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이지성(Ji Sung Lee),정재일(Jay Il Jeong),임홍재(Hong Jae Yim) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
Vibrational analysis for a machine vision system of the nanoimprint process is presented in this article. For the nano-imprinting equipment, the machine vision system is one of the essential parts in order to align the several layers or in order to inspect nano/micro patterns transferred by the nanoimprint. In the development, system resonance due to internal or external vibrational sources should be considered. In fact, the microvibration phenomenon is usually observed when measuring the position of the patterns by using the machine vision system. In this work, a detail design of the machine vision system is depicted. Based on the design, the normal mode analysis and frequency response analysis are carried out in order to find and to suppress the source of the micro-vibration. In the future, we hope that the results of the design consideration will be a guideline for constructing a machine vision system for the nanoimprint process.
장서영(Seo Young Jang),정재일(Jay I. Jeong) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.11
In this paper, a mathematical model of roller-type bearings previously studied is reviewed in order to apply the correct bearing stiffness. The mathematical models based on Hertz contact theory that is suggested by Popov[1] was selected as stiffness models for simulation. To verify the formula model, a displacement/force graph was created through finite element analysis of a roller model with the same boundary conditions as the boundary line used in the formula. The result of the formula was compared with simulations. As a result of the analysis, the Popov equation model more closely matched the results of the finite element analysis. When the displacement was within 10 micrometers, the result was within the error range of 8.8%.