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송갑득,서무교,곽종식,이덕동 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
Carbon dioxide gas sensor, which has inner heater, is fabricated using Li ionic electrolyte as raw material which is systhesized by sol-gel method. It has either Au electrode or Pt electrode as the metal electrode of sensing electrode part. Sensing characteristics for carbon dioxide gas and interference effect for carbon monoxide gas and hydro carbon gases are investigated. The sensors using Au electrode and Pt electrode show sensitivity about 25 mV/decade and 26 mV/decade for the variation of carbon dioxide gas concentration, respectively. The sensor using Au electrode shows more exellent selectivity compared to that using Pt electrode for carbon monoxide gas and hydro carbon gases.
송갑득,박영일,이상문,이윤수,최낙진,주병수,서무교,허증수,이덕동 한국센서학회 2002 센서학회지 Vol.11 No.6
센서의 안정도와 감도를 개선시킬 수 있는 단일전극을 가진 열선형 마이크로 가스센서를 제작하였다. 일반적으로, 금속산화물 반도체를 이용한 가스센서는 히터전극과 감지전극의 두 개의 전극을 가지고 있다. 제작된 센서는 히터전극위에 감지물질을 형성하여 단일 전극을 가지는 구조를 가지고 있다. 히터와 감지전극으로 사용되는 Pt는 glass 기판위에 스퍼터링법으로 형성하였으며, SnO_2 감지물질은 제작된 Pt 전극위에 열증착시켜 형성하였다. SnO_2막은 lift-off 공정을 이용해서 패턴을 형성하고 1시간 동안 산소분위기에서 열산화하였다. 제작된 소자의 크기는 1.92x.1 mm^2 이다. CO 가스에 대한 감지특성을 조사한 결과 1,000 ppm에 대해 100 mV의 출력변화를 나타내었으며, 넓은 농도범위(0 ~ 10,000 ppm에서 선형적인 전압출력을 나타내었다. 또한 가스 반응 전과 반응 후의 전압출력을 비교해 볼 때, 1 % 이내의 편차를 나타내는 우수한 회복성을 나타내었다. Micro gas sensor with single electrode was proposed for improving stability and sensitivity, Generally, metal oxide gas sensors have two electrodes for heating and sensing. This fabricated new type sensor have only a single electrode by forming a sensing material onto heating electrode. Pt as a heating and sensing electrode was sputtered on glass and a SnO_2 sensing material was thermally evaporated on Pt electrode. SnO_2 was patterned by lift-off process and then thermally oxidized in O_2 condition for 1 hr., 600 ℃. The size fabricated sensor was 1.9 x 2.1 mm^2. As a result of CO gas sensing characteristics, this sensor showed 100 mV change for 1,000 ppm and linearlity for wide range(0 ~ 10,000 ppm) of gas concentrations. And the sensor shows a good recovery characteristics of 1 % deviation compared to initial resistance.
채유석,송갑득,강봉휘,서무교,이덕동 경북대학교 센서기술연구소 1997 센서技術學術大會論文集 Vol.8 No.1
The simple solid electrolyte carbon dioxide sensor was fabricated using Li ionic conductor with a heater and Li_(2)CO_(3)+Na_(2)CO_(3)+K_(2)CO_(3) (47.6 : 25.4 : 27.0) as a metal carbonate auxiliary phase. The electromotive force(EMF) was in excellent agreement with the EMF value calculated from the Nernst' s equation for CO_(2) gas concentration from 950 to 9,950ppm at 420℃, with the response time of 15~25 sec.. Water vapor hardly affected the sensor characteristics for relative humidity from 40% to 90%, in contrast to the case of the Li_(2)CO_(3) and Na_(2)CO_(3) + BaCO_(3)(1 : 1.7). The CO_(2) sensitivity of this sensor was stable for the test period of 240 hours.
Sol - Gel 법에 의한 Li 이온 - 고체 전해질의 CO2 가스 감지 특성
서무교,송갑득,곽종식,이덕동 ( Moo Gyo Seo,Kap Duk Song,jong Sik Kwak,Duk Dong Lee ) 한국센서학회 1995 센서학회지 Vol.4 No.3
Lithium ionic aolid electrclye was synthesized m in ambiencely sol-ge methxl. using tetraethyl orthosilcate, lithium metluwide, zirccmium n-prntxwide. utd trilntlle phosphate as precursors. he prepared material ryas dried and rmshed into ponder, nncl it w ns pressed into disk yux samples. $quot;These samples wcc sintemd at 0-C -11(X) fc () hours. The ply-sical characteristics of the samples acre imestigatecl ly TG D$quot; and lil) methods. CO senscn lrised on lithium ionic acdid elechwlye was fuhricated and its opxerationol characteristics were ntcsutrd. The sensing characteristics of the sensco sintered at 1(K) l show s the variation of e.m.f. OonU a.i Ei m\ decade fc the variaticm CO concentraticm at 0(l -ON) C efcerating temtxature. and goc linearit for 300-(i000 ppm.
고체전해질형 CO₂가스 감지 소자의 제작 및 그 동작 특성
서무교,송갑득,곽종식,이덕동 경북대학교 센서기술연구소 1994 센서技術學術大會論文集 Vol.5 No.1
The raw material of solid electrolyte type CO_(2) sensor was synthesized using tetraethoxysilane, lithium methoxide, zirconium n-propoxide, and tributyle phosphate as precursors, this process was carried out at 60℃ in N_(2) ambience. The prepared material was dried and crushed into powder, and it was pressed into disk type samples. These samples were sintered at 9000 -1100℃ for 50 hours. The physical characteristics of the samples were investigated by TG/DTA, SEM and XRD. The solid electrolyte type CO_(2) sensor was fabricated and its operational characteristics were measured. The sensing characteristics of the sensor shows about 86 mV/decade for the variation of CO_(2) concentration.
Fe<sub>2</sub>O<sub>3</sub>후막을 이용한 alcohol sensor 제작 및 감응특성
이윤수,송갑득,이상문,심창현,최낙진,주병수,이덕동,허증수,Lee, Y.S.,Song, K.D.,Lee, S.M.,Shim, C.H.,Choi, N.J.,Joo, B.S.,Lee, D.D.,Huh, J.S. 한국센서학회 2002 센서학회지 Vol.11 No.2
저비용과 휴대성을 고려한 알코올 경보기의 제작을 위해 동작온도가 낮고 감도가 높은 반도체 가스 센서를 제작하였다. $Fe_2O_3$에 금속 산화물인 $MoO_3$, $V_2O_5$, $TiO_2$, 그리고 CdO 등을 첨가하여 스크린 프린팅법을 이용하여 센서를 제작하였다. 센서의 전기적 안정성을 위하여 질소 분위기에서 $700^{\circ}C$, 2시간 동안 열처리를 하였다. 알코올, 탄화수소계 가스와 담배연기 등을 사용하여 센서의 가스 감도를 조사하였다. $V_2O_5$를 첨가한 센서가 알코올 가스 1,000 ppm에 대해서 약 $80{\sim}90%$의 감도를 보이며, 타 가스에 대한 선택성도 가짐을 알 수 있었다. 제작된 센서와 PIC-chip을 사용하여 휴대 가능한 경보기를 제작할 수 있었다. In order to get low cost and portability, semiconductor gas sensor need to have low operating temperature and high sensitivity. $Fe_2O_3$ based sensors which were doped with metal oxide catalysts($MoO_3$, $V_2O_5$, $TiO_2$, and CdO) were fabricated by screen printing method. To improve electrical stability of sensors, the $Fe_2O_3$ sensors were annealed in $N_2$ at $700^{\circ}C$ for 2 hours. The $V_2O_5$ doped $Fe_2O_3$ sensor showed about $80{\sim}90%$ sensitivity at alcohol 1,000 ppm and have good selectivity to hydrocarbon gas and tobacco odors. The fabricated sensor and PIC-chip were employed for portable alarm system.
Fe_2O_3 후막을 이용한 alcohol sensor 제작 및 감응특성
이윤수,송갑득,이상문,심창현,최낙진,주병수,이덕동,허증수 한국센서학회 2002 센서학회지 Vol.11 No.2
저비용과 휴대성을 고려한 알코올 경보기의 제작을 위해 동작온도가 낮고 감도가 높은 반도체 가스 센서를 제작하였다. Fe_2O_3에 금속 산화물인 MoO_3, V_2O_5, TiO_2, 그리고 CdO 등을 첨가하여 스크린 프린팅법을 이용하여 센서를 제작하였다. 센서의 전기적 안정성을 위하여 질소 분위기에서 700 ℃, 2시간 동안 열처리를 하였다. 알코올, 탄화수소계 가스와 담배연기 등을 사용하여 센서의 가스 감도를 조사하였다. V_2O_5를 첨가한 센서가 알코올 가스 1,000 ppm에 대해서 약 80 ~ 90%의 감도를 보이며, 타 가스에 대한 선택성도 가짐을 알 수 있었다. 제작된 센서와 PIC-chip을 사용하여 휴대 가능한 경보기를 제작할 수 있었다. In order to get low cost and portability, semiconductor gas sensor need to have low operating temperature and high sensitivity. Fe_2O_3 based sensors which were doped with metal oxidecatalysts(MoO_3, V_2O_5, TiO_2, and CdO) were fabricated by screen printing method. To improve electrical stability of sensors, the Fe_2O_3 sensors were annealed in N_2 at 700 ℃ for 2 hours. The V_2O_5 doped Fe_2O_3 sensor showed about 80 ~ 90 % sensitivity at alcohol 1,000 ppm and have good selectivity to hydrocarbon gas and tobacco odors. The fabricated sensor and PIC-chip were employed for portable alarm system.
알카리 금속 탄산염과 결착제의 혼합물을 감지물질로 하는 고체전해질 가스센서의 CO2 감응 특성
채유석,송갑득,강봉휘,서무교,이덕동 ( Yu Sug Chai,Kap Duk Song,Bong Hwi Kang,Moo Gyo Seo,Duk Dong Lee ) 한국센서학회 1998 센서학회지 Vol.7 No.2
The simple solid electrolyte carbon dioxide sensor with heaters were fabricated by using Li ionic conductor. Two Au electrodes were used for the reference and sensing electrode respectively. Two types of gas sensors, type ( I ) and type ( II ), were fabricated. Type ( I ) sensor was fabricated by the method of melting and crystallizing alkali metal carbonate at the temperature of 420 ∼ 500 ℃. The sensing membrane of type ( II ) sensor was formed by the printing method on sensing electrode after metal carbonate was mixed with binder. The response characteristics of sensors fabricated for the carbon dioxide were investigated for a range of CO₂ concentration from 950 ppm to 9,950 ppm at operating temperature 420 ℃. Type ( I ) sensor and type ( II ) sensor showed the sensitivity of 62 mV/decade and 65 mV/decade respectively. The emf/decade of type ( II ) sensor tested at 420 ℃ almost followed the theoretical value of Nernst`s equation and showed stable response characteristics with the fast response time of 15 ∼ 20 sec. Also type ( II ) sensor showed excellent stability and reproduction properties for 60 days.