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압전구동기 히스테리시스를 고려한 마이크로스테이지 모델링 및 특성 개선
배규현(Gyu-Hyun Bae),최수창(Soo-Chang Choi),이득우(Deng-Woo Lee),홍성욱(Seong-Wook Hong) 한국생산제조학회 2009 한국공작기계학회 추계학술대회논문집 Vol.2009 No.-
Precise stages often employ piezoactuators of which inherent hysteretic characteristics cause a nonlinear behavior to the stages. This paper presents a dynamic model for a micro-stage with a displacement magnification mechanism which includes the hysterisis model for the piezoactuators. The previous study reveals that the proposed micro-stage provides large displacement but it is subjected to severe residual vibration because of little damping engaged in the displacement magnification mechanism. Although the input shaping method is useful for reducing such residual vibration, it proves to be ineffective when a large input is applied to the system. The present paper investigates the dynamic characteristics of the system of which piezoactuator characteristics are included. The simulation results show that the actuator hysterisis can change the dynamic characteristics of the system and the employment of robust input shapers is able to compensate the performance deterioration of input shaping due to the hysterisis.