http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
- 中文 을 입력하시려면 zhongwen을 입력하시고 space를누르시면됩니다.
- 北京 을 입력하시려면 beijing을 입력하시고 space를 누르시면 됩니다.
RISS 인기검색어
- 검색키워드
- 저자 : 이섭(Seob Lee) (검색결과 3 건)
- 무료
- 기관 내 무료
- 유료
-
차세대 공정에 적용 가능한 Cu(B)/Ti/SiO<sub>2</sub>/Si 구조 연구
이섭,이재갑,Lee Seob,Lee Jaegab 한국재료학회 2004 한국재료학회지 Vol.14 No.4
We have investigated the effects of boron added to Cu film on the Cu-Ti reaction and microstructural evolution of Cu(B) alloy film during annealing of Cu(B)/Ti/$SiO_2$/Si structure. The result were compared with those of Cu(B)/$SiO_2$ structure to identify the effects of Ti glue layers on the Boron behavior and the result grain growth of Cu(B) alloy. The vacuum annealing of Cu(B)/Ti/$SiO_2$ multilayer structure allowed the diffusion of B to the Ti surface and forming $TiB_2$ compounds at the interface. The formed $TiB_2$ can act as a excellent diffusion barrier against Cu-Ti interdiffusion up to $800^{\circ}C$. Also, the resistivity was decreased to $2.3\mu$$\Omega$-cm after annealing at $800^{\circ}C$. In addition, the presence of Ti underlayer promoted the growth Cu(l11)-oriented grains and allowed for normal growth of Cu(B) film. This is in contrast with abnormal growth of randomly oriented Cu grains occurring in Cu(B)/$SiO_2$ upon annealing. The Cu(B)/Ti/$SiO_2$ structure can be implemented as an advanced metallization because it exhibits the low resistivity, high thermal stability and excellent diffusion barrier property.
-
Ti glue layer, Boron dopant, N<sub>2</sub>plasma 처리들이 Cu와 low-k 접착력에 미치는 효과
이섭,이재갑,Lee, Seob,Lee, Jae-gab 한국재료학회 2003 한국재료학회지 Vol.13 No.5
Adhesion between Cu and low-k films has been investigated. Low-k films deposited using a mixture of hexamethyldisilane(HMDS) and Para-xylene had a dielectric constant as low as 2.7, showing the thermally stable properties up to $400^{\circ}C$. In this study, Ti glue layer, boron dopant, and $N_2$plasma treatment were used to improve adhesion property of between Cu and low-k films. Ti glue layer slightly improved adhesion property. After $N_2$plasma treatment, the adhesion property was significantly improved due to the increased roughness and the formation of new binding states between Ti and plasma-treated PPpX : HMDS. However, $300^{\circ}C$ annealing of $N_2$plasma treated sample caused the diffusion of Cu into the PPpX : HMDS, degrading the low-k properties. In the case of Cu(B)/Ti/PPpX : HMDS, the adhesion was remarkably increased. This enhanced adhesion was attributed to formation of Ti-boride at the Cu-Ti interface. It is because the formed Ti-boride prevented the diffusion of Cu into the PPpX : HMDS and the Cu-Ti reaction at the Ti interface.
-
강경민,임용택,김철환,이섭,허용,김병열,이정호,Kang, Kyung-Min,Lim, Yong-Taek,Kim, Chul-Hwan,Lee, Seob,Hur, Yong,Kim, Byung-Ryul,Lee, Jung-Ho 대한흉부심장혈관외과학회 1998 Journal of Chest Surgery (J Chest Surg) Vol.31 No.2
폐의 저악성 점액성 낭종은 보고된 예가 매우 드물며 기관지성 낭종 및 뮤신을 분비하는 기관지폐포암 형태의 선암과 감별이 필요하다. 63 세의 여자환자로서 흉부단순촬영 사진에서 우측 폐하엽에서 종괴가 관찰되었다. 술전 경피생검상에서 기관지폐포암으로 진단되었고 우측 폐하엽 절제술 및 임파절 제거술을 시행하였다. 절제된 폐내에서 다양한 크기의 다발성 낭성 종괴들이 보였고 종괴내에는 점액으로 채워져 있었다. 현미경상에서 낭종은 키가 큰 주상구조의 점액성 상피세포들로 구성되어 있었고 한정된 일부분에서 기관지폐포암양 병소가 관찰되었으나 기관지폐포암과 비교하여 세포의 비정형성(atypism)은 부족하였다. 수술후 환자는 합병증없이 퇴원하였고 12개월 추적관찰에서 재발이나 원격전이 소견은 보이지 않았다. 폐의 저악성 점액성 낭종은 술후 예후가 상당히 좋은 것으로 보고 되고 있으며 폐에서 발생하는 다른 신생물과는 감별이 필요할 것이다. Pulmonary mucinous cystic tumor of borderline malignancy is very rare and distinguished from bronchogenic cyst or adenocarcinoma of bronchoalveolar type. We present the case of a 63-year-old woman with a right lower lobe mass, found by chest radiographs. The preoperative diagnosis was made as bronchoalveolar cancer by percutaneous needle aspiration of mass. Right lower lobectomy and lymph node dissections were performed. The lobectomy specimen contained variable sized multilocular cystic mucous masses, filled with mucus. Microscopically, the cystic masses are lined with tall columnar mucinous epithelium but some area contains focal cellular atypism and bronchoalveolar cancer like foci. This foci are lack of cellular atypism consistent with bronchoalveolar cancer cell. After lobectomy the patient has remained free from recurrence and distant metastasis for following 12 months period. Pulmonary mucinous cystic tumor of borderline malignancy appears to have a favorable prognosis and should be distinguished from other lung neoplasms.
ScienceON
코리아스칼라연관 검색어 추천
이 검색어로 많이 본 자료
활용도 높은 자료
