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기계적 합금화법에 의한 V-Al 합금의 미세조직 변화에 관한 연구
최운,김하영,남승의 ( Woon Choi,Ha Young Kim,Seoung Eui Nam ) 한국주조공학회 1991 한국주조공학회지 Vol.11 No.6
N/A The formation of brittle intermetallic compound such as VAl₃tends tp lower the toughness of V-Al alloys. Also, due to the high melting point of vanadium, it is difficult to make that alloy by previous ingot metallurgy method. To depress the technique has been adopted. The effect of particle size and milling time on the phase has been thoroughly studied. For mechanical alloying, SPEX mixed /mill has been used. The milling time and the composition of V and Al are varied to find the optimum condition of forming amorphous phase. The X-Ray Diffrection pattern, microstructure detection, microhandess test, experiments are carried out to analyze MA product. When the final step is reached, no lamellar-structure is detected. The steady state condition is observed after 8 hours and 10 hours milling for 15wt.%Al and 30wt.%Al alloy, respectively. The microhardness continuously increases up to 10hours after then it remains constant.
RF PECVD로 증착된 다이아몬드상 탄소막의 보조가스 첨가의 영향
최운,김형준,남승의,Choi, Woon,Kim, Hyoung-June,Nam, Seoung-Eui 한국재료학회 1997 한국재료학회지 Vol.7 No.1
DLC막은 여러가지 기술적인 응용에 매우 기대된느 재료이다. 탄화수소 가스의 플라즈마 분해에 의해 증착되는 DLC 막은 높은 경도, 화학적 안정성, 높은 전기 저항성, 적외선 영역의 투과성 등의 여러가지 우수한 성질을 지니고 있다. 그러나 이들막은 높은 내부응력으로 인하여 실제 응용에 상당한 제약을 받고 있다. 본 연구에서는 rf PECVD 법에 의해 합성된 다이아몬드상 탄소막을 보조가스 첨가에 따른 영향에 대하여 조사하였다. 수소가스를 첨가하여 합성된 DLC막의 잔류응력 거동은 낮은 이온 에너지 (V$_{b}$ $P^{1}$2/-20Volt/m Torr)에서 최대 잔류응력이 발생되지만, 질소 가스를 첨가시키면 높은 이온(V$_{b}$ P$_{1}$2/->70Volt/m Torr)에너지 영역에서 잔류응력의 감소가 나타났다. 수소 량이 증가하면 ion bombardment와 식각 작용을 하고, 질소의 경우 막의 표면 스퍼터링 현상이 발생되었다. 보조가스 첨가에 따라 S$P^{3}$net work구조의 생성과 소멸의 결합 구조를 형성하여, 보조가스 첨가는 DLC막의 잔류응력 거동에 영향을 미치는 것을 알 수 있었다. 이온 에너지에 따른막의 비저항은 막 합성 공정 조건에 관계없이 $10^{6}$-$10^{7}$ Ωm 의 범위에서 분포하고 있는 것으로 조사되었다. 이는 메탄가스(rf PECVD)로 합성된 DLC막의 비저항과 거의 일치하는 것으로 나타났다.
SiCw / Al 복합재료의 열처리에 따른 계면 현상에 관한 연구
오혁진,방명성,이의길,남승의 ( Hyeok Jin Oh,Myung Sung Bang,Eui Kil Lee,Seoung Eui Nam ) 한국주조공학회 1992 한국주조공학회지 Vol.12 No.6
N/A In the present study, the effects of Al /SiC interface reaction and the formation of Al₄C₃ compounds on the mechanical properties of the Al /SiC composites prepared by squeeze casting were investigated. After squeeze casting, the size of dendrites in Al without whiskers were larger than those with whiskers. The hardness of composite materials (about 72Hv) was found to be approximating 40% higher than that of matrix metal (29Hv), which gradually increases which heat treatment Time showing maximum hardness at 12hr. The observation of increasing number of compounds in 12hrs heat treatment suggests that these compounds are responsible for the increase of hardness. By X-ray diffraction studies, those compounds were identified as Al₄C₃, (Al, Si). And intensity of Si peak increased. The tensile strengh of composite materials was gradually decresed by heat tretment, which was in contrast to the behavior of hardeness. With incresing heat tretment time, the fracture mode of composite materials was changed from large dimples and pull-out form of fiber to the fracture and rupture foum of fiber.
Double rectangular spiral thin film inductor의 제조에 관한 연구
김충식(Choong-Sik Kim),신동훈(Dong-Hoon Shin),정종한(Jong-Han Jeong),남승의(Seoung-Eui Nam),김형준(Hyoung-June Kim) 한국진공학회(ASCT) 1999 Applied Science and Convergence Technology Vol.8 No.4(1)
DC-DC converter와 같은 전원공급 장치에 사용되는 인덕터의 평면구현을 위해서는 자기적 신호의 증폭을 담당하는 자성막과, 전기적 신호를 자기적 신호로 변조시키는 코일부, 자성막과 코일부의 전기적 절연을 담당하는 절연막의 평면화가 이루어져야 한다. 본 실험에서는 이러한 조건을 만족시키는 자성박막으로서 Ti/FeTaN 박막을 사용하였으며(포화 자속 밀도(4πM_s : 15~16 kG, Hc : 0.12~0.17 Oe, μ¹ : 2800(Ea)~4000(Ha)) 코일부는 전기도금을 이용한 선택적 전기도금법, 절연막으로는 SiO₂막를 사용하였다. 제조된 인덕터는 상호 인덕턴스의 부호가 양을 나타내는 double rectangular spiral 형태였으며 5 Mz에서 약 7정도의 성능지수(Q=wL/R)를 나타내었다. Planar type thin film inductors have a potential for the application of miniaturized DC-DC converters. For those high current applications, the magnetic film with high current capability is required. The current capability of magnetic films is mainly determined from high saturation magnetization (4πM,) as well as large anisotropy field (H_k). We fabricated a double rectangular spiral thin film inductor which consist of magnetic layer, coil and insulator. Highest inductance values as well as best frequency characteristics can be obtained from 5 ㎒ and quality factor exhibit about 7.
폐자로형 평면 인덕터의 제조 및 고주파 특성에 관한 연구
이창호(Chang-Ho Lee),신동훈(Dong-Hoon Shin),남승의(Seoung-Eui Nam),김형준(Hyoung-June Kim) 한국자기학회 1998 韓國磁氣學會誌 Vol.8 No.4
In accordance with tendency to miniaturization and high frequency operation of electronic products, extensive efforts of miniaturizing magnetic devices such as inductors, transformers and magnetic sensors are being made. In order to study on fabrication and characteristic of micro-magnetic devices, we carried out two sets of experiments. One is to develop a magnetic film that is suitable for high frequency operation, and the other is to develop the fabrication processes for realizing the micro-coil with meander shape. Magnetic films were composed of FeTa (N,C) fabricated by DC magnetron sputtering system. Their microstructures were nanocrystalline structure and magnetic properties showed Bs : 13~17 kG, Hc : 0.1~0.2 Oe and μ' : 2000~4000. Cu coil pattern fabricated by selective electroplating process showed good electrical conductivity. In the case of air core inductors, inductance (L) of 50 nH, resonance frequency (f_R) of 700 ㎒, and quality factor (Q) of 30 at 200 ㎒ could be obtained. In the case of close type magnetic inductors, inductance (L) of 150 nH, resonance frequency (f_R) of 100 ㎒, and quality factor (Q) of 4 at 10~30 ㎒ could be obtained.
Fe - (BN,SiN)박막의 미세구조와 자기특성에 관한 연구
신동훈(Dong-Hoon Shin),이창호(Chang-Ho Lee),안동훈(Dong-Hoon Ahn),남승의(Seoung-Eui Nam),김형준(Hyoung-June Kim) 한국자기학회 1998 韓國磁氣學會誌 Vol.8 No.3
We have investigated the magnetic properties of FeBN and FeSiN films deposited by RF magnetron reactive sputtering system. It was investigated that the compositions of B, Si and N were the main factors influencing the soft magnetic properties and film resistivity. The addition of small amount of N significantly improve the soft magnetic properties and electrical resistivity. The FeBN and FeSiN films were showed good soft magnetic properties which were Hc<1 Oe, Bs: 18~19 kG and ?'>1000 values. The composition of films were Fe_(75)(BN)_(25), Fe(BiN)₂₂ and resistivity was 100~120 μΩ-㎝. but, futher increase in B, Si and N concentration degraded the soft magnetic properties due to formation of nitride such as Fe₄N compound.
Patterned FeTaN 연자성 박막을 이용한 RF inductor의 제조
배석(Seok Bae),김충식(Choong-Sik Kim),류성룡(Sung-Ryong Ryu),남승의(Seoung-Eui Nam),김형준(Hyoung-June Kim),송재성(Jae-Sung Song),마사히로 야마구치(Masahiro Yamaguchi) 한국자기학회 2001 韓國磁氣學會誌 Vol.11 No.6
Recently, RF inductor having researched by many workers, we fabricated and investigated properties of RF inductors. In order to improve the Q-factor (Quality), we try to apply the patterned Fe_(78.81)Ta_(8.47)N_(12.71) soft magnetic thin film of 5000 Å which shows magnetic anisotropy of 30 Oe. Thus, patterned magnetic film was artificially increased magnetic anisotropy lead to increasing of ferro-magnetic resonance frequency up to ㎓ band. Coil as part of inductor was fabricated by lift off process. The dimension of RF inductor was designed 4 turn, rectangular shape, and measured properties. In the case of Ti/Ag air core type inductor shows Q of 9, inductance of 8.4 nH at 2 ㎓. Magnetic film employed inductor shows inductance of 9 nH and FMR resonance frequency was 700 ㎒.