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펨토초 레이저와 양극산화공정을 이용한 3차원 마이크로-나노하이브리드 패턴 제작
신홍규,권종태,서영호,김병희,정세채 한국공작기계학회 2007 한국공작기계학회 추계학술대회논문집 Vol.2007 No.-
We developed a simple and cost-effective method of fabrication 3D micro-nano hybrid patterns. In the conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns are fabricated firstly on a substrate, and then nano-patterns are formed on the micro-patterns using e-beam, hologram and nano-probe lithography. However, this methods were limited only to 2 dimensional patterns. In order to improve this dimensional limitation and process time, femtosecond laser and AAO process were used. Femtosecond laser with ultra-fast pulse speed and low thermal damage can be modified effectively a metal surface into another material. Also, AAO process can be easily fabricated nano patterns on Al surface. In this study, using the femtosecond laser as a tool of surface modification of Al thin film, several miro patterns with an amorphous layer on the Al thin film were fabricated with respect to laser intensity and scanning speed. Sequently, micro-nano hybrid patterns were fabricated by using a simple AAO process. Finally, we verified the validity of micro-nano hybrid patterns through SEM and EDS.
양극산화공정 시 온도계수 변화에 따른 포어 생성의 영향
신홍규,권종태,서영호,김병희 한국공작기계학회 2008 한국공작기계학회 추계학술대회논문집 Vol.2008 No.-
In this paper, we present the affection of pore generation with respect to variation of temperature in the anodic aluminum oxidation(AAO) process. In conventional AAO methods for aluminum bulk sheet over 25mm, mild anodizing method with low anodizing voltage at 4oC temperature has usually been used. However, it is required to have a long processing time for mass production. In this paper, we suggested the hard anodizing method by low temperature for aluminum thin film of 1mm. Through various AAO experiments with respect to the variation of temperature, pore diameter and inter-pore(between pore and pore) distance at large area can be determined. In order to analysis the pore generation, FE-SEM was measured. Pore diameter and inter-pore distance are about 200nm and 250nm. Finally, concave nano-structures with various diameters can be successfully obtained after etching process to remove selectively AAO layer.