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Influence of Hydrogen on Al-doped ZnO Thin Films in the Process of Deposition and Annealing
진호,박춘배,Hu-Jie Jin,Geun C. Hoang 한국전기전자재료학회 2009 Transactions on Electrical and Electronic Material Vol.10 No.3
The Al-doped ZnO (AZO) films were deposited on a glass substrate by RF magnetron sputtering in pure Ar and Ar+H2 gas ambient at temperature of 100ºC and annealed in hydrogen ambient at the temperature range from 100 to 300 °C, respectively. It was found that either the addition of hydrogen to the sputtering gas or the annealing treatment effectively reduced the resistivity of the AZO films. When the AZO films were annealed at the temperature of 300 °C for 1hr in a hydrogen atmosphere, the resistivity decreased from 2.60×10-3 Ωcm to 8.42×10-4 Ωcm for the film deposited in pure Ar gas ambient. Under the same annealing conditions of temperature and hydrogen ambient, the resistivity of AZO films deposited in the Ar+H2 gas mixture decreased from 8.22×10-4 Ωcm to 4.25×10-4 Ωcm. The lowest resistivity of 4.25×10-4 Ωcm was obtained by adding hydrogen gas to the deposition and annealing process. X-ray diffraction (XRD) pattern of all films showed preferable growth orientation of (002) plane. The average transmittance is above 85 % and in the range of 400-1000 nm for all films.
진호,정윤환,박춘배 한국전기전자재료학회 2009 Transactions on Electrical and Electronic Material Vol.10 No.2
The electrical stability of ZnO: Al thin films deposited on glass substrate by the RF magnetron sputtering method have been modified by a hydrogen annealing treatment and SiO2 protection layer. AZO thin films were deposited at room temperature and different RF powers of 50, 100, 150, and 200 W to optimize the AZO film growth condition. The lowest value of resistivity of 9.44×10-4 Ωcm was obtained at 2 mtorr, room temperature, and a power level of 150 W. Then, the AZO thin films were annealed at 250-400 ºC for 1 h in hydrogen ambient. The minimum resistivity obtained was 8.32×10-4 Ωcm as-annealed at 300 ºC. The electrical properties were enhanced by the hydrogen annealing treatment. After a 72 h damp-heat treatment in harsh conditions of a water steam at 110 ºC for four representative samples, a degradation of electrical properties was observed. The sample of hydrogen-annealed AZO thin films with SiO2 protection layer showed a slight degradation ratio (17 %) of electrical properties and a preferable transmittance of 90 %. The electrical stability of AZO thin films had been modified by hydrogen annealing treatment and SiO2 protection layer.
진호,손준배,왕강,이장명 제어로봇시스템학회 2011 제어로봇시스템학회 각 지부별 자료집 Vol.2011 No.7
In this paper, we proposes a method for kinematics analyses of a 10 D.O.F. dual arm manipulator. We can solve the transformation for each joint from the modeling. For the forward kinematics system, we just multiply every transformation and then we know the transformation from shoulder to the wrist. If we give the angle for each joint, we can obtain the position and the orientation of the wrist. For the inverse kinematics system, if we know the position of the elbow, we can calculate the 2 D.O.F of shoulder just use the trigonometric function. And then if give the position of wrist, we can calculate the 2 D.O.F of up elbow rotation and the down elbow use the inverse trans formation. The D.O.F of down elbow rotation only effects on the orientation of wrist and not the position of the wrist. So, if we give the orientation of wrist, we can calculate the D.O.F of down elbow rotation, too.
CCD를 이용한 경희대학교 천문대 관측시스템 소프트웨어개발
진호,김갑성,Jin, Ho,Kim, Gap-Seong 한국천문학회 1994 天文學論叢 Vol.9 No.1
We have investigated intensively an optical telescope with 76cm diameter and CCD camera system in astronomical observatory of Kyung Hee university, in order to maximize instrumental functions of our observational equipments and to construct a more reliable photometric system. And computer softwares AUTO DOME, KH CCD and KH PHO for astronomical image observations and their automatic photometries with high accuracy have been made for observers w use our observational system conveniently and efficiently. Throughout careful examinations of these programs, it has been proved that the observing time by our program is shorter than that by manual operations, so that, fast and accurate observations can be executed with ease. For open cluster NGC 7063 observed with S/N value of 350 or more by KH PHO, we have found the magnitude measurements of 11 object stars would show 0.007 magnitude difference, comparing with magnitude data from IRAF/APPHOT. From automatic photometry of eclipsing binary, AB And observed by our software, total 220 data points with good quality have been acquired during 8 hours and so we could make a better light curve than that obtained from any observational results by domestic photoelectric photometry system.