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반도체 감광막 제거공정 적용을 위한 고농도 오존발생장치 개발
손영수,함상용 대한전기학회 2006 전기학회논문지C Vol.55 No.12C
- we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube.We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of 19.7[wt%/O2] at the flow rate of 0.3[ℓ/min] of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of 16[wt%/O2] and flow rate of 8[ℓ/min.]. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.
손영수,함상용,김병인,이성휘,Son, Young-Su,Ham, Sang-Yong,Kim, Byoung-Inn,Lee, Sung-Hwee 한국전기전자재료학회 2007 전기전자재료학회논문지 Vol.20 No.11
The realization of the photoresist(PR) removal method with vaporized water and ozone gas mixture has been studied for the LCD TFT array manufacturing. The developed PR stripper uses the water boundary layer control method based on the high concentration ozone production technology. We develop the prototype of PR stripper and experiment to find the optimal process parameter condition like as the ozone gas flow/concentration, process reaction time and thin boundary layer formation. As a results, we realize the LCD PR strip rate over the 0.4 ${\mu}m/min$ and this PR removal rate is more than 5 times higher than the conventional immersion type ozonized water process.
SPM을 이용한 반도체 포토레지스트 제거 공정 대체를 위한 DIW-$O_3$ 방식 세정기술 개발
손영수,함상용,Son, Yeong-Su,Ham, Sang-Yong 한국기계연구원 2003 硏究論文集 Vol.33 No.-
Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.
윤동원(Yun Dongwon),함상용(Ham Sangyong),박중호(Park Jungho),윤소남(Yun Sonam),김칠성(Kim Chilsung) 대한기계학회 2011 대한기계학회 춘추학술대회 Vol.2011 No.10
In this paper, a program to analyze the proportional solenoid valve is developed with conventional FEM tool. To achieve the convenience and analysis accuracy, it is supposed that the solenoid valve is composed of some simple geometries, which are a triangle and a rectangle. This assumption make the modeling of valve simple. To check the feasibility of the developed code, a real example of a solenoid valve are analyzed and it is found that the code can calculated for the valve and the characteristic of a proportional valve is shown with graphs.
CFG, 라이브러리 정보를 이용한 권한 기반 안드로이드 악성코드 탐지 기술의 성능 향상
박건우,Tamer AbuHmed,민대홍,양대헌,이경희 한국차세대컴퓨팅학회 2019 한국차세대컴퓨팅학회 논문지 Vol.15 No.6
In this paper, we propose a static Android malware detection technique to improve the detection performance and reliability. Based on the permission feature which is heavily used in the previous works, we additionally use the library dependency and control flow graph (CFG) as features for improving our detection performance. Library dependency and CFG-based features are efficient to detect Android malware, which is obfuscated using renaming technique because these are extracted by structural analysis. By combining these three features, we propose a novel malware detection model using bidirectional long short-term memory. As results, we achieved 99.62% overall detection rate. Our model is highly reliable: where the precision, recall and F1 scores are 100%, 99.26% and 99.62%, respectively. 본 논문에서는 안드로이드 악성코드의 증가 추세에 대응하여 향상된 성능의 정적 악성코드 탐지 기법을 고안하였다. 기존의 어플리케이션의 권한을 특징(feature)으로 사용하는 악성코드 탐지 기법에 라이브러리 사용 정보와 control flow graph (CFG)의 속성을 특징으로 추가하여 성능을 향상시켰다. 또한, 라이브러리와 CFG는 구조 분석을 통해 특징을 추출하므로 리네이밍(renaming) 난독화에 대하여 독립적이라는 특징이 있어 난독화에 취약한 권한 사용 탐지 기법을 보완하는 추가적인 이점을 가진다. 어플리케이션으로부터 추출한 세 가지 특징을 기반으로 양방향 장단기 기억 네트워크(bidirectional long short-term memory)를 이용한 악성코드 탐지 모델을 제안하였다. 세 가지 특징을 모두 사용한 악성코드 분류 모델을 안드로이드 악성코드와 일반 어플리케이션을 합친 데이터에 적용하였을 때 정확도 99.62%, 정밀도 100%, 재현율 99.26%, F1 99.62%로 높은 성능과 신뢰도를 보였다.