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마이크로 픽셀구조와 Gd₂O₂S: Tb를 이용한 디지털 래디오그래피용 섬광체 패널의 제작
배공명(Kong Myeong Bae),정임덕(Im Deok Jung),이상민(Sang Min Lee),정필구(Phill Gu Jung),배승일(Seung Il Bae),김호경(Ho Kyung Kim),고종수(Jong Soo Ko) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
The fabrication method of scintillator panel for digital radiography is proposed and demonstrated. The micro pixel structures were fabricated by DRIE(Deep Reactive Ion Etching) process and the scintillator was filled in the micro pixel structures using doctor blade. The micro pixel structures prevent the scattered visible light from spreading to neighboring pixels. The experimental results of X-ray image verified that the scintillator panel with smaller pixel size has better spatial resolution.
PDMS 유연 몰드를 이용한 구리 마이크로 메쉬 시트의 제작
정순녕(Sun Nyeong Jung),강창근(Chang Kun Kang),정임덕(Im Deok Jung),배공명(Kong Myeong Bae),박치열(Chi Yeol Park),정필구(Phill Gu Jung),고종수(Jong Soo Ko) 대한기계학회 2007 大韓機械學會論文集A Vol.31 No.12
A unique fabrication method for a copper micromesh is proposed and demonstrated. A PDMS mold was fabricated using a microcasting process and then used as a flexible mold in copper electroplating. The fabricated copper micromesh was well formed and connected without any cracks within the entire mold area. The experimental results verified that the fabricated features of the copper micromesh accurately followed the shape of the microstructures of the PDMS mold. This unique fabrication method provides an easy yet precise means of producing three-dimensional metal microstructures.
이상민(Sang Min Lee),정임덕(Im Deok Jung),박치열(Chi Yeol Park),고종수(Jong Soo Ko) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
Surface wettability on the micro nano multi-scale structures has been examined. To evaluate the influence of the nano structures on the contact angles, we fabricated two different kinds of nano structures: bump-type and tip-type nano structures. Bump-type and tip-type nano structures were fabricated by reactive ion etching (RIE) and deep reactive ion etching (DRIE) processes, respectively. For the hydrophobic coating, plasma polymerized fluorocarbon (PPFC) was finally deposited onto the fabricated structures. The fabricated micro nano multi-scale structures showed a very high contact angle, ca 170°.
초소수성 표면 개질에 미치는 마이크로 나노 복합구조의 영향
이상민(Sang Min Lee),정임덕(Im Deok Jung),고종수(Jong Soo Ko) 대한기계학회 2008 大韓機械學會論文集A Vol.32 No.5
Surface wettability in terms of the size of the micro nano structures has been examined. To evaluate the influence of the nano structures on the contact angles, we fabricated two different kinds of structures: squarepillar-type microstructure with nano-protrusions and without nano-protrusions. Microstructure and nanostructure arrays were fabricated by deep reactive ion etching (DRIE) and reactive ion etching (RIE) processes, respectively. And plasma polymerized fluorocarbon (PPFC) was finally deposited onto the fabricated structures. Average value of the measured contact angles from microstructures with nanoprotrusions was 6.37° higher than that from microstructures without nano-protrusions. This result indicates that the nano-protrusions give a crucial effect to increase the contact angle.
KMPR을 이용한 다층구조물 제작 및 전해도금을 이용한 니켈몰드 제작
황성진(Sung Jin Hwang),정필구(Phill Gu Jung),고정상(Jeung Sang Ko),고종수(Jong Soo Ko),정임덕(Im Deok Jeong),김인곤(In Gon Kim) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
In this paper, we proposed XP KMPR-1050 negative tone resist to replace SU-8 resist for multi-layer microstructures and thick plating mold fabrication using UV-LIGA process. XP KMPR resist proposed in this paper can be easily striped using a common stripping solution such as NMP without damage of micro-structure. The conditions for the fabrication of XP KMPR micro-structure were optimized by adjustment of exposure and post-exposure bake(PEB). The 140㎛-thick and an aspect ratio at least 10 micro-structure and multi-layer structures were successfully fabricated through the process conditions. Through-mold electroplating and PR striping of XP KMPR has been successfully demonstrated.