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자기력을 이용한 비접촉 6자유도 미소위치결정 기구의 개발-설계, 모델링 및 제어-
최기봉,박기환,김수현,곽윤근,Choi, Kee-Bong,Park, Kyi-Hwan,Kim, Soo-Hyun,Kwak, Yoon-Keun 대한기계학회 1996 大韓機械學會論文集A Vol.20 No.4
A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.
김상채,김수현,박기환,곽윤근,Kim, Sang-Chae,Kim, Soo-Hyeon,Park, Kyi-Hwan,Kwak, Yun-Keun 대한기계학회 1996 大韓機械學會論文集A Vol.20 No.5
In this work, a precies actuator which is capable of high positioning accuracy is developed. For estimation the dynamic behavior of the actuator, system modeling is performed by employing a stick-slip frection law. Dynamic characteristics over various types of driving input signals and vibraiton loci of the driving tip are examined by experiments. Phase differences between the input signals are applied, and the dynamic behavior of slider is investigated. From the simulation and experimental results, it is observed that the dynamic behaviors from the simulation results agree fairly well to those of the experimental results. Thisindicates that the model developed in this work is applicable to other precision mechanisms in which a friction farce is as improtant factor for actuation.