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나노 입자 증착 공정으로 제작한 TiO₂ 박막의 물 분해 장치 개발 및 특성 평가
최정오(Jung-Oh Choi),송성혁(Sung-Hyuk Song),한홍택(H. Thomas Hahn),안성훈(Sung-Hoon Ahn) 대한기계학회 2013 대한기계학회 춘추학술대회 Vol.2013 No.12
Nano-sized TiO₂ photo catalytic water-splitting technology has great potential for low-cost, environmentally friendly solar-hydrogen production to support the future hydrogen economy. Presently, the solar-to-hydrogen energy conversion efficiency is too low for the technology to be economically sound. The main barriers are the rapid recombination of photo-generated electron/hole pairs as well as backward reaction and the poor activation of TiO₂ by visible light. In response to these deficiencies, many investigators have been conducting research with focused on the enhancement of photo catalysis by modification of TiO₂. This paper focus on the development of TiO₂ film for water splitting system using nano particle deposition system(NPDS).
천두만,안성훈,최정오,이선영,Isaku Kanno,Hidetoshi Kotera 한국정밀공학회 2012 International Journal of Precision Engineering and Vol.13 No.7
With increasing concerns of environmental issues in manufacturing process, energy efficient and waste free manufacturing processes have been widely studied. In the field of nano/micro manufacturing, many research results of direct writing processes such as ink jet printing, gravure printing, and rapid prototyping processes have been reported to remove wasteproducing conventional lift-off process for patterning. In addition, the use of toxic solvents such as acetone, toluene, xylene and so on has been decreased. At the same time, energy efficiency becomes one of environmental issues in manufacturing process. In this research, Nano particle deposition system (NPDS), a dry spray deposition process for fabrication of meta and ceramic direct patterning at room temperature, was introduced according to the environmental aspects. In previous studies, NPDS has shown the feasibility of the depositions of metals such as Sn and Ni, and the depositions of ceramics such as Al2O3, and TiO2 by spraying powders under low vacuum condition. The advantages of NPDS are 1) solvent free dry deposition process, 2) relatively low energy consumption with room temperature and low vacuum process condition, and 3)direct patterning process. The energy consumption in NPDS was briefly compared with similar processes including aerosol deposition and cold spray. The direct patterning results with 200μm width line pattern using micro-nozzle were fabricated without any post-processes. These results confirmed NPDS can become a solvent-free energy efficient direct patterning process for metals and ceramics.
김민생,천두만,최정오,이종천,김광수,김양희,이선영,안성훈 한국정밀공학회 2011 International Journal of Precision Engineering and Vol.12 No.4
To apply for the working electrode of dye-sensitized solar cell (DSSC), semiconducting TiO2 powder is deposited on indium tin oxide (ITO)-coated glass. In conventional DSSC fabrication, the high-temperature sintering process should be contained to make the necking of powders, and to assemble powders and substrate. In this research, dry TiO2 powder is deposited using a nano particle deposition system (NPDS) to make photoelectrode layer through spraying at room temperature conditions. The powder is sprayed through a slit-type nozzle having a 0.4×10mm2 rectangular outlet under atmospheric chamber pressure. Through XRD analysis and FE-SEM observation, the deposition of the semiconductor oxide powder is confirmed and the thickness (7.6μm) is measured. The fabricated DSSC has a short circuit current density JSC =3.077mA/cm2, open circuit voltage VOC = 0.709V, and energy efficiency η = 1.24%.