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잔류가스분석기 및 발광 분광 분석법을 통한 중간압력의 NF<sub>3</sub> 플라즈마 실리콘 식각 공정
권희태,김우재,신기원,이환희,이태현,권기청,Kwon, Hee Tae,Kim, Woo Jae,Shin, Gi Won,Lee, Hwan Hee,Lee, Tae Hyun,Kwon, Gi-Chung 한국반도체디스플레이기술학회 2018 반도체디스플레이기술학회지 Vol.17 No.4
$NF_3$ Plasma etching of silicon was conducted by injecting only $NF_3$ gas into reactive ion etching. $NF_3$ Plasma etching was done in intermediate pressure. Silicon etching by $NF_3$ plasma in reactive ion etching was diagnosed through residual gas analyzer and optical emission spectroscopy. In plasma etching, optical emission spectroscopy is generally used to know what kinds of species in plasma. Also, residual gas analyzer is mainly to know the byproducts of etching process. Through experiments, the results of optical emission spectroscopy during silicon etching by $NF_3$ plasma was analyzed with connecting the results of etch rate of silicon and residual gas analyzer. It was confirmed that $NF_3$ plasma etching of silicon in reactive ion etching accords with the characteristic of reactive ion etching.
대기압 플라즈마를 이용한 결정질 태양전지 표면 식각 공정
황상혁,권희태,김우재,최진우,신기원,양창실,권기청,Hwang, Sang Hyuk,Kwon, Hee Tae,Kim, Woo Jae,Choi, Jin Woo,Shin, Gi-Won,Yang, Chang-Sil,Kwon, Gi-Chung 한국재료학회 2017 한국재료학회지 Vol.27 No.4
Reactive Ion Etching (RIE) and wet etching are employed in existing texturing processes to fabricate solar cells. Laser etching is used for particular purposes such as selective etching for grooves. However, such processes require a higher level of cost and longer processing time and those factors affect the unit cost of each process of fabricating solar cells. As a way to reduce the unit cost of this process of making solar cells, an atmospheric plasma source will be employed in this study for the texturing of crystalline silicon wafers. In this study, we produced the atmospheric plasma source and examined its basic properties. Then, using the prepared atmospheric plasma source, we performed the texturing process of crystalline silicon wafers. The results obtained from texturing processes employing the atmospheric plasma source and employing RIE were examined and compared with each other. The average reflectance of the specimens obtained from the atmospheric plasma texturing process was 7.88 %, while that of specimens obtained from the texturing process employing RIE was 8.04 %. Surface morphologies of textured wafers were examined and measured through Scanning Electron Microscopy (SEM) and similar shapes of reactive ion etched wafers were found. The Power Conversion Efficiencies (PCE) of the solar cells manufactured through each process were 16.97 % (atmospheric plasma texturing) and 16.29 % (RIE texturing).
김우재,신기원,권희태,온범수,박연수,김지환,방인영,권기청,Kim, Woo Jae,Shin, Gi Won,Kwon, Hee Tae,On, Bum Soo,Park, Yeon Su,Kim, Ji Hwan,Bang, In Young,Kwon, Gi-Chung 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.1
The number of processes in the manufacture of semiconductors, displays and solar cells is increasing. And as the processes is performed, multiple layers of films and various patterns are formed on the wafer. At this time, substrate warpage occurs due to the difference in stress between each film and pattern formed on the wafer. the substrate warping phenomenon occurs due to the difference in stress between each film and pattern formed on the wafer. We developed a new warpage measurement method to measure wafer warpage during real-time processing. We performed an experiment to measure the presence and degree of warpage of the substrate in real time during the process by adding only measurement equipment for applying additional electrical signals to the existing ESC and detecting the change of the additional electric signal. The additional electrical measurement signal applied at this time is very small compared to the direct current (DC) power applied to the electrostatic chuck whit a frequency that is not generally used in the process can be selectively used. It was confirmed that the measurement of substrate warpage can be easily separated from other power sources without affecting.
안송엽 ( Song-yeob Ahn ),권희태 ( Hee-tae Kwon ) 한국환경기술학회 2004 한국환경기술학회지 Vol.5 No.4
석가공 폐수의 처리에 적합한 응집제의 최적 투입량을 결정하기 위하여 Alum, PAC, ZETAX-57 등의 주입량에 따른 SS의 제거율을 측정하였다. 석가공 폐수의 SS 제거율은 Alum의 경우 주입량 800 mg/L에서 99.0%, YCX-452의 경우 주입량 70 mg/L에서 98.3%, PAC의 경우 주입량 75.5 mg/L에서 96.0%, ZETAC-57의 경우 주입량 26.4 mg/L에서 98.0%를 나타내었다. Alum 주입량 800 mg/L에 소석회를 160 mg/L 주입한 경우 SS 제거율 99%, NaOH를 280 mg/L 주입한 경우 SS 제거율 99.2%를 나타냈다. 따라서 Alum을 단독으로 사용할 때에 비하여 응집보조제를 사용하는 경우 약간 처리효율이 증가하였다. 석가공 폐수의 경우는 중성 근처에서 잘 처리되었으며, pH의 경우 Alum은 5.8, PAC는 6.2에서 가장 높은 처리효율을 나타냈다. A study used Alum, PAC, ZETAC etc of flocculant on inorganic stone processing wastewater, explained chemical characteristics with experiment to injection mass of flocculant, SS, pH and Turbidity. The objection was to evaluate the treatment efficiency of the process in terms of SS, pH and Turbidity. By this experiment result was not different PAC, Alum, and ZETAC, cation polymer coagulant was not expressed most of effect to SS but Inorganic stone processing wastewater of treatment stand for good effect. As a result experiment showed 99.0% of SS removal when Alum the injection mass was 800mg/L. YCX-452, PAC and ZETAC-57 are showed 98.3%, 96.0% and 98.0% of SS removal, when the injection mass was 70mg/L, 75.5mg/L and 26.4mg/L, respectively. The SS removal was showed 99.0%,, 99.2%, as Alum was used along with Ca(OH)<sub>2</sub>. Also, when pH is slight quality of being Stone processing wastewater lead to treat near neutrality. The pH of the stone processing wastewater were optimum with 5.8, 6.2 for Alum and PAC, respectively.
안송엽 ( Ahn Song-yeob ),김용목 ( Kim Yong-mog ),소재철 ( So Jae-chul ),권희태 ( Kwon Hee-tae ) 한국환경기술학회 2001 한국환경기술학회지 Vol.2 No.1
본 연구는 원심경사분리기의 처리특성을 규명하기 위해 수행된 것으로 온천오수를 대상으로 하여 그 처리 특성을 실험하였다. 원심경사분리기에 의한 온천오수의 처리 결과는, 유입량 0.084~0.390 ㎖/sec, 회전수 2000~4000rpm의 범위에서 COD 제거율 86.7~96.9%, BOD 제거율 88.3~99.4%, SS 제거율 89.7~99.7%을 나타냈으며, pH는 7.0~7.2이었다. 원심경사분리기의 최적 운전조건은 유입량 0.134㎖/sec, 회전수 4000rpm일 때 COD, BOD 및 SS의 제거율은 각각 96.8%, 99.5% 및 99.8%로 나타났다. 원심경사분리기의 회전수는 제거효율과 양의 상관이 있으나, 회전수 4000rpm 이상에서는 분리효율에 미치는 영향이 거의 없었다. This study was performed to examine the treatment characteristics of centrifuge with incline plate. The treatment characteristics were analyzed for the hot spring sewage. The results of the experiment for the treatment characteristics of the centrifuge with incline plate summarized as follows: The variation of COD removal rate was ranged 86.7% ~ 96.9%, that of BOD was 88.3% ~ 99.4%, that of SS was 89.7% ~99.7% and that of pH was 7.0 ~ 7.2, where the inflow varies in 0.084 ~ 0.390 ㎖/sec and the rotational speed varies in 2000 ~ 4000rpm. And the removal rate of COD, BOD and SS were 96.8%, 99.5% and 99.8%, respectively, where the inflow is 0.134㎖/sec and rotational speed is 4000rpm. The removal efficiency was positively correlated with the rotational speed less than 4000rpm. But the higher rotational speed showed poor correlation with the removal efficiency.
조건부 가치측정법에 의한 산림보전의 환경가치 편익 추정
안송엽 ( Ahn Song-yeob ),소재철 ( So Jae-chul ),권희태 ( Kwon Hee-tae ) 한국환경기술학회 2004 한국환경기술학회지 Vol.5 No.1
본 연구에서는 비시장재화의 가치 측정을 위해 환경재의 편익을 추정하였으며, 비시장재의 가치 추정방법은 헤도닉 가격모형, 여행비용 접근법과 같은 간접추정 방식과 조건부 가치측정법(Contingent Valuation Method)과 같은 직접 추정방식(Direct-Estimation Method)이 있는데, 본 논문에서는 조건부 가치측정법을 제시하였다. 환경개선으로 인해 발생하는 편익 즉, 환경과 경관의 개선, 삶의 질 향상, 교통, 건강상의 안전 등의 비시장재의 편익을 정량적으로 평가할 필요가 있다. 개발 예정 사업지구를 개발하는 대신에 현재와 같은 야산으로 그대로 보존하는데 대해 산림지역을 중심으로 한 경제권역에 속하는 주민들이 부여하는 총 가치는 연간 36억 7천 6백만원에서 99억 8천 9백만원에 이르는 것으로 추정되었다. 이 산림보존에 대한 총 편익이 사업지구 개발의 경제적 타당성 분석에 있어서 환경비용으로 사업비에 추가되어야 할 것이다. The contingent valuation methods of the non-marketed goods include the indirect estimation method such as Hedonic Price Model and Time Cost Method and direct estimation method such as Contingent Valuation Method(CVM). These valuation methods that have progressed to valuate the non-marketed goods can be applied not only to the environmental economics but also to the valuation of the non-marketed goods such as earth work, environment, construction, traffic, health and etc. In case of conserving project area as a hill as it is instead of developing it as a limestone mine, the total value that would be given to the residents there in the forest region-centered economic area was estimated 3,676,000,000~9,989,000,000 Won/year. This total benefit of forest conservancy should be added as an environmental expense into the project expenses in analyzing the economic feasibility of limestone mine development of project area.
안송엽 ( Song-yeob Ahn ),박승훈 ( Seung-hun Park ),권희태 ( Hee-tae Kwon ),이창엽 ( Chang-yeob Lee ) 한국환경기술학회 2004 한국환경기술학회지 Vol.5 No.3
제조된 미생물 증식용 담체를 이용하여 암모니아 가스 제거장치를 고안하였고 장치 내부의 상(床) 위에 배양균주가 접종된 담체를 충전한 후 미생물에 의한 악취성분 제거 실험을 하였다. 실험한 암모니아가스 농도범위 10~100ppm 중 10ppm의 저농도 조건에서 제거효율이 93.0%로 가장 양호하였으며, 온도 조건은 10~40℃의 실험범위 중 30℃일 때 제거효율이 가장 우수하였고, 담체 크기는 5mm에서 최대 제거율을 기대할 수 있었다. The removal characteristics of ammonia gas was investigated using deodorizing bioreactor packed with bio-media(=media inoculated with cultured bacteria) for odor removal test. Specific conclusions derived from this study are as follows. The highest removal efficiency of ammonia gas as 93.0% was shown at the lower concentration of 10 ppm in the range of 10-100 ppm. The temperature and media size for making the highest removal efficiency were 30℃ and 5 mm, respectively.