CMP 패드 두께 프로파일 측정 장치 및 방법에 관한 연구

이태경,김도연,강필식,Lee, Tae-kyung,Kim, Do-Yeon,Kang, Pil-sik 한국산업융합학회 2020 한국산업융합학회 논문집 Vol.23 No.6

The chemical mechanical planarization (CMP) is a process of physically and chemically polishing the semiconductor substrate. The planarization quality of a substrate can be evaluated by the within wafer non-uniformity (WIWNU). In order to improve WIWNU, it is important to manage the pad profile. In this study, a device capable of non-contact measurement of the pad thickness profile was developed. From the measured pad profile, the profile of the pad surface and the groove was extracted using the envelope function, and the pad thickness profile was derived using the difference between each profile. Thickness profiles of various CMP pads were measured using the developed PMS and envelope function. In the case of IC series pads, regardless of the pad wear amount, the envelopes closely follow the pad surface and grooves, making it easy to calculate the pad thickness profile. In the case of the H80 series pad, the pad thickness profile was easy to derive because the pad with a small wear amount did not reveal deep pores on the pad surface. However, the pad with a large wear amount make errors in the lower envelope profile, because there are pores deeper than the grooves. By removing these deep pores through filtering, the pad flatness could be clearly confirmed. Through the developed PMS and the pad thickness profile calculation method using the envelope function, the pad life, the amount of wear and the pad flatness can be easily derived and used for various pad analysis.

흥분제(Psychostimulants)에 대한 신경생물학 측면의 고찰 -Methamphetamine 남용을 중심으로

이태경,존 E 그랜트,김석원,오동열,Lee Tae Kyung,Jon E. Grant,Kim, Suck Won,Oh Dong Yul 대한임상독성학회 2003 대한임상독성학회지 Vol.1 No.1

Methamphetamine (MA) is a major drug of abuse in Korea. Currently preliminary evidence suggests that MA dependence may cause long-term neural damage in human. Repeated exposure to psychostimulants such as methamphetamine results in behavioral sensitization, a paradigm thought to be relevant to drug craving and addiction in human. Sensitization alters neural circuitry involved in normal processes of incentrive, motivation, and reward. However the precise mechanism of this behavioral sensitization has not yet been fully elucidated. Repeated use of high dose MA causes neurotoxicity which is characterized by a long-lasting depletion of striatal dopamine (DA) and tyrosin hydroxylase activity of DA, DA-transporter binding sites in the striatum. The loss of DA transporters correlates with memory problems and lack of motor coordination. DA fuels motivation and pleasure, but it' s also crucial for learning and movement. This selective review provides a summary of studies that assess the neurobiological mechanisms of MA.

거점국립대학교의 장애학생을 위한 편의시설 현황조사 연구

이태경(Lee Tae-Kyung),임신영(Lim Shin-Young),이상홍(Lee Sang-Hong) 대한건축학회 2009 대한건축학회논문집 Vol.25 No.9

The study focused on finding the problems of the educational facilities for the disabled and handicapped person in five main national universities, Korea. The study is divided into ten areas; interior parts, intermediation parts(include pedestrian part), sanitary facilities, guidance and the rest facilities, lecture rooms, library, auditorium, restaurant, gymnasium, dormitory and bedroom. The finding revealed that firstly, the pedestrian mobility such as boardwalk provided with raised edges, small size of parking areas for wheelchair users, and vertically moving access are not appropriately provided. Secondly, most auditoriums have problems to access on main entrance or evacuation pathway by wheelchair users or handicapped person. Thirdly, the shower room facilities of the dormitory are not properly supported and an emergency alarm lamp facility for the hearingimpaired in the dormitory. The conclusion is that the indicated educational facilities for the disabled, handicapped person are built for most handicapped person except blind or deaf person and the result of evaluation for convenient facilities, most universities can not be over 70%. Thus, educational facilities must be considered and planned for all type of disabled, handicapped person from the viewpoint of Universal Design.

분절상 신경섬유종증

이태경(Tae Kyung Lee),문두찬(Doo Chan Moon),권경술(Kyung Sool Kwon),정태안(Tae Ahn Chung) 대한피부과학회 1987 대한피부과학회지 Vol.25 No.5

A 61-year-old female had neurofibromas situated on the right side of upper trunk, shoulder and neck in the distribution of dermatomes C3 and C4(right), which developed 3 years ago. There were not cafe-au-lait spots, axillary frecklings, or Lisch nodule (iris pignented hamartoma). Biopsy specimen showed collagenous wavy fibrils among which spindle-shaped and round cells were embedded as seen in the typical neurofibroma. This case was considered to be a segmental form of von Recklinghausen's disease.

충동조절장애군과 광범위 양극성 정동장애 스펙트럼간의 관계에 대한 고찰

이태경(Tae-Kyung Lee),전양환(Yang-Whan Jeon) 한국중독정신의학회 2005 중독정신의학 Vol.9 No.2

This article reviews the current knowledge about the emerging concept of the soft bipolar spectrum and summarizes available evidence regarding a possible relationship between impulse control disorders (ICDs) and the soft bipolar spectrum. The soft bipolar spectrum is organized around bipolar II disorder and cyclothymic temperamental instability represents the common substrate underlying a ‘spectrum’ of related clinical conditions characterized by a complex combination of mood, anxiety, and impulse control disorders. In this article, studies examining the phenomenology, course, psychiatric comorbidity, family history, and treatment response of impulse control disorders are compared with the studies examining those of the soft bipolar spectrum. This review suggests that the two conditions may be related and thus may share at least one common pathophysiologic abnormality. Viewing these constructs as related entities with a common temperamental predisposition will make patients in this realm more accessible to pharmacologic and psychological approaches geared to their common temperamental attributes.

0-D 모델링을 통한 예혼합 압축착화 엔진에서의 NVO 파일럿 인젝션 효과 연구

이태경 ( Tae Kyung Lee ),송한호 ( Han Ho Song ) 한국액체미립화학회 2014 한국액체미립화학회 학술강연회 논문집 Vol.2014 No.-

In a homogeneous charge compression ignition (HCCI) engine, pilot fuel injection into the recirculated exhaust gas during negative valve overlap (NVO) was known to improve the mixture ignitability, especially for highly-diluted operations. In this study, the effect of pilot injection is studied by using 0-D modeling of isooctane-fueled HCCI engine. During NVO, the endothermic fuel-pyrolysis reaction is dominant at equivalence ratio 0.95, while the exothermic oxidation reaction at 0.85, the difference of which are mainly due to the oxygen availability for pilot-injected fuel. The resultant specific heat ratio of these NVO products is higher as compared to pure isooctane mixture, which results in rapid temperature increase during main compression, thus reaching the ignition threshold earlier. These chemical and thermal effects of pilot injection during NVO should be considered together to fully understand the exact behavior of the HCCI combustion.

부품의 형상 해석에 의한 공정 및 조립 계획 생성

이태경(Tae Kyung Lee),오해석(Hae Seok Oh) 한국정보과학회 1994 정보과학회논문지 Vol.21 No.7

This paper proposes that process and assembly planning is established by using extracted feature information from CAD drawing of rotational parts. For the feature extraction, the entitles are interptreted from source design model and extracted the grouped features by using AAG technique of graph. The sequences of operations ate generated from the extracted features. Knowledge base is applied to the tasks of process planning. In assembly tasks, the assembly sequences are determined and the operations are generated by the mating conditions of parts. 본 논문은 회전체 부품에 대해 CAD로 부터 추출된 형상 정보로 부터 공정 계획에 의하여 부품의 가공작업 및 조립작업이 가능함을 제안하였다. 형상 추출을 위해서 원시 설계데이타로 부터 엔티티 형상을 추출하였으며, 이 엔티티 형상으로 부터 AAG 그래프를 이용하여 그룹화된 형상을 추출하였다. 본 논문에서는 공정 계획을 위하여 공정 순서의 생성 절차에 대해서 논의되었으며, 부품에 대한 가공을 위하여 지식베이스 규칙이 적용되었다. 조립 작업에서는 CAD에서 추출된 형상정보를 이용하여 조립 순서가 결정되고, 부품의 만남조건에 의해서 조립동작이 자동적으로 발생함을 보였다.

간호사의 환자안전사고 유발경험에 대한 현상학적 연구

이태경(Tae Kyung Lee),김은영(Eun Young Kim),김나현(Na Hyun Kim) 한국간호행정학회 2014 간호행정학회지 Vol.20 No.1

본 연구는 임상간호사의 환자안전사고 경험의 본질과 의미를 탐색함으로써 그들의 경험을 총체적으로 이해하기 위해 수행되었다. 방법: 자료수집은 2011년 10월 8일부터 2012년 1월 31일까지 진행되었으며, 7명의 임상간호사로부터 심층면담을 통해 이루어졌다. 자료분석은 Colaizzi의 현상학적 방법을 따랐다. 결과: 연구결과, 6개의 범주가 도출되었으며, 여기에는 ``환자상태 악화에 대한 두려움``, ``사건 보고에 대한 갈등``, ``사고원인을 열악한 근무여건 탓으로 돌림``, ``자신의 책임을 인정하고 죄책감을 느낌``, ``사고 후 지지적이지 못한 분위기에 실망함``, ``원칙에 보다 충실해짐`` 등이 포함되었다. 결론: 안전사고와 관련된 병원내 조직 문화는 여전히 폐쇄적이고 징벌적인 분위기이며 이로 인해 간호사는 마음의 상처를 크게 받지만 이러한 경험을 통해 간호전문인으로서의 직업관이 더욱 성숙해져 가는 것으로 보인다. 따라서 긍정적인 환자안전문화 조성을 위해서는 안전사고 예방도 중요하지만 부득이한 상황에서 안전사고가 발생한 경우에는 포괄적이면서도 지지적인 간호인적관리 프로그램의 개발과 조직문화 조성이 필요한 것으로 사료된다. The purpose of this study was to describe nurses` experiences of accidents in patient safety. Methods: Data were collected from October 8, 2011 to January 31, 2012 through in-depth interviews with seven nurses who had worked on wards or in the ICU in a university hospital. Data were analyzed by applying Colaizzi`s phenomenological methodology. Results: The following six categories were extracted: Fear of the patient`s condition caused by the accident, Conflict in the accident report, Blame on others and circumstances, Feeling guilty and sorry as the patient`s condition is improving, Being disappointed with the unfavorable atmosphere in dealing with the accident, After the accident, being sensitive in performing nursing duties and being faithful to the principles. Conclusion: The results indicate that the organizational culture in the hospital related to accidents in patient safety is still closed and punitive, and such an atmosphere causes nurses to feel seriously hurt, but through this experience nurses are likely to mature as nursing professionals. Programs on prevention of accidents in patient safety and a system to guard against these accidents should be established. Also the organizational safety culture should be improved.

Petri-net을 이용한 전송 부하 분산 알고리즘에 관한 실험적 비교 연구

이태경 ( Tae Kyung Lee ),김재민 ( Jae Min Kim ) 한국정보처리학회 2011 한국정보처리학회 학술대회논문집 Vol.18 No.2

본 논문에서는 유한한 자원인 네트워크를 보다 많은 이용자가 원활하게 사용하기 위해 고안된 전송 부하 분산 알고리즘인 Round Robin, Weighted Round Robin과 전송 부하 분산 알고리즘이 존재 하지 않는 네트워크를 Petri-net 이론을 기반으로 한 시뮬레이터(CPN-Tools)를 통해 실험 결과를 비교 분석하여 알고리즘의 필요성과 전송 부하 분산 알고리즘의 특징과 장단점을 실험을 통하여 보였다.

밸브 글랜드 반복체결에 따른 패킹마찰계수 거동 시험

이태경(Lee Tae-Kyung),이병학(Lee Byoung-Hak),류동화(Ryu Dong-Hwa) 한국소음진동공학회 2010 한국소음진동공학회 학술대회논문집 Vol.2010 No.10