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전종균(ChongKeun Chun),심다솔(Dasol Shim),박상곤(SangGon Park),한현희(HyunHee Han) 한국소음진동공학회 2016 한국소음진동공학회 학술대회논문집 Vol.2016 No.4
The award-winning manufacturing plants for semiconductor, TFT-LCD, and OLED manage their sub-micro vibrations strictly in order to raise their production yield rate and quality. The vibration environment required to manage the sub-micro vibrations of super-precision equipment is measured in the level of several micro(㎛). The permitted limits of vibration required depending on the characteristics and the process of super-precision equipment are also different. It is difficult to find a space to install the dustproof device of such super-precision equipment as it is difficult to maintain it. Based on its fluid characteristics, this study examined the damping force of a variable attenuator designed to solve the issue with resonance caused by an external vibration from outside. When the damping force changed according to the variable area of the variable attenuator and its fluid viscosity, the damping force increased in relation to the increase in the fluid viscosity and the orifice area.