PbO 완충층을 이용한 Pt/Pb_1.1Zr_0.53Ti_0.47O₃/PbO/Si (MFIS)의 미세구조와 전기적 특성

박철호,송경환,손영국,Park, Chul-Ho,Song, Kyoung-Hwan,Son, Young-Guk 한국세라믹학회 2005 한국세라믹학회지 Vol.42 No.2

PbO 완충층의 역할을 확인하기 위해, r.f. magnetron sputtering법을 이용하여 p-type (100) Si 기판 위에 $Pt/Pb_{1.1}Zr_{0.53}Ti_{0.47}O_{3}$와 PbO target으로 Pt/PZT/PbO/Si의 MFIS 구조를 제조하였다. MFIS 구조에 완충층으로 PbO를 삽입함으로써 PZT 박막의 결정성이 크게 향상되었고, 박막의 공정온도도 상당히 낮출 수 있었다. 그리고 XPS depth profile 분석 결과, PbO 증착시 기판온도가 PbO와 Si의 계면에서 Pb의 확산에 미치는 영향을 확인하였다. PbO 완충층을 삽입한 MFIS는 높은 메모리 윈도우와 낮은 누설전류 밀도를 가지는 추수한 전기적 특성을 나타내었다. 특히, 기판온도 $300^{\circ}C$에서 증착된 PbO를 삽입한 Pt/PZT(200nm, $400^{\circ}C)PbO(80nm)/Si$는 9V의 인가전압에서 2.OV의 가장 높은 메모리 윈도우 값을 나타내었다. To study the role of PbO as the buffer layer, Pt/PZT/PbO/Si with the MFIS structure was deposited on the p-type (100) Si substrate by the r.f. magnetron sputtering with $Pb_{1.1}Zr_{0.53}Ti_{0.47}O_3$ and PbO targets. When PbO buffer layer was inserted between the PZT thin film and the Si substrate, the crystallization of the PZT thin films was considerably improved and the processing temperature was lowered. From the result of an X-ray Photoelectron Spectroscopy (XPS) depth profile result, we could confirm that the substrate temperature for the layer of PbO affects the chemical states of the interface between the PbO buffer layer and the Si substrate, which results in the inter-diffusion of Pb. The MFIS with the PbO buffer layer show the improved electric properties including the high memory window and low leakage current density. In particular, the maximum value of the memory window is 2.0V under the applied voltage of 9V for the Pt/PZT(200 nm, $400^{\circ}C)/PbO(80 nm)/Si$ structures with the PbO buffer layer deposited at the substrate temperature of $300^{\circ}C$.

효행법(안)의 효문화창달 해설

박철호 한국효학회 2004 학술회의 Vol.2004 No.1

중수소 기반 전자소재산업 연구 동향

박철호,조성배,최동훈,Park, Cheol-Ho,Jo, Seong-Bae,Choe, Dong-Hun 한국정보디스플레이학회 2020 인포메이션 디스플레이 Vol.21 No.6

압력지연삼투용 박막복합 중공사막 개발

박철호 한국막학회 2017 한국막학회 총회 및 학술발표회 Vol.2017 No.05

A salinity gradient power (SGP) system holds a great potential to generate continuous and clean electricity for 24 hours. Recently, incorporating with seawater reverse osmosis, SGP has been recognized as a alternative to solve the brine issue as well as energy saving. For commercialization, many scientists would sympathize that one of main hurdles is the limited performance of each membrane to extract the high power. In case of pressure retarded osmosis (PRO) closer to commercialization, the membrane must have the high water permeability and salt rejection. There are two type of modules; hollow fiber membranes and spiral type. Toray Chem. (Korea) already shows that 4th generation PRO module, but there is no still large size PRO hollow fiber modules. Therefore, this study presents 2 and 3 inch size of PRO hollow fiber membrane prepared by inside interfacial polymerization techniques.

효윤리체계에 의한 효도법 제정 고찰

박철호 한국효학회 2007 효학연구 Vol.0 No.4

“고령사회 대비를 위한 효행법 연구”

박철호 한국효학회 2005 학술회의 Vol.2005 No.1

소형견에서 발정주기 동안 질 세포 검사에 의한 분만일의 예측

박철호,양준열,박준태,이상호,박인철,김종택,서국현,오기석,손창호 사단법인 한국동물생명공학회 2013 한국동물생명공학회지 Vol.28 No.1

The aim of this study was to estimate of ovulation time and parturition day at the same time as breeding in small dog by vaginal cytology and to confirm the accuracy by comparing the expected parturition day and the real one. Characteristic features of vaginal cytology during the estrous cycle were the high proportion of large intermediate cell, superficial cell, anuclear cell and erythrocyte in proestrus, superficial cell and anuclear cell in estrus, parabasal cell, small intermediate cell, large intermediate cell and leukocyte in diestrus, parabasal cell and small intermediate in anestrus, respectively. When day 0 was the parturition day, the period of pregnancy is 67.45(64~75) days when the cornification index(CI) is over 90%. Also, on the basis of ovulation day, 63.65(59~66) days was confirmed, and 57.0(52~60) days was confirmed based on the first day of diestrus. There are the gap of 4 days between the day being over 90% in CI and ovulation day. On the basis of this, when expecting parturition day based on the day being over 90% in CI by vaginal cytology, 18.1% was produced in the same of the expected parturition day and the real one, 30.3% and 33.3% were produced in the gap of one day and two days, respectively so, the accuracy within two days was 81.7%. In addition, based on the first day of diestrus, it also was identified to 81.7% as the difference between the expected parturition day and the real one within 2 days. It demonstrated there are any difference between any expected parturition day by vaginal cytology. Thus on the basis of the day of being over 90% CI, it is fully thought to using clinically due to the possibility of prediction the parturition day at the same time as the determination of the proper time of the optimal mating time.

고강도 강의 수소지연파괴 평가

박철호,강남현 대한용접·접합학회 2020 대한용접학회 특별강연 및 학술발표대회 개요집 Vol.2020 No.11

鹿洞圈의 開發方向

박철호 순천대학교 지역개발연구소 1993 地域開發硏究 Vol.4 No.-

The study is to aim at searching the course of the regional development in the Nockdong area and purnishing information with the overall development plan of the area. This study is consisted of 5 chapters as follows ; The introduction, the pressent conditions of the Nockdong area, the dweller's way of thinking on the regional development, the basic course on the regional development plan of the Nockdong area, and the concusion. This study is mainly summarized as follows; 1. The establishment of the human settlement area system in the urban-rural continum development. 2. The foundation of the priority course in the regional development. 3. The activation of the small to wn(Nockdong). 4. The planing of the long-range overall development. 5. The developing course in each development project. Six projects are as follows ; The tourist development of the Sorok-island, The expansion of the Ssagchoong-shrine and the creation of park, the tourist development of the Nockdong area, the creation of agricultural and industrial complex, the conservation of purity sea area, and the development of the Nockdong-new town and the Nockdong-port.

1,3,5-Benzenetricarbonyl Trichloride의 화학적 불안정성과 분리막 성능

박철호,김찬수,심준목,박현설,조윤행 한국막학회 2020 멤브레인 Vol.30 No.3

1,3,5-benzenetricarbonyl trichloride is a chemical substance in which three acyl chlorides are located at 1,3,5 position in the benzene ring, and is an important chemical for the area where the good physical and chemical properties are required through high degree of crosslinking. In particular, it is possible to form a three-dimensional structure having a certain pore size, it is used in various separation and purification fields. However, the high reactivity of acyl chloride has the advantage of a fast reaction rate, which means that it is difficult to control chemically to have a certain performance in other aspects. Therefore, in this study, we observed how the chemical change of 1,3,5-benzenetricarbonyl trichloride affected the membrane performance. 1,3,5-benzenetricarbonyl trichloride는 3개의 아실클로라이드가 벤젠고리 1,3,5에 위치한 화학물질로, 높은 가교도를 통한 물리적⋅화학적 특성을 요구하는 곳에 사용하는 중요한 화학물이다. 특히 일정 기공크기를 갖고 있는 3차원 구조체형성이 가능하여, 다양한 분리 정제 분야에 사용되고 있다. 하지만 아실클로라이드의 높은 반응성은 반응속도가 빠른 장점을갖고 있지만, 다른 측면에서는 일정한 성능을 가질 수 있도록 화학적 제어가 어려운 점도 있다. 따라서 본 연구에서는 1,3,5- benzenetricarbonyl trichloride의 화학적 변화가 어떻게 분리막 성능에 영향을 주는지 관찰하였다.