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크린룸 제어를 위한 이중 방식의 PID제어기능이 내장된 임베디드형 필드제어 모듈의 개발
이왕헌(Wagheon Lee),이지헌(Jihun Lee),홍성렬(Sungryul Hong),노재영(Jaemyung Roh) 대한전기학회 2009 정보 및 제어 심포지엄 논문집 Vol.2009 No.10
The Programmable Logic Controllers [PLC]s are usually used in the clean room control and all of the control equipments are installed in the central control room [CCR] located afar the plant. Lots of the data cables and power lines must be drawn from the CCR to the plant. In this configuration, the fault in one line or equipment leads to the stop of all systems for the purpose of maintenance and trouble soothing of the clean control system. We developed an embedded system based Field Control Module [EFCM] and verified the usefulness of the proposed EFDM through lots of application tests on the model plant specially designed for the clean room control.