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나노조작기 및 집속이온빔을 이용한 정밀 나노튜브 탐침의 제작
정기영(Jung Ki Young),박병천(Park Byong Chon),안상정(Ahn Sang Jung),최진호(Choi Jinho) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
Precision carbon nanotube tip for atomic force microscope was fabricated where carbon nanotube orientation is controlled within the precision of 1 degree. The orientation, diameter and length of carbon nanotube tip are crucial factors for faithful profiling of surface patterns. With a nano-manipulation while viewing scanning electron microscope live image followed by focused ion beam process, precision carbon nanotube tip could be made. Precision carbon nanotube tip acts as a normal nanotube tip without Focused ion beam process. Further it maintains the elasticity. Precision tip can, in principle, enter the trench or hole less than 70 ㎚, which is impossible with the current state of the art silicon tip for critical dimension atomic force microscope.
崔振鎬(Jinho Choi),安商丁(Sang Jung Ahn),朴丙天(Byong Chon Park),柳?(Joon Lyou) 대한전기학회 2008 전기학회논문지 Vol.57 No.10
Nano manipulator is used to manufacture Carbon Nano'Tube (CNT) tips. Using nano manipulator, operator attaches a CNT at the apex of Atomic Force Microscope(AFM) tip, which requires a mastery of mechanics and long manufacture time. Nano manipulator is installed inside a Scanning Electron Microscope (SEM) chamber to observe the operation. This paper presents a control scheme for horizontal axes of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, and the position information so obtained is fed to control horizontal axes of nano manipulator. That is, a visual servoing loop is realized to control the axes more precisely in nano scale.
나노조작기의 수평축 위치제어를 위한 Visual Servoing Loop 구성
최진호(Jinho Choi),박병천(Byong Chon Park),안상정(Sang Jung Ahn),김달현(Dal-Hyun Kim),유준(Joon Lyou) 대한전기학회 2007 대한전기학회 학술대회 논문집 Vol.2007 No.10
Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator. operator attaches a CNT at the end of Atomic Force Microscopy(AFM) tip, which requires a master mechanic and long manufacture time. Nano manipulator is installed inside Scanning Electron Microscopy (SEM) chamber to observe the operation. This paper presents a control of horizontal axis of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, the position information so obtained is fed to control horizontal axis of nano manipulator. To be specific, visual servoing loop was realized to control the axis more precisely.