TEM 관련 이론해설 (3): 영상 형성이론과 회절이론

이확주,Lee, Hwack-Joo 한국현미경학회 2003 Applied microscopy Vol.33 No.3

영상이론과 회절 이론을 같은 비중으로 다루고 이들과의 관계를 나타내는 wave optics 이론을 소개하였다. 결맞는 파동 이론과 결 안맞는 파동이론 사이의 차이를 나타내고 Abbe이론과 여러 가지 phase contrast 이론들을 small angle 근사로 접근하였다. 마지막으로 다중 성분 시스템에 대한 파동 광학의 수학적인 방법의 적용을 소개하였다. In this review, theoretical approaches of imaging and diffraction in electron microscopy are introduced which allows the diffraction patterns and images to be treated with equal facility and emphasized the relationships between them. The coherent wave optics, incoherent wave imaging theory were introduced. The idea of Abbe theory was also introduced. Varoius phase contrast theories in small angle approximation were derived including the wave theory on Multi-component system.

청녹색 레이저 다이오드 구조에 관한 TEM 관찰

이확주,류현,박해성,김태일,Lee, Hwack-Joo,Ryu, Hyun,Park, Hae-Sung,Kim, Tae-Il 한국현미경학회 1997 Applied microscopy Vol.27 No.3

Microstructural characterizations of II-VI blue laser diodes which consist of quaternary $Zn_{1-x}Mg_xS_ySe_{l-y}$ cladding layer, ternary $ZnS_ySe_{l-y}$ guiding layer and $Zn_{0.8}Cd_{0.2}Se$ quantum well as active layer were carried out using the transmission electron microscope working at 300 kV. Even though the entire structure is pseudomorphic to GaAs substrate, the structure had contained numerous extended stacking faults and dislocations which had created at ZnSe/GaAs interfaces and then further grown to the top of the epilayers. These faults might be expected to cause the degradation and shortening the lifetime of laser devices.

$Ba(Zn_{1/3}Ta_{2/3})O_3$ 세라믹에서 Zn vacancy 규칙화에 의한 변조구조의 고분해능 TEM 영상관찰

이확주,류현,최성진,남산,변제동,Lee, Hwack-Joo,Ryu, Hyun,Choi, Seong-Jin,Nahm, Sahn,Byun, Jae-Dong 한국현미경학회 1998 Applied microscopy Vol.28 No.1

Detailed studies of high resolution TEM inages on the modulated structure caused by Zn vacancy ordering along [110] direction in BZT sintered at $1400^{\circ}C$ for 90 hours had revealed that the images which had hexagonal patterns were similar to those obtained from the structure which had no modulation, These images had appeared over the wide ranges from -30 nm to -42 nm in defocus values and from 2 nm to 20 nm in thickness. The computer simulated images showed that the modulation due to Zn vacancy ordering had made a small change in contrast in the interior of hexagonal pattern, which was very difficult to differenciate in experiments. The image which demonstrated the modulated structure very well was the one which obtained at -52 nm in defocus value and 16 nm in thickness.

TEM 관련 이론해설(7): 투과전자현미경의 고분해능 영상이론: 결맞음 (2)

이확주,Lee, Hwack-Joo 한국현미경학회 2006 Applied microscopy Vol.36 No.1

고분해능 TEM 영상 이론의 결맞음 조산에서의 결맞음에 관한 개념을 소개하였다. 현미경에서 부분 결맞음 파동으로 인한 transfer function과 envelope의 발생을 설명하고 현미경의 분해능과 관련된 passband와 Scherzer 초점 조건을 소개하고 결맞음 특성에 관하여 소개하였다. In this review, the important ideas of coherence theory are introduced. The transfer function and damping envelopes of the microscope due to temporal and spatial coherence are described. The passbands and the condition of Scherzer focus are discussed in associated with the resolution of transmission electron microscope. The characterization of coherence is also described.

Pyrochlore형 화합물 $In_2(Ti_{1.7}Zn_{0.3})O_{0.67}$과 $In_2(Ti_{1.7}Mg_{0.3})O_{6.7}$에서의 변조구조 관찰

이확주,박현민,조양구,류현,남산,Lee, Hwack-Joo,Park, Hyun-Min,Cho, Yang-Koo,Ryu, Hyun,Nahm, Sahn,Bando, Y. 한국현미경학회 1999 Applied microscopy Vol.29 No.4

Pyrochlore 구조를 갖는 $Lu_2Ti_2O_7$와 그와 유사한 구조를 갖는 화합물, $In_2(Ti_{1.7}Zn_{0.3})O_{6.7}$와 $In_2(Ti_{1.7}Mg_{0.3})O_{6.7}$에 대한 미세구조 관찰을 200kV에서 작동되는 HRTEM을 이용하여 관찰하였다. 두 화합물에서는 변조구조가 관찰되었으나 pyrochlore구조인 $Lu_2Ti_2O_7$에서는 관찰되지 않았다. 전자회절패턴 분석에서는 변조구조는 incommensurate이고 [220] 방향으로 sublattice의 2.69배로 그 주기가 0.953 nm인 초격자가 관찰되었다. 고분해능 격자상에서는 sublattice의 2배 또는 3배의 초격자들로 조합되며 평균적으로 2.7배로 그 주기가 0.967 nm가 되는 초격자상이 관찰되었다. 두 화합물의 결정구조는 입방정 pyrochlore 구조와 아주 유사하나 입방정 축은 $90^{\circ}$에서 약간 벗어난 구조를 갖는다. 변조구조는 전자빔에 의하여 점차적으로 변조구조가 없는 구조로 비가역적으로 변환된다. Microstructural observations on the pyrochlore-type $Lu_2Ti_2O_7$ and the similar type of compounds, $In_2(Ti_{1.7}Zn_{0.3})O_{6.7}$ and $In_2(Ti_{1.7}Mg_{0.3})O_{6.7}$ which were made by the isothermal heat-treatment at 1623K for 18 days in Pt tube, were carried out using a top-entry HRTEM working at 200 kV. The modulated structures were found in both compounds, however, not in $Lu_2Ti_2O_7$. From the electron diffraction pattern analysis, the modulated superlattices are incommensurate and are 2.69 times of sublattices along (220) direction. The high resolution TEM images have shown that the superlattices consist of alternate superlattices which are composed of two or three sublattices, resulting in the average of 2.7 times of sublattices in accordance with the analysis of electron diffraction patterns. The crystal structures of both compounds are found to quite similar to those of pyrochlore, however the evidence that the cubic axes are slightly deviated from right angle. The modulated structure has gradually changed to the unmodulated structure induced by electron irradiation.

TEM 관련 이론해설 (4): 방사선의 종류와 물질에 의한 산란

이확주,Lee, Hwack-Joo 한국현미경학회 2003 Applied microscopy Vol.33 No.4

In this review, the sources and the characteristics of X-rays and electrons and their interactions with matters were described in terms of the atomic scattering factors. The geometrical diffraction conditions were taken into account in terms of Ewald spheres in reciprocal lattice spaces. The effects of the finite size of sources and detectors on diffractions were also considered. 물질의 구조 특성파악에 많이 사용되는 X-선과 전자선에 대한 소스 원을 살펴보고 물질과의 반응을 atomic scattering factor의 항으로 설명하였다. 물질과의 회절을 역 격자 공간에서의 Ewald sphere로 설명하고 유한 크기의 소스 파장과 검출기의 효과도 함께 고려하였다.

TEM 관련 이론해설 (1): 프레넬 회절과 프라운호퍼 회절

이확주,Lee, Hwack-Joo 한국현미경학회 2002 Applied microscopy Vol.32 No.2

회절 현상의 기초가 되는 호이겐스 원리로부터 키르히호프 공식을 유도하고 이어 이를 응용한 프레넬 회절과 프라운호퍼 회절에 대한 수학적인 도출을 소개하였다. 프레넬 회절은 후에 CTEM 영상 이론에 기반이 되고 프라운호퍼 회절은 수학적으로 Fourier 변환을 나타내어 전자회절 패턴이론과 HRTEM 영상이론에 기반을 이루게 된다. 다른 각도에서 개발된 Born 시리즈에 의한 산란 현상에 관한 이론도 소개하였다. 본회에서 소개된 이론은 후에 소개될 이론의 기반이 되면서 자주 사용되므로 일반물리학에서 많이 소개되고 있는 회절 현상에 대하여 이 기회에 이론적인 실력을 단단히 쌓았으면 한다. In this review, the author discussed how the Fresnel and Fraunhoffer Diffraction can be deduced from the Huygens-Fresnel principle and Kirchhoff Diffraction Theory. Fresnel diffraction became the basic theory of the CTEM image theory, and Fraunhoffer diffraction became the base for electron diffraction and HRTEM image theory by Fourier transformation. The author also discussed the diffraction based on Born series.

2원계 아공석 Ti-Co, Ti-Fe 합금의 공석반응 온도 아래의 온도에서 초석 ${\alpha}$ 반응

이확주,Lee, Hwack-Joo 한국현미경학회 1994 Applied microscopy Vol.24 No.3

A TEM study on proeutectoid ${\alpha}$ reaction at sub-eutectoid temperatures has been made in hypoeutectoid Ti-3.gw/o Co and Ti-5.2w/o Fe alloys. Widmanstatten ${\alpha}$ plates were formed in both alloys within the ${\beta}$ matrix with some modification of degenerate forms. These degenerate plates were formed by the sympathetic nucleation of ${\alpha}$ plates at ${\alpha}:{\beta}$ interphase boundaries. Three types of sympathetic nucleation, i.e., edge-to-edge, face-to-edge, face-to-face, were found in both alloys. The edge-to-edge sympathetically nucleated crystals formed a low-angle boundary between two crystals. The ${\alpha}:{\beta}$ interphase boundaries were found to be partially coherent interfaces which consist of regularly spaced misfit dislocations. The growth of these interphase boundaries were accomplished by the lateral movement of growth ledges. The intersection points of two ${\alpha}$ plates or the low angle boundaries which had formed by edge-to-edge sympathetic nucleation played a role as the potential sources of growth ledges during the growth of plate. The interfacial structures and the spatial morphologies of the degenerate proeutectoid ${\alpha}$ plates would be expected to influence the nucleation and growth of the succeeding eutectoid decomposition process.

GaAs/AlAs/InGaAs 에피층의 고분해능 TEM 이미지 전산모사

이확주,류현,이재덕,남산,Lee, Hwack-Joo,Ryu, Hyun,Lee, J.D.,Nahm, Sahn 한국현미경학회 1996 Applied microscopy Vol.26 No.4

Thin epilayer structures of GaAs/AlAs/InGaAs, grown by Molecular Beam Epitaxy, were investigated by high resolution transmission electron microscopy, Image in the [110] zone axis was taken and compared with the calculated images. The supercell structure which contains GaAs, AlAs and InGaAs layers was designed and was employed in the image calculation with MacTempas computer program. Good agreement was shown between experimental image and a set of calculated images with varying defocus and sample thickness.

MBE로 성장시킨 ZnSe/GaAs의 고분해능 TEM에 의한 계면관찰

이확주,류현,박해성,김태일,Lee, Hwack-Joo,Ryu, Hyun,Park, Hae-Sung,Kim, Tae-il 한국현미경학회 1995 Applied microscopy Vol.25 No.2

The interfacial structures of ZnSe/GaAs which were grown by single chamber MBE at $300^{\circ}C$ were investigated by high resolution transmission electron microscope working at 300 kV with resolution of 0.18 nm. The interfaces of ZnSe/GaAs whose thickness is 2,700 nm are wavy and extensive stacking faults were formed in ZnSe epilayer but the interfaces maintained the coherency with the substrate GaAs. The stacking faults are formed in {111} planes and their sizes are $10{\sim}20nm$ in length and two or three atomic layer in width with the density of $10^9/cm^2$. Micortwins and moire fringes are also observed. However. in 10 nm ZnSe epilayer, the interfaces are pseudomorphic and only moire fringes are observed in local areas. The cylindrical defects which are perpendicular to the interface with $50{\sim}60nm$ in length, were observed with the interval of 50 nm at ZnSe/GaAs interfaces in 2,700nm epilayer. The origin and character of these defects are unknown, however, they played a role of producing the structural defects at the interfaces.