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김민중(Minjoong Kim),신재수(Jae-Soo Shin),윤주영(Ju-Young Yun) 한국표면공학회 2021 한국표면공학회지 Vol.54 No.6
In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.
방전률 및 핀 두께에 따른 두 BTMS 해석 모델 변환 파라미터에 관한 해석적 연구
김민중(Minjoong Kim),함세현(Sehyeon Ham),김용찬(Yongchan Kim) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.11
The lithium-ion batteries are widely used for various industrial area such as ESS(Energy storage system), cellular phone, and transportation system including electric vehicle. Therefore, it is important to maintain optimal temperature of battery and resolve it’s temperature unevenness. Due to high energy demand, batteries are usually in shape of CMA(Cell-Module-Assembly), which is more vulnerable to heat. The study will discuss the similarity of thermal behavior in two different battery heat analysis models (NTGK model, Q = C model), with identical heat generation rate at discharging rates og 5C and 3C battery running situations. In 5C situation, T<SUB>max</SUB> - T<SUB>min</SUB> at one cell turned out to be identical to 96% between each battery analysis model. For 3C situation, the similarity of T<SUB>max</SUB> - T<SUB>min</SUB> turned out to be 92%. From these results, this study obtained converting parameter that allows us to attain NTGK model’s conclusion by Q = C model’s result. Additionally, from the similarity, this study concluded that Q = C model could be used as an alternative of NTGK model in these situations. All calculations were performed using the commercial CFD code, ANSYS FLUENT student version.