전력 케이블에서 발생되는 방전 신호의 분포패턴에 관한 특성 분석

소순열,홍경진,정우성,임장섭,이진,이준웅,김태성,So, Soon-Youl,Hong, Kyung-Jin,Jung, Woo-Seong,Lim, Jang-Seob,Lee, Jin,Lee, Joon-Ung,Kim, Tae-Sung 한국전기전자재료학회 1998 전기전자재료학회논문지 Vol.11 No.11

After the 1990's, a computer-aided partial discharge(PD) measurement system was referred in part of aging diagnosis using digital signal processing as the new technology has been studied. The PD patterns and relevant information for pattern recognition are discussed in PD research area, because discharge quantity(q), the number of discharge pulse(n) and the applied boltage phase($\varphi$) was combined with the system information of the aging state. This paper investigates the discharge phase and quantity, as well as the number of discharge(n) with regard to discharge signals generated in power cable. therefore, according to characteristic analysis on the distribution of $\varphi$, q and n, it is able to apply in the aging analysis of power cable which visual observation is impossible and distribution change of discharge signals offers much information for risk degree on aging progress of insulation materials.

Ar 플라즈마 상태에서 PLAD법에 의한 탄소 입자의 운동 모델링

소순열,임장섭,So, Soon-Youl,Lim, Jang-Seob 한국조명전기설비학회 2005 조명·전기설비학회논문지 Vol.19 No.4

고본 논문에서는 시뮬레이션 기법을 통하여 RAD법을 Ar 플라즈마 상태에서 구동하도록 설정하였다. 이것은 플라즈마를 구성하는 요소들이 PLAD법에 의해 방출된 각 입자들에 어떠한 영향을 미치는가를 확인하고자 하였으며, 특히 방출된 입자들의 운동 에너지 및 밀도를 제어할 수 있을 것으로 기대되어지기 때문이다. Ar 플라즈마의 방전 공간내에서, RAD법에 의한 전자, 탄소 이온$(C^+)$ 및 탄소 원자(C)의 운동 과정을 보다 정확히 계산하기 위해서 입자 및 유체 모델을 융합한 1차원 하이브리드 모델을 계발하였다. 그 결과 쉬스 내에 형성되는 전위를 제어함으로써 기판에 도달하는 $C^+$의 밀도 및 에너지를 제어할 수 있는 것으로 기대되어졌다. A plused laser ablation deposition(PLAD) technique has been used for producing fine particle as well as thin film at relatively low substrate temperatures. However, in order to manufacture and evaluate such materials in detail, motions of plume particles generated by laser ablation have to be understood and interactions between the particles by ablation and gas plasma have to be clarified. Therefore this paper was focused on the understanding of plume motion in laser ablation assisted by hi plasmas at 100[mTorr]. One-dimensional hybrid model consisting of fluid and particle models was developed and three kinds of plume particles which are carbon atom(C), $ion(C^+)$ and electron were considered in the calculation of particle method. It was obtained that ablated $C^+$ was electrically captured in Ar plasmas by strong electric field(E). The difference between motions of the ablated electrons and $C^+$ made E strong and the collisional processes active. The energies of plume particles were investigated on a substrate surface. In addition the plume motion in Ar gas was also calculated and discussed.

전극 구조에 관한 2차원 RF 플라즈마의 모델링

소순열,임장섭,김철운,So, Soon-Youl,Lim, Jang-Seob,Kim, Chel-Woon 한국조명전기설비학회 2005 조명·전기설비학회논문지 Vol.19 No.4

본 연구에서는 2차원적 유체 모델을 통하여 보다 실질적인 플라즈마를 이해하고자 하였으며, 기하학적인 방전전극 구조를 반영하도록 전극단에서 챔버 외벽의 거리를 변화시키면서 플라즈마의 특성을 정량적으로 비교 분석하고자 하였다. 방전 챔버의 구조로서, 전극의 반경과 방전 챔버의 높이는 일정하게 유지하면서 방전 챔버의 넓이를 변화시킴에 따라 형성되는 플라즈마의 특성을 분석하였다. 그 결과, 전극단과 챔버 외벽의 거리가 짧을수록 그 영역에서 전계가 강하게 형성되어, 외벽을 향하는 각 입자들의 움직임도 매우 활발하다는 것을 알 수 있었다. 또한, 전각단과 외벽과의 거리가 짧을수록 전극 면상에서 형성되는 입자들의 수밀도와 유속의 변화가 일정하게 형성되는 것을 알 수 있었다. 이러한 결과는 웨이퍼의 대구경화에 따른 플라즈마의 균일성을 고려할 경우에 매우 효과적일 것으로 고려되어 진다. Plasma researches using parallel-plate electrodes are widely used in semiconductor application such as etching and thin film deposition. Therefore, a quantitative understanding and control of plasma behavior are becoming increasingly necessary because their important applications and simulation techniques have been actively carried out in order to solve such problems above. In this paper, we developed a two-dimensional(2D) self-consistent fluid model, because 2D models can deal with real reactor geometries. The fluid model is based on particle continuity equations for taking account of an electrode system in a cylindrical geometry. An pure Ar gas was used at 500[mTorr] and radio-frequency (13.56(MHz)). Four models were simulated under the different electrode geometries which have chamber widths of 5.25, 6.0, 8.0, and 10.0[cm] and we compared their results with each other. Plasma uniformity and a do self-bias voltage were also discussed.

비대칭 전극계에서의 1차원적 RF 플라즈마 모델링에 관한 연구

소순열,임장섭,So Soon-Youl,Lim Jang-Seob 한국조명전기설비학회 2004 조명·전기설비학회논문지 Vol.18 No.5

In computational study on RF(Radio Frequency) plasmas, a 1D fluid models with an advantage of a short computational time are often adopted. However, in order to obtain realistic calculation results under a typical chamber geometry with unequal-sized electrodes, modeling of the plasma space is an issue to be investigated. In this paper, it is focused on that how much a 1D model can approximate a 2D model. 1D fluid models with unequal-sized electrodes, which have spherical and frustum geometry systems, were developed and their results were compared with those of 2D model with Gaseous Electronic Conference cell structure. Behavior of $N_2$ RF plasmas has been simulated using 1D and 2D fluid models and a technique to take account of unequal-sized electrodes in a 1D fluid models has been examined. Features of the plasma density and the electric potential were discussed as characteristic quantities representing the asymmetry of the chamber geometry. 본 연구에서 사용된 방전 기체는 오염물의 제거 및 박막 표면 정제 등의 연구 분야에 응용되고 있는 질소 가스를 사용하였으며, 1차원 동심구 모델의 개발로 인하여, 접지 면적을 넓게 함에 따라 경방향으로의 플라즈마 분포가 중심축의 분포와 동일하다는 1차원적 가정이 적절하지 못하다는 Barnes 모델을 보완할 수 있었다. 일정한 인가 전압하에서는 입체각($\omega$)의 증가에 따라 질소 플라즈마를 구성하는 각 입자의 수밀도 분포, 전계 및 포텐셜이 감소함을 볼 수 있었다. 그러나 면적비가 증가하면서 구동 전극에서의 각 입자들의 움직임은 상대적으로 높은 전계로부터 더욱 활발하게 형성됨에 따라 직렬 연결된 블로킹 콘덴서에서 발생하는 자기 바이어스 전압은 증가하는 것을 알 수 있었다.

레이저 용삭법에 의한 플라즈마의 진전 모델링

소순열,이진,So Soon-Youl,Lee Jin 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.5

The study on laser-ablation plasmas has been strongly interested in fundamental aspects of laser-solid interaction and consequent plasma generation. In particular, this plasma has been widely used for the deposition of thin solid films and applied to the semiconductors and insulators. In this paper, we developed and discussed the generation of carbon ablation plasmas emitted by laser radiation on a solid target, graphite. The progress of carbon plasmas by laser-ablation was simulated using Monte-Carlo particle model under the pressures of vacuum, 1 Pa, 10 Pa and 66 Pa. At the results, carbon particles with low energy were deposited on the substrate as the pressure becomes higher However, there was no difference of deposition distributions of carbon particles on the substrate regardless of the pressure.

전자충돌과정을 통한 SF₆ 혼합기체의 절연특성 분석

소순열,So, Soon-Youl 대한전기학회 2010 전기학회논문지 P Vol.59 No.2

$SF_6$ gas would be used in power transformer, GIS (Gas insulated switchgear) and so on because of its electrically superior insulation and chemically stable structure. Recently, the reduction of $SF_6$ is required to avoid global warming and the researches on the dilution of $SF_6$ with other gases have been carried out. $SF_6$ mixture gases with $N_2$ and $C_xF_y$ have drawn attention to the synergy effect. However, in order to understand the mechanism of the synergy effect, it is important to analyze and evaluate properties of mixture gases quantitatively. In this paper, we investigated the mechanism of synergy effect from electron collision processes and electron energy distribution by solving Boltzmann equation with propagator method. Three kinds of gases for dilution of $SF_6$ ($SF_6/N_2$, $SF_6/CF$4 and $SF_6/C_4F_8$) are considered in this simulation. On the properties of $SF_6/N_2$ mixture gas, the variation of reduced electric field was shown highly within 0%~40% mixtures of $SF_6$. And the more low-level electron energy has been distributed, the higher insulation capability has appeared.

$SF_6/N_2$ 혼합기체의 대기압 플라즈마 특성 분석

소순열,이진,So, Soon-Youl,Lee, Jin 대한전기학회 2009 전기학회논문지 P Vol.58 No.4

Atmosphere Plasmas of Gas Discharge (APGD) have been used in plasma sources for material processing such as etching, deposition, surface modification, etc. This study is to investigate and understand the fundamental plasma discharge properties. Especially, $SF_6/N_2$ mixed gas would be used in power transformer, GIS (Gas insulated switchgear) and so on. In this paper, we developed a one dimensional fluid simulation model with capacitively coupled plasma chamber at the atmosphere pressure (760 [Torr]). 38 kinds of $SF_6/N_2$ plasma particles which are an electron, two positive ions (${SF_5}^+$, ${N_2}^+$), five negative ions (${SF_6}^-$, ${SF_5}^-$, ${SF_4}^-$, ${F_2}^-$, ${F_1}^-$), thirty excitation and vibrational particles for $N_2$ were considered in this computation. The $N_2$ gases of 20%, 50%, 80% were mixed in $SF_6$ gas. As the amount of $N_2$ gas was increased, the properties of electro-negative plasma moved toward the electro-positive plasma.

SF<SUB>6</SUB>/N₂ 혼합기체의 DC 플라즈마 특성 분석

소순열(Soon-Youl So) 대한전기학회 2014 전기학회논문지 Vol.63 No.10

SF6 gas has been used for power transformers or gas insulated switchgears, because it has the superior insulation property and the stable structure chemically. It has been, however, one of global warming gases and required to reduce the its amount. Some papers have reported that its amount could be reduced by mixing with other gases, such as N₂, CF₄, CO₂ and C₄F8 and their mixture gases would cause the synergy effect. In this paper, we investigated the characteristics of DC plasmas on SF6 mixture gases with N₂ at atmospheric pressure. N₂ gas is one of cheap gases and has been reported to show the synergy effect with mixing SF6 gas, even though N₂ plasmas have electron-positive characteristics. 38 kinds of SF6/N₂ plasma particles, which consisted of an electron, two positive ions, five negative ions, 30 excitation and vibration particles, were considered in a one dimensional fluid simulation model with capacitively coupled plasma chamber. The results showed that the joule heating of SF6/N₂ plasmas was mainly caused by positive ions, on the other hand electrons acted on holding the SF6/N₂ plasmas stably. The joule heating was strongly generated near the electrodes, which caused the increase of neutral gas temperature within the chamber. The more N₂ mixed-ratio increased, the less joule heating was. And the power consumptions by electron and positive ions increased with the increase of N₂ mixed-ratio.

직류 대기압 플라즈마 방전 특성분석

소순열(Soon-Youl So),이진(Jin Lee),임장섭(Jang-Seob Lim) 대한전기학회 2011 대한전기학회 학술대회 논문집 Vol.2011 No.4-1

대기압 Ar 가스의 직류 글로우 방전 특성분석

소순열(Soon-Youl So) 대한전기학회 2010 전기학회논문지 P Vol.59 No.4

Atmosphere Plasma of Gas Discharge (APGD) has been used in plasma sources for material processing such as etching, deposition, surface modification and so on due to having no thermal damages. The APGD researches on AC source with high frequency have been mainly processed. However, DC APGD studies have been not. In order to understand APGD further, it is necessary to study on fundamental properties of DC APGD. In this paper, we developed a one-dimensional fluid simulation model with capacitively coupled plasma chamber at the atmosphere pressure (760 [Torr]). Nine kinds of Ar discharge particles such as electron (e), positive ions (Ar?, Ar₂?) and neutral particles (Arm*, Arr*, Arh*, Ar₂*(1), Ar₂*(3) and Ar gas) are considered in the computation. The simulation was worked at the current range of 1~15 [mA]. The characteristics of voltage-current were calculated and the structure of Joule heating were discussed. The spatial distributions of Ar DC APGD and the mechanism of power consumption were also investigated.