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게이트를 상정한 니켈 코발트 복합실리사이드 박막의 물성연구
김상엽,정영순,송오성,Kim, Sang-Yeob,Jung, Young-Soon,Song, Oh-Sung 한국마이크로전자및패키징학회 2005 마이크로전자 및 패키징학회지 Vol.12 No.2
We fabricated Ni/Co(or Co/Ni) composite silicide layers on the non-patterned wafers from Ni(20 nm)/Co(20 nm)/poly-Si(70 nm) structure by rapid thermal annealing of $700{\~}1100^{\circ}C$ for 40 seconds. The sheet resistance, cross-sectional microstructure, and surface roughness were investigated by a four point probe, a field emission scanning electron microscope, and a scanning probe microscope, respectively. The sheet resistance increased abruptly while thickness decreased as silicidation temperature increased. We propose that the poly silicon inversion due to fast metal diffusion lead to decrease silicide thickness. Our results imply that we should consider the serious inversion and fast transformation in designing and process f3r the nano-height fully cobalt nickel composite silicide gates. 궁극적으로 게이트를 저저항 복합 실리사이드로 대체하는 가능성을 확인하기 위해 70 nm 두께의 폴리실리콘 위에 각 20nm의 Ni, Co를 열증착기로 적층순서를 달리하여 poly/Ni/Co, poly/Co/Ni구조를 만들었다. 쾌속열처리기를 이용하여 실리사이드화 열처리를 40초간 $700{\~}1100^{\circ}C$ 범위에서 실시하였다. 복합 실리사이드의 온도별 전기저항변화, 두께변화, 표면조도변화를 각각 사점전기저항측정기와 광발산주사전자현미경, 주사탐침현미경으로 확인하였다. 적층순서와 관계없이 폴리실리콘으로부터 제조된 복합실리사이드는 $800^{\circ}C$ 이상부터 급격한 고저항을 보이고, 두께도 급격히 얇아졌다. 두께의 감소는 기존의 단결정에서는 없던 현상으로 폴리실리콘의 두께가 한정된 경우 금속성분의 inversion 현상이 커서 폴리실리콘이 오히려 실리사이드 상부에 위치하여 제거되기 때문이라고 생각되었고 $1000^{\circ}C$ 이상에서는 실리사이드가 형성되지 못하였다. 이러한 결과는 나노급 두께의 게이트를 저저항 실리사이드로 만 들기 위해서는 inversion과 두께감소를 고려하여야 함을 의미하였다.
김상엽,Kim, Sang-Yeob 대한물리치료과학회 2001 대한물리치료과학회지 Vol.8 No.2
Delayed onset muscle soreness is a sensation of discomfort that occurs 24 h after exercise, and it is associated with the performance of unfamiliar and high force muscle work, such as eccentric contractions. The injury to the muscle has been well described but the mechanism underlying the injury is not fully understood. Although the pathophysiological processes underlying delayed onset muscle soreness are not completely understood, many researchers have investigated various treatments in a attempt to reduce the soreness. Physical therapy is the most importance techniques to reduce delayed onset muscle soreness. The purpose of this study is to investigate the effect of a cryotherapt on DOMS. Thirty subjects were randomly assigned to experimental group : control, cryotherapy, and placebo group. Elbow flexion range, mechanical pain threshold. and subjective pain were measured 30 min before DOMS was induced and 24, 48, 72 hours after DOMS was induced. The results of this study were as follows: 1. Elbow flexion range showed significant difference each time, especially at 48 and 72 hours 2. Mechanical pain thershold and subjectively pain showed no significant difference between group.
폴리실리콘 기판 위에 형성된 코발트 니켈 복합실리사이드 박막의 열처리 온도에 따른 물성과 미세구조변화
김상엽,송오성,Kim, Sang-Yeob,Song, Oh-Sung 한국재료학회 2006 한국재료학회지 Vol.16 No.9
Silicides have been required to be below 40 nm-thick and to have low contact resistance without agglomeration at high silicidation temperature. We fabricated composite silicide layers on the wafers from Ni(20 nm)/Co(20 nm)/poly-Si(70 nm) structure by rapid thermal annealing of $700{\sim}1100^{\circ}C$ for 40 seconds. The sheet resistance, surface composition, cross-sectional microstructure, and surface roughness were investigated by a four point probe, a X-ray diffractometer, an Auger electron spectroscopy, a field emission scanning electron microscope, and a scanning probe microscope, respectively. The sheet resistance increased abruptly while thickness decreased as silicidation temperature increased. We propose that the fast metal diffusion along the silicon grain boundary lead to the poly silicon mixing and inversion. Our results imply that we may consider the serious thermal instability in designing and process for the sub-0.1 um CMOS devices.
니켈 코발트 합금조성에 따른 복합실리사이드의 물성 연구
김상엽,송오성,Kim, Sang-Yeob,Song, Oh-Sung 한국재료학회 2007 한국재료학회지 Vol.17 No.2
For the sub-65 nm CMOS process, it is necessary to develop a new silicide material and an accompanying process that allows the silicide to maintain a low sheet resistance and to have an enhanced thermal stability, thus providing for a wider process window. In this study, we have evaluated the property and unit process compatibility of newly proposed composite silicides. We fabricated composite silicide layers on single crystal silicon from $10nm-Ni_{1-x}Co_x/single-crystalline-Si(100),\;10nm-Ni_{1-x}Co_x/poly-crystalline-\;Si(100)$ wafers (x=0.2, 0.5, and 0.8) with the purpose of mimicking the silicides on source and drain actives and gates. Both the film structures were prepared by thermal evaporation and silicidized by rapid thermal annealing (RTA) from $700^{\circ}C\;to\;1100^{\circ}C$ for 40 seconds. The sheet resistance, cross-sectional microstructure, surface composition, were investigated using a four-point probe, a field emission scanning probe microscope, a field ion beam, an X-ray diffractometer, and an Auger electron depth profi1ing spectroscopy, respectively. Finally, our newly proposed composite silicides had a stable resistance up to $1100^{\circ}C$ and maintained it below $20{\Omega}/Sg$., while the conventional NiSi was limited to $700^{\circ}C$. All our results imply that the composite silicide made from NiCo alloy films may be a possible candidate for 65 nm-CMOS devices.
직접전단상자 시스템에 따른 동결토의 강도 평가에 관한 실험적 연구
김상엽(Sang Yeob Kim),김영석(YoungSeok Kim),이장근(Jangguen Lee),이종섭(Jong-Sub Lee) 한국지반환경공학회 2017 한국지반환경공학회논문집 Vol.18 No.3
극한지 동결 지반에서 구조물의 설계 및 시공이 진행됨에 따라, 안정성 평가를 위해 동결토의 강도 특성에 대한 실험적 연구가 필수적이다. 본 연구의 목적은 전단 상자 시스템에 따른 동결토의 강도를 평가하는 것으로, 이를 위하여 보편적으로 사용되는 기존 직접전단 시스템(Type-1), 상부 전단 상자 위쪽에 롤러를 설치한 시스템(Type-2), 그리고 상부 전단 상자를 하부 전단 상자와 분리되도록 기둥으로 고정한 시스템(Type-3)을 제작하였다. 모든 시스템에는 모래, 실트, 그리고 증류수를 동일한 비율로 혼합한 시료를 이용하여 조성하였으며, 냉동 챔버 내에서 -5°C까지 동결된 후 연직 응력 5, 10, 25 그리고 50kPa을 가하며 직접전단실험을 수행하였다. 실험 결과, Type-1은 전단 이동에 따라 상부 전단 상자가 회전(rotation)하여 하부 전단 상자와 접촉하는 문제가 발생했다. 상부 전단 상자의 회전을 롤러로 방지한 Type-2의 경우, 회전을 막는 힘이 전단강도에 추가되어 강도가 과대 평가되었다. Type-3의 경우, 동결 시료만의 전단강도가 평가되었으며, 최대전단강도 발현 시점과 수직변위가 증가하기 시작하는 시점이 유사하게 나타났다. 또한, Type-3의 최대전단강도와 잔류전단강도의 내부마찰각과 점착력은 롤러의 영향이 제거되어 Type-2보다 작게 나타났다. 본 연구는 동결토와 같이 강도가 큰 시료의 경우 Type-3과 같이 개선된 전단 상자 시스템을 이용하여 동결토만의 강도를 평가할 수 있음을 보여준다. Experimental study on strength characteristics of frozen soils is necessary for the safety evaluation of design and construction in cold region. The objective of this study is to evaluate the direct shear strength of frozen soils obtained from traditional system (Type-1), system with roller on the upper shear box (Type-2), and system with fixed upper shear box separated from bottom shear box (Type-3). Specimens mixed with sand, silt, and water are frozen to -5℃, and then direct shear tests are conducted under the normal stress of 5, 10, 25, and 50 kPa. Experimental results show that the upper shear box of Type-1 touches the bottom shear box due to the rotation of the upper shear box. The shear strength obtained from Type-2 is overestimated because the preventing rotation force is added to shear force. Type-3 may acquire the only strength of the specimen, and shear strain at peak shear strength is similar to that at the beginning of vertical displacement occurrence. In addition, internal friction angle and cohesion at both peak and residual stresses in Type-3 are smaller than those of Type-2. This study shows that high strength specimens including frozen soils can be effectively evaluated using improved shear box system such as Type-3.