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반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가
안진홍,강기태,안강호,Ahn, Jin-Hong,Kang, Ki-Tai,Ahn, Kang-Ho 한국반도체디스플레이기술학회 2008 반도체디스플레이기술학회지 Vol.7 No.3
This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.
임계 오리피스를 통과한 입자의 운동특성과 입자 빔에 관한 수치적 연구
안진홍,안강호,Ahn, Jin-Hong,Ahn, Kang-Ho 대한기계학회 1999 大韓機械學會論文集B Vol.23 No.10
Particle motion through a disk type critical orifice placed in a 3.0cm diameter chamber has been studied numerically. In the simulation, the velocity field is solved using Pantankar's SIMPLER algorithm for the compressible flow and convergence of the computation is confirmed if the mass source at each control volume is smaller than $10^{-7}$. The particle motion in the flow field is solved in Lagrangian method. The particle trajectories showed that the particles injected away from the center line are expanded rapidly. At lower pressures, this expansion phenomena are more dominant. At lower pressures, the clear difference in particle and air speed is showed all the way down to the exit plan. It was found that particles with Stokes number of ca.2.5 tend to focus close to the center line very well except the particles travelling near the wall. However, particles with Stokes number greater than ca.2.5 show a tendency to cross the center line.
초순수 물(Ultra Pure Water)내 비휘발성 잔류 물질(Nonvolatile Residue, NVR)의 모니터링을 위한 NVR 측정시스템의 개발
정혁,안진홍,안강호,Chung, Hyeok,Ahn, Jin-Hong,Ahn, Kang-ho 한국반도체디스플레이기술학회 2010 반도체디스플레이기술학회지 Vol.9 No.1
In this study, we developed nonvolatile residue (NVR) real-time monitoring system to measure the nonvolatile residue particle in ultra pure water (UPW). This device has a capability of measuring 4 different channels, i.e., 10 nm, 30 nm, 50 nm, and 100 nm. Until now, the light scattering method to detect RAE(residue after evaporation) was the only choice. However, this method can detect RAE larger than ca. 50 nm. In ultra pure water, RAE particles are usually very small and hard to detect with conventional laser scattering devices. To detect very small RAEs, a new system is developed and tested. The system consists of an atomizer that generates RAE particles and a four channel condensation particle counter (CPC). During the several months' operation in manufacturing line, the system was successfully tested and showed reliable results.
300 mm 웨이퍼 위의 에어로졸 나노 입자의 증착 장비 개발을 위한 수치 해석적 연구
안강호,안진홍,이관수,임광옥,강윤호,Ahn, Kang-Ho,Ahn, Jin-Hong,Lee, Kwan-Soo,Lim, Kwang-Ok,Kang, Yoon-Ho 한국반도체디스플레이기술학회 2005 반도체디스플레이기술학회지 Vol.4 No.1
The nanoparticle deposition chamber, which is used for quantum dot semiconductor memory applications, is designed by means of numerical simulation. In this research, the numerical simulations for deposition chamber were performed by commercial software, FLUENT. The deposition of nanoparticles is calculated by diffusion force, thermophoresis and electrophoresis of particles. As a results, when the diffusion force was considered, the most of particles deposited in the wall of deposition chamber. But as considering thermophoresis and electrophoresis of particles, the particles were deposited wafer surface, perfectly.
100 nm NIST 표준입자를 이용한 미분형 전기 이동도 분석기의 교정 및 불확실도 측정
이상진,안진홍,안강호,Lee, Snag-Jin,Ahn, Jin-Hong,Ahn, Kang-Ho 대한기계학회 2003 大韓機械學會論文集B Vol.27 No.12
House made differential mobility analyzer(DMA) is calibrated with NIST SRM 1691(300 nm PSL). Then the particle size and uncertainty for differential mobility analyzer(DMA) using the NIST SRM 1963(100 nm PSL). In result, calibration of prototype DMA is measured using 300 nm NIST SRM 1691, then sheath air flow was corrected 126.67 ㎤/s. Corrected sheath air flow is used in uncertainty measurement of prototype DMA. Uncertainty analysis is performed using NIST SRM 1963(100 nm PSL). The experimental result shows that NIST SRM 1963 is measured as 102.17 nm with a type A uncertainty of 0.33 nm.
Flicker Mitigation in a Wind Farm by Controlling a Permanent Magnet Synchronous Generator
팜반호안,김대현,안진홍,김일환,오성보,김호찬,김세호,Hoan, Pham Van,Kim, Dae-Hyun,Ahn, Jin-Hong,Kim, Eel-Hwan,Oh, Seong-Bo,Kim, Ho-Chan,Kim, Se-Ho Institute of Control 2009 제어·로봇·시스템학회 논문지 Vol.15 No.12
The power quality of wind energy becomes more and more important in connecting wind-farms to the grid, especially weak grid. This paper presents the simulation of a wind farm of a permanent magnet synchronous generator (PMSG) and a doubly fed induction generator (DFIG). Flicker mitigation is performed by using PMSG as a static synchronous compensator (STATCOM) to regulate the voltage at the point of common coupling (PCC). A benefit of the measure is that integrating two function of to control the active power flow and to reduce the voltage flicker in a wind farm. Simulation results show that controlling PMSG is an effective and economic measure in reducing the flicker during continuous operation of grid connected wind turbines regardless of short circuit capacity ratio, turbulence intensity and grid impedance angle.