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The multi degree of freedom system using magnetic levitation has been implemented successfully. Differently from another noncontact systems, the developed system was focused on the maximization of the system stiffness under the constraint of a limited input. The variation of a relative adopting point between the magnetic pair, its location on the fixed base, and the selection of optimal specifications for the main active magnetic elements give us another chance to realize the increased robustness against external disturbances with the less control inputs. In this paper, the overall development procedures are given including the optimal design, the dynamic modeling, the various control tests, and the main issues to be solved.
In this paper, we introduce a positioner based on magnetic levitation to eliminate the friction which is the most severe effect to limit high resolution on the micro level. Differently from existing electromagnetic device, the proposed positioner consists of air core solenoid and permanent magnet. Although the combination produces small magnetic force, it is suitable for realizing micro motion repeatedly without the accumulation of error because there is no hysteresis caused by ferromagnetic materials, no eddy current loss, no flux saturation. First, the approximate modeling of stiffness and damping effects between the magnetic elements is made and verified experimentally. Then, we have formulated the dynamic equation of one d.o.f magnetic levitation positioner using linear perturbation method and discussed the necessity of optimization for the chief design parameters to maximize the stability performance.
In this Paper, we suggest the precision stage using a novel non-contact planar actuator that utilizes an interaction between an array type of air-core solenoids and permanent magnets. The former with axes arranged in the mutually orthogonal direction is fixed on the stator and the latter with the same polar direction is attached below the stage. The promising magnetic structure has little uncertainty such as hysteresis loss caused by ferromagnetic material, then it is simple to quantify the magnetic phenomenon. And all the magnetic forces are transmitted through narrow air-gap between the coil and the permanent magnet, therefore the structure can be highly compacted. Furthermore, the stage or plate can be perfectly isolated from the stator without any wire connection, leading to diminish the generating possibility of wear particles due to mechanical contact. Then. it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness. or general-purpose nano stage. The main issues rebated to the plate driving are discussed here.
The De-NOx system for the application of LNG combined cycle power plant has been developed by KOPEC. It has the characteristics of the economical benefits and the easy installation at the retrofit of the existing power plant compared with the conventional system because of the wide operating temperature range and the minimization of the modification for the existing facilities. The system was successfully tested at the pilot facilities and full-scale demonstration plant. As a result, the characteristics of the catalyst showed that the high activity for NOx reduction was achieved at the condition of low temperature region compared with the conventional catalyst. And also, yellow plum, which is caused by nitrogen dioxides, was effectively removed at the start-up condition of the power plant.