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ISFET 이온감지기구의 Site Binding 모형 확장과 그 $Si_3N_4$ 수소이온 감지막에의 적용
서화일,권대혁,이종현,손병기,Seo, Hwa-Il,Kwon, Dae-Hyuk,Lee, Jong-Hyun,Sohn, Byung-Ki 대한전자공학회 1988 전자공학회논문지 Vol. No.
The dual dielectric films have been grown on single-crystalline silicon substrates with the thickness ranging from 125A to 180A at various gas and temperature conditions by using rapid thermal process that included independent nitridation step. The film characteristics and their dependence on the contents of the hydrochloric gas and the processing time have been studied. By the addition of the hydrochloric gas, the initial oxide thickness was significantly changed, but after sequential nitridation processes the thickness of the films was nevertheless a little bit varied within 10A. All the samples of the dual dielectric films show the increased breakdown voltages in proportion to the additive contents of the hydrochloric gas and also show the higher breakdown strengths than the thermal oxide and nitrided oxide films grown by the conventional furnance process or the rapid thermal nitridation process that was composed of the dependent nitridation cycles. 독립적인 nitridation step이 포함된 급속 열처리 공정을 이용하여 125-180A 두께의 이중 절연박막을 단결정 실리콘 상에 형성하였다. HCl 가스의 첨가량과 공정시간의 변화에 따른 박막 특성의 변화를 고찰하였고, 이에 따른 박막의 전기적 특성을 관찰하였다. HCl 가스의 첨가에 의해 초기의 산화막 두께의 성장은 현저하게 나타났으나, nitridation 후의 박막두께의 변화는 10A 이하로 매우 저조하였다. 이중 절연박막의 항복전압은 HCl 가스의 첨가량에 비례하여 점차 증가하였고, 절연강도는 furnace나 독립적인 nitridation step이 포함되지 않은 급속 열처리 공정으로 형성한 같은 두께의 박막에 비해 높은 것으로 분석되었다.
반도체공정기술을 이용한 마이크로 전류법적 포도당샌서의 제조 및 특성
서화일 韓國技術敎育大學校 1996 論文集 Vol.3 No.1
A micro glucose sensor based on the electrolysis of hydrogen peroxide was fabricated by forming immobilized GOD membrane on a Pt electrode, which was fabricated by semiconductor technology, and its characteristics investigated using two electrode system. The size of the fabricated sensor was 1mmX1.3mm. The sensor showed a response time of 3 minutes, a sensitivity of 50nA/mM and a good output linearity in the range of 0 to 7mM glucose concentration. These characteristics would allow the sensor to measure glucose concentration practically. For measuring glucose concentration in human blood without dilution by using the sensor, a outer membrane formation if required.
ISFET 바이오센서를 위한 신호처리회로의 개발과 그 요소센서와의 단일칩 집적
서화일,손병기 경북대학교 센서기술연구소 1990 센서技術學術大會論文集 Vol.1 No.1
The new signal process circuit using ISFETs as two input devices of a MOS differential amplifier stage for application to a ISFET biosesnor was developed. And the chip including developed circuit, ISFET and reference electrode was designed and fabricated according to modified LOCOS p-well CMOS process. The fabricated chip showed a gain of 0.8 and 1.6, good linearity in input-output relationship and very small power dissipation of 4mW. By forming immobilized urease membrane on ISFET gate of the chip, urea sensor system and developed signal process circuit was successfully integrated on a single chip.
단일칩집적을 위한 마이크로 pO₂센서 및 그 측정회로 설계
서화일 한국기술교육대학교 1994 論文集 Vol.1 No.1
Design of a micro pO₂sensor and its measurement circuit for the on-chip integration is described. The operation of the designed circuit, in connection with the equivalent model of the designed micro pO₂sensor, is simulated. The potentiostat showed applying voltage of 3-2.5V and stable response. And the I-V converter showed low input resistance of 30Ωand good linearity between input and output.