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이승재(Seung J. Lee),박재영(Jae Y. Park),고영주(Yeong J. Ko) 대한전기학회 2006 대한전기학회 학술대회 논문집 Vol.2006 No.7
In this paper, PCB (Printed Circuit Board) embedded BaTiO₃ MIM capacitors were designed, fabricated, and characterized for low cost organic SOP applications by using 3-D EM simulator and low temperature processes. Size of electrodes and thickness of high dielectric films are optimized for improving the performance characteristics of the proposed embedded MIM capacitors at high frequency regime. The selected thicknesses of the BaTiO₃ film are 12㎛, 16㎛, and 20㎛. The fabricated MIM capacitor with dielectric constant of 30 and thickness of 12㎛ has capacitance density of 21.5 pF/㎟ at l00㎒, maximum quality factor of 37.4 at 300 ㎒, a quality factor of 30.9 at 1㎓, self resonant frequency of 5.4 ㎓, respectively. The measured capacitances and quality factors are well matched with 3-D EM simulated ones. These embedded capacitors are promising for SOP based advanced electronic systems with various functionality, low cost, small size and volume.