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이봉주,히데오미코이누마 한국진공학회 2001 Applied Science and Convergence Technology Vol.10 No.4
대기압 저온 플라스마를 사용하여 산화아연 박막의 건식 식각 가능성을 연구했다. 플라스마로부터 $H_\alpha^*$과 $CH_^*$ 라디컬 발생을 확인하였고, 라디컬 발생 능력은 광학 발광 스펙트럼 및 플라스마 임피던스 분석에 의해 캐소드 전극에 의존하는 것을 알았다. 식각능력은 플라스마 I-V커브에 의한 임피던스와 발광강도에 의해 계산되었다. Using the plasma that we developed to generate a low-temperature plasma at atmospheric pressure, we have investigated the etching possibility of tin oxide $(SnO_2)$ thin films. Hydrogen and methane radicals generated from the plasma were observed and their intensity was found to be dependent on the cathode material by an analysis with optical emission spectroscopy as well as by the plasma impedance. The etching ability of this plasma was evaluated by an emission intensity as well as by the evaluation of impedance using a plasma I-V curve.
김상봉(Sang Bong Kim),구마타요시노부(Yochinobu Kumata),히데오후쿠이(Hukui Hideo) 한국지역학회 1996 지역연구 Vol.12 No.1
This paper examines impacts of long range financial burdens imposed upon local municipalities by large scale urban development such as newtown projects. Dealing with two different development projects, TAMA newtown and TSUKUBA campus city, the paper makes comparative analysis on deficit pattern over time both national and prefecture projects, from viewpoint of optimums distribution of social marginal cost. Finding show the current financial allocation system is improper to cover the Market failure, leaving local municipalities with long term financial deficit.