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SECS-II protocol 을 이용한 Auto Insert Off 에 대한 연구
박진우(Park JinWoo),이기두(Lee GiDoo),최상인(Choi SangIn) 대한기계학회 2011 대한기계학회 춘추학술대회 Vol.2011 No.10
Recent semiconductor manufacturing equipments use primarily the SECS-II (SEMI Equipment Communications Standard-II) protocol. This protocol has an advantage that it is an open communication protocol able to transmit messages from equipments to hosts and collect equipment parameters in real time for analysis. In this paper, I suggested AIO (Auto Insert Off) control system using SECS-II protocol. The failure insert will be detected automatically through AIO system and control the operating equipments to minimize equipment halts. This contributes to improving equipment operating efficiency and productivity. Also, collected data can be used to engineers analysis to make faster and correct troubleshooting.