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이도형,송재원,손현 경북대학교 전자기술연구소 1990 電子技術硏究誌 Vol.11 No.1
This paper represents the construction of laser beam writing system. laser lithography. using new method that guarantees convenience and accuracy in laser focusing. The X, Y translation stage using DC motors was controlled by the computer. Minimum Ire width of 1.6㎛ was obtained by the laser lithography system.