduction (the process of extracting the ellipsometric sample parameters from the Fourier coefficients). The data acquisition algorithm measures Fourier coefficients of radiant flux waveform accurately and precisely. The general data reduction is introduced to represent the analytic functions of the standard uncertainties of the ellipsometric sample parameters, and the extracted theoretical values closely agree with the corresponding experimental data. Our approach can be used for optimization of measurement conditions, instrumentation, simulation, standardization, laboratory accreditation, and metrology.
분광 타원계측기를 이용한 고굴절률 게이트 산화막의 광물성 분석
조용재(Yong Jai Cho),조현모(Hyun Mo Cho),이윤우(Yun Woo Lee),남승훙(Seung Hoon Nahm) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11
We have applied spectroscopic ellipsometry to investigate high-k dielectric thin films and<br/> correlate their optical properties with fabrication processes, in particular, with high temperature<br/> annealing. The use of high-k dielectrics such as HfO2, Ta2 O5, TiO2 , and ZrO2 as the replacement<br/> for SiO2 as the gate dielectric in CMOS devices has received much attention recently due to its<br/> high dielectric constant. From the characteristics found in the pseudo-dielectric functions or the<br/> Tauc-Lorentz dispersions, the optical properties such as optical band gap, polycrystallization, and<br/> optical density will be discussed.
조용재(Yong Jai Cho) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.11
It is well known that rotating-element ellipsometers have been widely used to measure the critical dimensions of nano-patterned wafers in the semiconductor industry. A novel Fourier analysis on the waveform of a periodic light irradiance variation is introduced for the rotating-element ellipsometers where a time-integrating photo-detector is employed to capture normalized Fourier coefficients. In the novel Fourier analysis, the read and the variable integration time are taken into account in the waveform integrations and then the discrete Fourier transform on the waveform integrals is adopted to simplify the data acquisition processes. In comparison with the earlier works based on the Hadamard transforms, the data acquisition procedure becomes much simple and the number of the measured integrals per revolution can be reduced to a small number.
영상 타원법을 이용한 인간 줄기세포의 굴절률과 두께 분포 연구
최중규,심우영,이광,김상열,박상욱,제갈원,조현모,조용재,Choi, Joong-Kyu,Shim, Woo-Young,Lee, Gwang,Kim, Sang-Youl,Park, Sang-Uk,CheGal, Won,Cho, Hyun-Mo,Cho, Yong-Jai 한국광학회 2009 한국광학회지 Vol.20 No.1
타원법을 사용하여 인간 중간엽 줄기세포의 광학상수와 두께의 영상정보를 정량적으로 구하였다. 영상 타원계를 이용하여 in vitro 환경에서 세포의 핵(nucleus)과 세포체(cell body)의 타원상수 $\Delta$, $\Psi$를 2차원 영상정보 형태로 구한 다음 각 화소별로 타원상수들을 수치해석적 역방계산하여 굴절률과 두께의 영상정보를 얻었다. 세포의 핵 영역과 세포체 영역에서 줄기세포의 두께와 굴절률 값을 2차원 영상정보 형태로 제시하였다. We applied an ellipsometric technique to get quantitative information about the thickness and refractive index of human Mesenchymal Stem Cells (hMSCs). The images of ellipsometric constants $\Delta$, $\Psi$ for the nucleus region and for the cell body region of hMSCs were obtained by using an Imaging Ellipsomter (IE) for their in vitro state. A numerical inversion method was applied to deduce the refractive index and the thickness of hMSCs from the measured $\Delta$, $\Psi$. Thus the images of the refractive index and those of the thickness of hMSCs for the nucleus region and for the cell body region are reported.
공기주입 장치와 공기제거 장치를 사용한 표면 플라즈몬 공명 타원계측기
이홍원,조은경,조재흥,원종명,신기량,제갈원,조용재,조현모,Lee, Hong-Won,Cho, Eun-Kyoung,Jo, Jae-Heung,Won, Jong-Myoung,Shin, Gi-Ryang,CheGal, Won,Cho, Yong-Jai,Cho, Hyun-Mo 한국광학회 2009 한국광학회지 Vol.20 No.3
완충용액과 분석시료의 확산으로 발생하는 측정 오차를 최소화하기 위하여 공기주입 장치와 공기제거 장치를 설치한 표면 플라즈 몬 공명 타원계측기(surface plasmon resonance ellipsometer: SPRE)를 새로이 제안하고 이를 제작하였다. SPRE에서 완충용액과 분석시료간의 상호 확산은 분석시료의 농도를 변화시켜 굴절률 측정에 영향을 주고, 이 결과 생체분자 물질의 접합 특성이 명확하게 나타나지 않는다. 이러한 SPRE의 측정 장치에 공기를 주입하는 장치를 추가로 설치하여 두 용액의 확산을 막고, 특히 불필요한 공기가 채널 내부로 유입되어 생기는 잡음신호를 없애기 위하여 공기제거 장치를 사용함으로써 신뢰성 있는 SPRE의 측정 결과를 얻을 수 있음을 확인하였다. The surface plasmon resonance ellipsometer (SPRE), using a multiple air injection system with an extraction of air system, has been proposed and developed to minimize measurement error of signals due to diffusion of reagent into running buffer. Since the diffusion of reagent into running buffer affects the refractive index of the running buffer by changing the concentration, characteristics of binding between various bio-molecules don't appear clearly in measurement results. The diffusion between running buffer and reagent can be blocked by using an air bubble injection system. An extraction of air system is used to remove the noise signal due to unnecessary air bubbles flowing in a channel. Reliability of measurement results has been improved by using the valve system.
崔尙惇,趙龍在,申光錫 경북대학교 과학교육연구소 1993 科學敎育硏究誌 Vol.17 No.-
As easy way to utilize the isolation-projection technique in deriving the cyclotron absorption formula is introduced.