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기계적 소성 각인 기반 연속 고속 나노패터닝 시스템 개발
이승조(Seungjo Lee),오동교(Dong Kyo Oh),박재규(Jaekyu Park),김정대(Jeong Dae Kim),이재혁(Jae Hyuk Lee),옥종걸(Jong G. Ok) 대한기계학회 2016 대한기계학회 춘추학술대회 Vol.2016 No.12
We develop a high-throughput nanopatterning system which enables continuous mechanical nanopattern inscribing on flexible substrates by using a rigid grating mold edge. We perform the conceptual design of process principle, specific modeling, and buildup of a real prototype of the system. Several important issues related to processing and controlling, covering precision motion, alignment, heating, and sensing, are carefully addressed to achieve successful nanopatterning in a continuous and high-speed fashion. By tuning the mold shape, temperature, force, and substrate material, various functional nanopatterns can be created with the desired profiles towards many potential applications involving electronics, photonics, displays, light sources, and sensors, particularly requiring large-area and flexible configurations.
롤투롤 나노임프린팅 및 금속 경사증착 기반 대면적 유연 기판 상 3D LSPR 구조의 연속적 제작 및 투명센서 소자 응용
위정섭(Jung-Sub Wi),오동교(Dong Kyo Oh),이성호(Sung Ho Lee),이승조(Seungjo Lee),이규태(Kyu-Tae Lee),김정대(Jeong Dae Kim),이재혁(Jae Hyuk Lee),안주현(Ju Hyun Ahn),이원석(Won Seok Lee),지강민(Kang Min Jee),박인규(Inkyu Park),곽문규(Moon 한국기계가공학회 2017 한국기계가공학회 춘추계학술대회 논문집 Vol.2017 No.4
데스크탑 규모의 간결한 롤투롤 나노임프린팅 기반 나노패턴 연속가공 시스템 개발
이정수(Jeongsoo Lee),이지훈(Jihun Lee),남승범(Seungbum Nam),조성일(Sungil Cho),조용수(Yongsu Jo),고민석(Minseok Go),이승조(Seungjo Lee),오동교(Dong Kyo Oh),김정대(Jeong Dae Kim),이재혁(Jae Hyuk Lee),옥종걸(Jong G. Ok) 한국기계가공학회 2017 한국기계가공학회지 Vol.16 No.1
We have developed a compact desktop-sized nanopatterning system driven by the Roll-to-Roll (R2R) nanoimprinting (NIL) principle. The system realizes the continuous and high-speed stamping of various nanoscale patterns on a large-area flexible substrate without resorting to ponderous and complicated instruments. We first lay out the process principle based on continuous NIL on a UV-curable resin layer using a flexible nanopatterned mold. We then create conceptual and specific designs for the system by focusing on two key processes, imprinting and UV curing, which are performed in a continuous R2R fashion. We build a system with essential components and optimized modules for imprinting, UV curing, and R2R conveying to enable simple but effective nanopatterning within the desktop volume. Finally, we demonstrate several nanopatterning results such as nanolines and nanodots, which are obtained by operating the built desktop R2R NIL system on transparent and flexible substrates. Our system may be further utilized in the scalable fabrication of diverse flexible nanopatterns for many functional applications in optics, photonics, sensors, and energy harvesters.