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화학-기계적 연마 공정의 물질제거 메커니즘 해석 Part I: 연성 통합 모델링
석종원,오승희,석종혁,Seok, Jong-Won,Oh, Seung-Hee,Seok, Jong-Hyuk 한국반도체디스플레이기술학회 2007 반도체디스플레이기술학회지 Vol.6 No.2
An integrated material removal model considering thermal, chemical and contact mechanical effects in CMP process is proposed. These effects are highly coupled together in the current modeling effort. The contact mechanics is employed in the model incorporated with the heat transfer and chemical reaction mechanisms. The mechanical abrasion actions happening due to the mechanical contacts between the wafer and abrasive particles in the slurry and between the wafer and pad asperities cause friction and consequently generate heats, which mainly acts as the heat source accelerating chemical reaction(s) between the wafer and slurry chemical(s). The proposed model may be a help in understanding multi-physical interactions in CMP process occurring among the wafer, pad and various consumables such as slurry.
화학-기계적 연마 공정의 물질제거 메커니즘 해석 Part II: 동적 시뮬레이션
석종원,오승희,Seok, Jong-Won,Oh, Seung-Hee 한국반도체디스플레이기술학회 2007 반도체디스플레이기술학회지 Vol.6 No.3
The integrated thermal-chemical-mechanical (TCM) material removal model presented in the companion paper is dynamically simulated in this work. The model is applied to a Cu CMP process for the simulation and the results of the three individual ingredients composing the model are presented separately first. These results are then incorporated to calculate the total material removal rate (MRR) of the Cu CMP. It is shown that the non-linear trend of MRR with respect to the applied mechanical power (i.e., non-Prestonian behavior), which is not well explained with the models established in principle on conventional contact mechanics, may be due to the chemical reaction(s) varying non-linearly with the temperature in the wafer.
연속철근 콘크리트 철도궤도의 도상안정층 수축줄눈 영향 기초 분석
석종환(Jong Hwan Seok),최린(Lyn Choi),조영교(Young Kyo Cho),오한진(Han Jin Oh),김재철(Jai Chul Kim),김성민(Seong-Min Kim) 한국철도학회 2014 한국철도학회 학술발표대회논문집 Vol.2014 No.10
연속철근 콘크리트 궤도(CRCT: Continuously Reinforced Concrete Slab Track)는 철근을 종방향으로 연속적으로 설치하고 횡방향 수축줄눈을 설치하지 않는 연속된 철근 콘크리트 슬래브 궤도 형식이다. 그러나 CRCT 슬래브와 하부 지반 사이에 설치되는 도상안정층(HSB: Hydraulically Stabilized Basecourse)은 일정한 간격으로 수축줄눈을 설치하고 있다. 이러한 HSB층의 수축줄눈 설치에 의해 환경하중에 의한 HSB층의 수축팽창으로 상부의 궤도 슬래브에 자연발생적인 횡방향 균열 이외에 추가적인 반사균열을 유발하고 있다. 따라서 본 연구에서는 HSB층의 수축줄눈 간격과 궤도 슬래브와의 부착 특성이 궤도 슬래브의 응력발생에 미치는 영향에 대하여 기초적인 분석을 수행하였다. The concrete slab in the continuously reinforced concrete slab track (CRCT) has continuous steel reinforcement in the longitudinal direction and does not have transverse contraction joints. However, the hydraulically stabilized basecourse (HSB) beneath the concrete slab has uniformly spaced transverse contraction joints. Because of the expansion and contraction of the HSB due to the existence of the contraction joints in the HSB, the reflection cracks occur in the concrete slab in addition to the naturally formed transverse cracks. Therefore, in this study, the preliminary investigation has been performed to find stresses in the concrete slab depending on the joint spacing of the HSB and the bond characteristics between the concrete slab and the HSB.