http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
몰리브덴 팁 전계 방출 소자의 제조 및 다이아몬드 상 카본의 코팅효과
주병권,정재훈,김훈,이상조,이윤희,차균현,오명환,Ju, Byeong-Kwon,Jung, Jae-Hoon,Kim, Hoon,Lee, San-Jo,Lee, Yun-Hi,Tchah, Kyun-Hyon,Oh, Myung-Hwan 한국전기전자재료학회 1998 전기전자재료학회논문지 Vol.11 No.7
Mo-tip field emitter arrays(FEAs) were fabricated by conventional Spindt process and their life time characteristics and failure mode were evaluated. The fabricated Mo-tip FEA could generate at least $0.35\{mu} A/tip$ emission current for about 320 persistently under a constant gate bias of 140 V and was finally destroyed through self-healing mode. Thin diamond-like carbon films were coated on the M-tip by plasma-enhanced CVD and the dependence of emission properties upon the DLC thickness was investigated. By DLC coating, the turn-on voltage and emission current were appeared to be improved whereas the current fluctuation was increased in the DLC thickness range of $0~1,000\{AA}$.