Mo/SiO₂/Si(100)기판 위에 MOCVD법으로 성장시킨 AIN박막이용 GHz대역의 FBAR제작에 관한 연구

양충모,김성권,차재상,박구만,Yang, Chung-Mo,Kim, Seong-Kweon,Cha, Jae-Sang,Park, Ku-Man 한국조명전기설비학회 2006 조명·전기설비학회논문지 Vol.20 No.4

본 논문에서는 $Mo/SiO_2/Si(100)$ 기판 위에 MOCVD(Metal-Organic-Chemical-Vapor Deposition)법을 이용하여 C축 방향으로 성장시킨 AIN(Aluminum Nitride) 박막을 이용하여 GHz대역 무선 통신에서 사용할 수 있는 FBAR(Film-Bulk-Acoustic Resonator)을 제작하였다. 제작된 공진부의 공진주파수와 반공진주파수는 각각 3.189[GHz]와 3.224[GHz]으로 측정되었으며, Q값(Quality Factor)과 유효한 전기기계 결합계수(${k_{eff}}^2$)는 각각 24.7과 2.65[%]로 평가되었다. AIN의 증착(Deposition) 조건은 $950[^{\circ}C]$의 기판표면(Substrate) 온도, 20Torr의 압력, 25000의 N/Al의 V/III비로 증착하였다. $4{\times}10^{-5}[\Omega{cm}]$의 Mo 하부전극 고유저항과 $Mo/SiO_2/Si(100)$ 기판 위에 AIN(0002) FWHM(Full-Width at Half-Maximum) 4를 갖는 C축 방향성의 AIN 박막을 성공적으로 성장시켰다. 따라서 증착된 AIN박막의 FWHM값은 GHz대역 무선 통신용 RF(Radio Frequency) 밴드 패스 필터 설계에 유용하게 사용될 것이다. In this paper, it is reported that film-bulk-acoustic resonator with high c-axis oriented AIN film on $Mo/SiO_2/Si(100)$ using metal-organic-chemical-vapor deposition was fabricated. The resonant frequency and anti-resonant frequency of the fabricated resonator were observed with 3.189[GHz] and 3.224[GHz], respectively. The quality factor and the effective electromechanical coupling coefficient(${k_{eff}}^2$) were measured with 24.7 and 2.65[%], respectively. The conditions of AIN deposition were substrate temperature of $950[^{\circ}C]$, pressure of 20Torr, and V-III ratio of 25000. A high c-axis oriented AIN film with $4{\times}10^{-5}[\Omega{cm}]$ resistivity of Mo bottom electrode and $4[^{\circ}]$ of AIN(0002) full-width at half-maximum(FWHM) on $Mo/SiO_2/Si(100)$ was grown successfully. The FWHM value of deposited AIN film is useful for the RF band pass filter specification for GHz-band wireless local area network.

해남 모이산 천열수 금은광상의 지구화학적 특성

문동혁,고상모,이길재,Moon, Dong-Hyeok,Koh, Sang-Mo,Lee, Gill-Jae 대한자원환경지질학회 2010 자원환경지질 Vol.43 No.5

전남 해남군 모이산 금광상에서 지구화학적 특성에 대한 연구를 수행하기 위하여 모이산 지표 및 갱내, 대산 지표에서 채취한 총 140개 시료에 대한 지구화학분석결과를 상관분석, 요인분석 그리고 군집분석 등 다변수 통계처리 하였다. 상관분석 결과, 금의 함량이 100 ppb 미만인 비광화대와 100 ppb 이상인 광화대에서 동시에 금과 높은 상관관계를 가지는 원소는 Ag, Cu, Bi, Te 등이며, 이는 연구지역에서 수반되는 함금 은 광석광물들(엘렉트럼, 실바나이트, 칼라버라이트 및 스퉤자이트)과 기타광석광물들(황동석, 텔룰로비스무타이트 및 비스무시나이트)의 산출과 일치된 결과로 인지된다. Mo은 비광화대(0.269)에서 보다 광화대(0.615)에서 상대적으로 높은 상관계수를 가지므로 금광화작용에 의해 그 함량이 강하게 지배되고 있는 것으로 해석된다. Mn, Cs, Fe, Se 등은 비광화대에서는 금과 정의 상관관계를 가지지만 광화대에서는 음의 상관관계를 가지므로 금광화작용 시 모암으로부터 용탈되는 원소군으로 해석된다. Sb은 광화대에서 금과 높은 상관성을 보이지만 비광화대에서는 음의 상관관계를 가지므로 금광화작용 시 부화되는 원소로 지시될 수 있다. 요인분석결과, 비광화대에서 금의 함량에 영향을 받는 요인군에 속하는 원소는 Se, Ag, Cs, Te 등이며 이들은 연구지역 내 비광화대에서 금의 존재 여부를 알려줄 수 있는 원소로 해석될 수 있다. 반면 광화대에서는 Mo과 Te 등이 강하게 금광화작용의 여부를 지시해 주며, 금과 함께 수반되는 은광화작용의 여부를 지시해 줄 수 있는 원소는 Sb과 Cu 등으로 해석된다. 군집분석 결과 비광화대에서 Cd-Zn-Pb-S, Bi-Fe-Cu-Mn, Se-Te-Au-Cs-Ag, As-Sb-Ba 등이 유사한 거동을 보이는 원소군으로 나타나는 반면, 광화대에서는 Cd-Zn-Mn-Pb, Fe-S-Se, As-Bi-Cs, Ag-Sb-Cu, Au-Te-Mo 등이 유사한 거동을 보여주는 원소군으로 나타난다. 이상과 같은 지구화학분석 자료의 다변수 통계처리를 이용하여 금광화대와 비광화대의 산출광물의 거동 및 지구화학적 특성 차이의 비교가 가능하므로 추후 이러한 방법이 이와 유사한 유형의 광상탐사에 유용한 방법으로 적용될 수 있을 것으로 기대된다. Geochemical characteristics of the Moisan epithermal gold-silver deposit with total 140 samples in Haenam area, Jeollanamdo were studied by using multivariate statistical analysis (correlation analysis, factor analysis and cluster analysis). The correlation analysis reveals that Ag, Cu, Bi, Te are highly correlated with Au in the both non-mineralized and mineralized zone. It is resulted from the presence of Au-Ag bearing minerals (electrum, sylvanite, calaverite and stuezite) and non Au-Ag containing minerals (chalcopyrite, tellurobismuthite and bismuthinite). Mo shows relatively much higher correlation at the mineralized zone (0.615) than non-mineralized zone (0.269) which implies Mo content is strongly affected by Au-mineralization. While Mn, Cs, Fe, Se correlated with Au at the nonmineralized zone, they have negative correlation at the mineralized zone. Therefore, they seem to be eluviated elements from the host rock during gold mineralization. Sb is enriched during the gold mineralization showing high correlation at the mineralized zone and negative correlation at the non-mineralized zone. According to the factor analysis, Se, Ag, Cs, Te are the indicators of gold mineralization presence due to the strong affection of gold content in the non-mineralized zone. In the mineralized zone, on the other hand, Mo, Te and Sb, Cu are the indicators of gold and silver mineralization, respectively. While the cluster analysis reveals that Cd-Zn-Pb-S, Bi-Fe-Cu-Mn, Se-Te-Au-Cs-Ag, As-Sb-Ba are the similar behavior elements groups in the non-mineralized zone, Cd-Zn-Mn-Pb, Fe-S-Se, As-Bi-Cs, Ag-Sb-Cu, Au-Te-Mo are the similar behavior elements groups in the mineralized zone. Using multivariate statistical analysis as mentioned above makes it possible to compare the behavior of presented minerals and difference of geochemical characteristics between mineralized and non-mineralized zone. Therefore, it will be expected a useful tool on the similar type of mining exploration.

Blind Interference Suppression for DS-CDMA Systems Based on Widely Linear Kalman Filtering

JaeㅡJin Jeon,Jun-Seok Lim,Sang-Wook Lee,Koeng-Mo Sung 대한전자공학회 2005 ITC-CSCC :International Technical Conference on Ci Vol.2005 No.4

부산지역 고등학교 급식서비스에 대한 학생과 급식종사자의 평가

모성종,서재수,류은순 한국조리과학회 2005 한국식품조리과학회지 Vol.21 No.2

The purpose of this study was to evaluate the perception of students' and employees' perception with for their high school foodservicein Bustin area. For this purpose, questionnaires were distributed among the 324 students and 93 employees in 12 high schools in the Busan area. The students assessed the importance and performance of school foodservice as 4.00/5.00 and 2.97/5.00,, respectively, and the employees assessed the importance and performance of as 4.07/5.00 and 3.77/100, respectively. Tice importance mean scores of students wereshowed significantly (p<0.01) higher scores in internal environment factor and sanitation factor than those of employees, hut the performance mean scores of students wereshowed significantly (p<0.01) lower scores in all the factors than those of employees. The importance grid of students and employees showed that the items of the high with to the low with of consideration of preference in menu, appropriate the meal hours, rapidnessrapidity of service, and prompt dealing with complaints were high scores to the students, but low scoresto the employees. The performance grid of students and employees showed that the items of the low with students to the high with employeesfreslrness of food ingredients, offering the consistency of consistently good service, rapidnessrapidity of service, prompt dealing with complaints, communication between students and employees, and food cleanliness were low scores to the students, but high scores to the employees of dish. 'Therefore, it would seem to be desirable that the foodservice manager may be plans the strategies with the involvement of students in the process from planning the menu to proposinge of ideas for improvement.

우리 나라 해사중재의 현황과 개선 방안

성재모,김성준 한국해운물류학회 2003 해운물류:이론과실천 Vol.- No.5

해운, 무역, 보험과 관련한 분쟁은 법원보다는 중재에 회부되는 경우가 일반적이다. 그러나 국내 해운선사들이 해운 분쟁을 대한상사중재원에 회부하는 건수는 갈수록 줄어들고 있고, 대부분은 런던해사 중재에 회부되고 있다. 이번 연구에서는 해운선사의 해사중재현황을 5개 선사를 중심으로 조사하였다. 조사결과 용선분쟁의 90% 이상이 런던해사중재에 회부되고 있고, 대한상사중재원에 회부되는 중재는 2.2%에 불과했다. 이는 해사 분쟁의 당사자가 국내 선사와 제3국 기업이 주류를 차지하고 있는 것이 가장 큰 원인인 것으로 파악된다. 그밖에 해운과 관련한 영국의 판례가 용선계약서 해석의 원칙이 되고 있는 것이 해운업계의 오랜 관행으로 자리잡고 있는 것도 주요한 원인으로 작용하였다. 해운과 관련한 계약은 대부분 국제간에 이루어지기 때문에 해상법이 발달한 영국법에 기초한 런던중재조항이 분쟁 당사자들에게는 공평하게 느껴질 수 있다. 하지만, 국내 선사들간의 해사 분쟁 중 다수가 런던중재를 이용하고 있는 것으로 나타나고 있다. 따라서 현재 대한상사중재원에서 취급하고 해사중재제도가 갖고 있는 문제점을 파악하고, 그 개선방안을 모색해 보았다. It is quite general that a dispute concerned with shipping, trading and insurance is referred to the arbitration panel instead of court. But, the number of case referred to the Korea Commercial Arbitration Board in respect of shipping become fallen every year. Instead, most disputes are referred to the London Maritime Arbitrators Association. The focus of this research is to investigate the current situation of arbitration cases in Korean shipping companies in more details. In the result of the research, it shows that more than 90% of charterparty dispute is referred to the London Maritime Arbitrators Association and only 2.2% is referred to the Korea Commercial Arbitration Board. That is why many leading cases under English law has become a principle of interpretation of the shipping contracts and become a custom in the shipping area. The contributory cause of the above situation is that the Korea Commercial Arbitration Board has a systematic problem. As many contracts concerned with shipping is internationally made, many people in the shipping area might feel that the London Arbitration Clause based on English law would be fair and reasonable. Nevertheless, we should recognize the Korea Commercial Arbitration Board's systematic problem and grope for a method of improving the systematic problem.

전립선 비대증 진단에 있어서 전립선 이행대 용적 지수의 유용성

임재성,노안식,김용웅,육승모 충남대학교 의과대학 의학연구소 2003 충남의대잡지 Vol.30 No.1

Purpose : Prostate volume has been poorly correlated to various parameters used to assess benign prostatic hyperplasia (BPH), including symptom score, peak urine flow and detrusor pressure at peak urine flow. The purpose of this study was 2-fold: 1) to determine if transrectal ultrasound measurement of the transition zone of the prostate served as a better proxy for determining prostate size and correlated better with IPSS, peak urine flow and detrusor pressure and 2) if the parameter transition zone index (the ratio between transition zone volume and prostate volume) was useful in evaluating clinical prostatism. Materials and Methods: We prospectively evaluated 30 men with symptomatic BPH (mean age 65.4 years) according to symptom sore, peak urine flow, pressure/flow study, transrectal ultrasound volume of the entire prostate and the transition zone and calculation of the transition zone index. Results : There was a week correlation between prostate volume and symptom score, peak urine flow and detrusor pressure at peak urine flow: a stronger correlation between volume of transition zone and symptom score (r=0.679 p=0.03), and peak urine flow (r=-0.672 p=0.05) and a significant correlation (p=0.001) between transition zone index and symptom score (r=0.868), and peak urine flow(r=-0.870). Conclusion : Transition zone index is a parameter that correlates siginificantly with parameters of BPH and may serve as a useful proxy for evaluating worsening obstruction. Studies are underway to determine whether transtion zone index can be used prospectively to predict and correlate response with therapies designed to ablate prostatic tissue medically or surgically.

ACE 억제제 연구 : Cilizapril 합성 Synthesis of Cilazapril

강흥모,임재성,박규순 국민대학교 2002 기초과학연구소 논문집 Vol.21 No.-

ACE inhibitor, cilazapril의 합성에서 중간물질 (S)-hexahydro-1,3-pyridazinedicarboxylic acid 1-benzyl-3-tert-butylester와(S)-4-[(benzyloxy)carbonyl]-2-phthal imidobutanoic acid를 아미노산인 L-glutamic acid로부터 다단계 화학반응을 통해 합성하였다. Synthetic studies on ACE inhibitor, cilazapril, has been investigated. Intermediate (S)-hexahydro-1,3-pyridazinedicarboxylic acid 1-benzyl-3-tert-butylester was synthesized from L-glutamic acid via 11 steps. The intermediate (S)-4-[(benzyloxy)carbonyl]-2-phthalimido-butanoic acid was obtaibed from L-glutamic acid.

부산광역시 승용자동차 주행중 전신진동 및 소음도 평가

옥치상,모현주,정재열 高神大學校保健科學硏究所 1997 보건과학연구소보 Vol.7 No.-

There are many vibrations and noixes during vehicle use in urban although pavement road. Those are from engin vibarations, tire and wheel related vibrations. And the vibrations of vehicle use cause frequently las variation of road state. This study investivated the whole-body vibration and noise caused as variation of road state and speeds during automobile duiving in Pusan City, Korea Based on the results, exposure to whole body vibration and noise during vehicle use was higher at 70km/h than 50km/h in speed. On the floor of vehicle at speed 50km/h and 70km/h, the the mean values of energy equivalent acceleration and permissible exposure time by vebrational performance were 99.2cm/s²(1512.4 min), 200.3cm/s²(1939.5 min)in x axis ; 132.3cm/s²(1035.9 min),182.3cm/s²(1278.2 min) in y axis;87.1cm/s²(2774.6 min),234.8cm/s²(4196.4 min) in z axis, respectively. And on the seat of vehicle at speed 50km/h and 70km/hr,82.0cm/s²(597.1 min),63.2cm/s²(757.4 min), 157.2cm/s²(1286.8 min) in z axis, respectively. Permissible noise exposure time(PNET) caused during vehicle use were 80hr, 184hr in speed 50km/h and 57hr, 116hr in speed 70kn/h when doors were closed and open,respectively.

가토에서 일측 요관 부분 및 완전폐색시 신장과 요관의 조직학적 변화

김상현,김용웅,육승모,한동석,노안식,임재성,김홍식,나용길,설종구 충남대학교 의학연구소 2003 충남의대잡지 Vol.30 No.2

This study was designed to clarify histologic changes in the experimental rabbit kidney and ureter after unilateral partial or complete ureteral obstruction. A total of 20 adult white rabbits were divided into 4 subgroups in the partial obstruction followed by 2 weeks, the partial obstruction followed by 4 weeks, the complete obstruction followed by 2 weeks, and the complete obstruction followed by 4 weeks. The normal control group was consisted of 5 adult white rabbits. The kidneys and ureters for light microscopy were fixed in 10% neutral formalin, embedded in paraffin and stained with hematoxylin and eosin. Abnormal histologic fingings showed in ipsilateral kidney and ureter of all subgroups(such as dilatation of uriniferous tubule, focal necrosis and desquamation of epithelium, interstitial fibrosis, glomerular congestion, widening of Bowman's space, dilatation of ureter, epithelial cell atrophy or loss, interstitial fibrosis and interstitial inflammation). These findings were most severe in the group of the complete-obstructed ureter for 4 weeks. No significant changes showed in contralateral ureter of all subgroups. The degree of obstruction was severe and period of obstruction was long, the histological changes in ipsilateral side were severe. Despite of changes in ipsilateral side no abnormal findings showed in contralateral side. We suggest that long term experimental investigation of histologic changes in ipsilateral side and compensatory changes in contralateral side have to be studied.

1g 진동대 실험을 위한 상사법칙의 적용성 검증

김성렬,황재익,김명모 東亞大學校 建設技術硏究所 2005 硏究論文集 Vol.29 No.1

Iai(1989) suggested the similitude law for 1g shaking table tests using basic equations governing the soil-structure-fluid systems. However, the validity of this similitude law was not fully verified. In this research, shaking table tests for gravity type quay walls were performed to verify the similitude law for soil-structure interaction problems. The validity of the similitude law was analyzed by checking whether different sizes of models show the same physical behavior. The test results showed that the excess pore pressure and the dynamic thrust acting on quay walls were difficult to be simulated in model tests. However, it was found that the displacement of the wall can be properly predicted from model tests if the total force acting on the wall is simulated in models.