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이영화(Young Hwa Lee),최홍수(Hongsoo Choi),박준식(Joonsik Park),허신(Shin Hur) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.11
In this report, we describe the process towards the fabrication of micro-size capacitive MEMS (micro-electro mechanical system) microphones. First, circular SiNx membranes with the thickness of 500 ㎚ are fabricated using Bosch DRIE process. The diameters of membranes are 500 ㎛, 1000 ㎛, 1500 ㎛ and 2000 ㎛. Electrodes on these membranes are deposited by Au evaporation. In the mean time, another wafer is prepared for back-plate using KOH anisotropic wet etching and DRIE. Air holes to reduce air damping are perforated using DRIE on the back-plate. Finally, eutectic bonding is used to assemble the membrane chip and back-plate chip. The final goal of this work is sensing acoustic sound using the fabricated capacitive MEMS microphone.
Kyu-Hang Lee(이규항),HongSoo Choi(최홍수),Shin Hur(허신),Wan-Doo Kim(김완두) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11
Zinc Oxide (ZnO) nanostructures can be used for numerous applications such as optoelectronics, sensors, varistors and electric devices. The recently reported growth techniques are vapor-liquid solid method, chemical vapor deposition, physical vapor deposition, metal organic chemical vapor deposition, and solution method. Among them, solution process is simple way to grow ZnO nanostructures at low temperatures. In this study, we used solution process to investigate the effect of various solution molarities on properties of ZnO nanowires. The piezoelectric properties of ZnO nanowires were also characterized after patterning the growth area. The characterization was done X-ray diffraction(XRD), Scanning Electron Microscopy (SEM) and photoluminescence (PL) measurements at room temperature using a He-Cd 325-nm laser as the excitation source. As a result, we found that the characterization of ZnO nanowires changes according to molarity.