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다공질 실리콘: 새로운 마이크로센서 및 마이크로액추에이터 재료
민남기,이치우,정우식,김동일,Min Nam Ki,Chi Woo Lee,Jeong Woo Sik,Kim Dong Il 한국전기화학회 1999 한국전기화학회지 Vol.2 No.1
다공질 실리콘을 이용한 마이크로센서와 마이크로액츄에이터의 연구는 현재 초기단계에 있기 때문에, 지금까지 발광 다이오드나 화학 센서 등과 같은 몇몇 응용 소자가 발표된 수준에 머물러 있다. 본 논문에서는 화학 센서와 광소자를 중심으로 다공질 실리콘 센서 및 액추에이터 연구현황을 고찰 보고하고자 한다. 정전용량형 다공질 실리콘 습도센서의 감습 특성은 비선형이였으며, 저습보다는 $40\%RH$ 이상의 고습영역에서 더 높은 감도를 나타내었다. 다공질 실리콘 $n^+-p-n^+$ 소자는 에탄올에 노출되었을 때 소자 전류가 급격히 증가하였다. 다공질 실리콘 다이어프램에 제작된 $p^+-PSi-n^+$ 다이오드는 광 스위칭 현상을 나타내어 광센서 또는 광스위치로써의 응용 가능성을 보여주었다. 다공질 실리콘에 365nm를 조사해서 얻어진 광루미네센스(PL)는 넓은 스펙트럼을 보였으며, 피크 파장은 610 nm이었다. ITO/PSi/In LED의 전계발광(EL)스펙트럼은 PL에 비해 약간 더 넓은 영역에 걸쳐 나타났으며, 피크 에너지가 단파장(535nm)으로 이동하였다. Since the use of porous silicon for microsensors and microactuators is in the euly stage of study, only several application devices, such as light-emitting diodes and chemical sensors have so far been demonstrated. In this paper we present an overview of the present status of porous silicon sensors and actuators research with special emphasis on the applications of chemical sensors and optical devices. The capacitive type porous silicon humidity sensors had a nonlinear capacitance-humidity characteristic and a good sensitivity at higher humidity above $40\%RH$. The porous silicon $n^+-p-n^+$ device showed a sharp increase in current when exposed to an ethanol vapor. The $p^+-PSi-n^+$ diode fabricated on porous silicon diaphragm exhibited an optical switching characteristic, opening up its utility as an optical sensor or switch. The photoluminescence (PL) spectrum, taken from porous silicon under 365 nm excitation, had a broad emission, peaked at -610 nm. The electroluminescence(EL) from ITO/PSi/In LED had a broader spectrum with a blue shifted peak at around 535nm than that of the PL.
산약(山藥)이 생쥐의 기아 stress 에 미치는 영향
민남기,이태희,Min, Nam-Ki,Lee, Tae-Hee 대한한의학방제학회 2006 大韓韓醫學方劑學會誌 Vol.14 No.2
Objectives : We Investigated the effect of Dioscoreae Rhizoma(山藥) on the change of the corticosterone and the rectal temperature(直腸溫渡) of the mice induced by starvation stress(創戰 스트레스). Methods : After administration of Dioscoreae Rhizoma (0.25g/kg, 0.5g, 1.0g/kg, 3g/kg) three times, mice were starved. The corticosterone and rectal temperature were measured after 36.5 hours starvation stress. Results : The plasma cortiosterone levels in the S-2, S-3 and S-4 group were decreased significantly comparing with the control group (P<0.01) after 36.5 hours starvation stress. and rectal temperature was decreased in the control goup comparing with the normal group, but there is no significant change in the Dioscoreae Rhizoma treated group. Conclusion : it might be recognized that Dioscoreae Rhizoma has preventive-effect against starvation stress and also it might be needed further study in various viewpoints. Objectives : This study was disegned to elucidate the short term effect of Rossa rugosae Radix on proliferation. differentiation and maturation of 3T3-L1 Preadipocyte. Methods: 3T3-L1 preadipocytes obtained from Korean Cell Line Bank were cultured in a D ulbecco’ s modified eagle medium(MEM) culture solution containing 10% fetal bovine serum(FBS) and various concentrations of aqueous extract of Rossa rugosae Radix.. The short term effect of the extract of Rossa rugosae Radix on proliferation. differentiation and maturation of 3T3-L1 preadipocytes were investigate after treatment for 24 hours by measuring MTT. Oil Red 0 and latate dehydrogenase activity.. Results: The Rossa rugosae Radix extract inhibited significantly the proliferation of 3T3-L1 preadipocytes and tended to increase latate dehydrogenase activity in the media of differentiated 3T3-L1 preadipocytes & matured 3T3-L1 preadipocytes. the extract also inhibit the lipid accumulation of differentiated 3T3-L1 preadipocytes & matuered 3T3-L1 preadipocytes. Conclusions: These results demonstrated that the Rossa rugosae Radjx extract inhibited the proliferation. differentiation and maturation of 3T3-L1 preadipocytes. suggesting that Rossa rugosae Radix has anti-obesity effect: however further in vivo study is needed to demonstrate its pharmacological effects.
Cl<sub>2</sub>-Ar 혼합가스를 이용한 GST 박막의 유도결합 플라즈마 식각
민남기,김만수,김성일,권광호,Min, Nam-Ki,Kim, Man-Su,Dmitriy, Shutov,Kim, Sung-Ihl,Kwon, Kwang-Ho 한국전기전자재료학회 2007 전기전자재료학회논문지 Vol.20 No.10
In this work, the etching characteristics of $Ge_2Sb_2Te_5(GST)$ thin films were investigated using an inductively coupled plasma (ICP) of $Cl_2/Ar$ gas mixture. To analyze the etching mechanism, an optical emission spectroscopy (OES) and surface analysis using X-ray photoelectron spectroscopy (XPS) were carried out. The etch rate of the GST films decreased with decreasing Ar fraction. At the same time, high selective etch rate over $SiO_2$ films was obtained and the selectivity over photoresist films decreased with increasing the he fraction. From XPS results, we found that Te halides were formed at the etching surface and Te halides limited the etch rate of the GST films.