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평면형 유도결합 플라즈마의 특성 및 선택적 산화막 식각 응용에 관한 연구
양일동(Il-Dong Yang),이호준(Bo-Jun Lee),황기웅(Ki-Woong Whang) 한국진공학회(ASCT) 1997 Applied Science and Convergence Technology Vol.6 No.1
평면형 유도 결합 플라즈마의 전기적 특성을 측정하였고 Langmuir probe를 이용하여 전자의 밀도와 온도를 측정하였다. 코일과 플라즈마를 포함한 총 부하의 저항 성분은 1에서 4Ω까지 변하였고 인덕턱스는 1.5 μH와 2 μH 사이의 값을 가졌다. 10¹¹/㎤ 이상의 고밀도 플라즈마를 발생시켰으며 전자의 온도는 공정 조건에 따라 3에서 5eV까지 변하였다. 산화막 식각시 선택도를 개선하기 위한 방법으로 바이어스 전압을 변조하는 방법을 모색하였다. C₄F_8 플라즈마에서 바이어스 변조 방법을 사용하였을 때 선택도는 크게 향상 되었으나 산화막 식각율이 400 Å/min 이하였다. 선택도 향상을 위해 수소를 첨가한 실험에서 C₄F_8 플라즈마에 60% H₂를 첨가하였을 때 선택도 50이상, 산화막 식각율 2000 Å/min 이상의 결과를 얻을 수 있었다. The electrical characteristics and the plasma parameters of planar inductively coupled plasmas (ICP) have been measured. The resistance of the total load including the coil and the plasma varied from 1 to 4 W and the inductance from 1.5 m to 2 mH when the power was changed from 100 to 1000 W and the pressure from 1 to 10 mTorr. The density of electron measured by Langmuir probe was over 10¹¹/㎤ and the temperature varied between 3 and 5 eV as the process conditions were changed. Bias modulation was adopted as a new method to improve the selectivity of SiO₂ on Si in C₄F_8 (octafluorocyclobutane) plasma. The selectivity was improved as the duty ratio decreased, but the etch rate of SiO₂ decreased below 400 Å/min. H₂ addition to C₄F_8 plasma showed that the etch selectivity could be higher than 50 and the etch rate of SiO₂ over 2000 Å/min when 60% H₂ was added.
권삼영(Sam-Young Kwon),최일윤(Il Yoon Choi),용재철(Jae Chul Yong),강대석(Dae Suk Kang),양일동(Il Dong Yang) 한국철도학회 2014 한국철도학회 학술발표대회논문집 Vol.2014 No.5
300km/h 속도로 주행하며 검측할 고속 검측차용 궤도 검측 모듈을 개발함에 있어서 목표 성능을 적절하고 명확히 수립하는 것은 기본적이며 중요한 일이다. 궤도 검측 모듈은 보다 하위 단위로는 궤도 틀림 검측 모듈, 레일 마모 및 프로파일 측정 모듈, 레일표면 및 침목, 체결구 결함 탐지 모듈 및 선로 순회 점검 모듈로 구성된다. 본 논문은 각 세부 모듈 레벨에서 개발 목표가 되는 기준으로서, EN13848-2를 비롯한 국제 규격, 우리나라 유지보수 지침 및 앞으로 경쟁 상대가 될 타 해외 선진 검측 장비 제작사들의 사양을 검토하고 벤치마킹하여 수립한 궤도 검특 모듈 개발 목표 성능에 대하여 기술한다. It is basic and important works to establish the target performances in the project of developing the high-speed(300km/h) track measuring & inspection modules. The track measuring & inspection modules is consist of, as a unit component, the track geometry measuring module, rail profile measuring module and rail surface/sleeper/fastener inspection module. This paper describes the performances, as a developing targets of the track measuring and inspection modules, established by reviewing the EN13848-2 and Korea’s maintenance regulations, and by bench marking the already developed oversea’s products which will be competitors of ours in the future.
최우용(Woo-Yong Choi),김정연(Jeong-Yeon Kim),양일동(Il-Dong Yang) 대한전기학회 2017 전기학회논문지 Vol.66 No.5
In this paper, we proposed the automatic vision inspection system using multi-layer perceptron to detect the defects occurred on rail surface. The proposed system consists of image acquisition part and analysis part. Rail surface image is acquired as equal interval using line scan camera and lighting. Mean filter and dynamic threshold is used to reduce noise and segment defect area. Various features to characterize the defects are extracted. And they are used to train and distinguish defects by MLP-classifier. The system is installed on HEMU-430X and applied to analyze the rail surface images acquired from Honam-line at high speed up to 300 km/h. Recognition rate is calculated through comparison with manual inspection results.
유영기(Young-Ki Yu),구자명(Ja-Myung Koo),오민수(Min-Soo Oh),양일동(Il-Dong Yang) 대한전기학회 2016 전기학회논문지 Vol.65 No.5
In this paper, we describe a method for precisely measuring the abrasion of the railway using an image processing technique. To calculate the wear of the rails, we provided a method for accurately matching the standard rail profile data and the profile data acquired by the rail inspection vehicle. After the lens distortion correction and the perspective transformation of the measured profile data, we used ICP Algorithm for accurate profile data matching with the reference profile extracted from the standard rail drawing. We constructed the prototype of the Rail Profile Measurement System for High-speed Railway and the experimental result on the three type of the standard rail used in Korea showed the excellent profile matching accuracy within 0.1mm.
홍세은(Se-eun Hong),한문섭(Mun-seop Han),창상훈(Sang-hun Chang),박종국(Jong-gook Park),양일동(Il-dong Yang) 한국철도학회 2012 한국철도학회 학술발표대회논문집 Vol.2012 No.10
직류전기철도는 수송밀도가 높아 사고가 발생하였을 경우 열차지연 및 수송장애가 발생하여 사회적으로 큰 문제가 된다. 또한 직류급전회로에서 사고가 발생하였을 경우, 고장 점을 도보에 의한 현장순회에 따라 탐색하고 고장복구를 실시하고 있지만 이 방법은 시간이 많이 걸려 신속한 고장복구의 과제가 되고 있다. 이전부터 국외에서 고장점표정 장치의 연구개발이 실시되어 왔지만 현재 국내에서는 실용화되고 있지 않다. 직류급전회로의 고장점표정 방법은 중요한 기술이며, 그 필요성이 높다. 본 연구를 통하여 개발하고자 하는 방법은 급전선로의 양단 변전소의 부하전류를 이용하여 신속하고 정확하게 고장점을 표정할 수 있으며 신속한 유지보수 체계를 통해 열차지연 및 수송장애를 극복할 수 있다. Since DC electric railway has high freight density, it causes train delay and bottleneck transportation from accident and social problems from the failure effect. Also, we have restored fault point on foot when fault occurred. However, this fault localization method requires long time and it becomes obstacle to quick and smart fault restoration. Although research on fault locator has been conducted abroad in advance, this technology is not in practical use. Fault locator for DC power dispatch system is important technology with high necessity. With this developing technology from the research, fault point would be quickly and accurately localized by utilizing load current from substations beside catenary line, and train delay and bottleneck transportation would be conquered by quick maintenance system.
Al-Si 도금된 핫스탬핑 보론강의 저항 점용접시 도금층 용융거동 및 너겟 성장에 관한 연구
지창욱 ( Chang Wook Ji ),최일동 ( Il Dong Choi ),김양도 ( Yang Do Kim ),박영도 ( Yeong Do Park ) 대한금속재료학회(구 대한금속학회) 2014 대한금속·재료학회지 Vol.52 No.11
The effect of coating melting behavior on nugget growth during resistance spot welding of hot- stamped boron steels was evaluated. A comparative analysis of the dynamic resistance for bare hot stamped and Al-Si coated hot stamped boron steels was carried out. The dynamic resistance curve of Al-Si coated hot stamped boron steel was higher than bare hot stamped boron steel during the whole stages of weld time. Higher α-peak and β-peak for Al-Si coated hot stamped boron steel resulted in larger nugget size at higher than 4.0 kA weld current owing to non-linear layer structure of alloyed coating, which appears to restrict the current passage through the faying interface. In the case of Al-Si coated hot-stamped boron steel, most of the Al-Fe intermetallic coatings are expected to be pushed away while in the liquid state at the faying interface. The pressure build up during the early stage of weld pushes the liquid Al-Fe intermetallic coating towards the edge of the faying interface. The continuous liquid state of Al-Fe intermetallic through the faying interface ensures the large contact area for the current passage to enlarge the nugget diameter. (Received June 1, 2014)