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신동식(D. S. Shin),임세환(S. H. Lim),이제훈(J. H. Lee),김종도(J. D. Kim),송은영(E. Y. Song),방형배(H. B. Bang) 한국레이저가공학회 2008 한국레이저가공학회 학술대회 논문집 Vol.2008 No.-
Laser assisted machining of silicon nitride (Si₃N₄) is evaluated by using laser integrated machining center. Laser - tool angle of this machine is adopted at 180˚ in consideration of its usability, flexibility, and safety. The higher laser power was needed for the larger laser-tool angle, but excessive laser power could raise the tool temperature and tool wear.