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Micro/Meso부품 대응형 마이크로 기계가공시스템 기술 연구
박종권(J.K. Park),노승국(S.K. Ro),김병섭(B.S. Kim),경진호(J.H. Kyung) 한국생산제조학회 2005 한국공작기계학회 추계학술대회논문집 Vol.2005 No.-
This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as p-Late, μ-milling/drilling machine and μ-grinding machine are the basic elements constructing μ-factory which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with vertical XY VCM stage and air spindle attached on air-bearing Z stage was designed and manufactured. The novel miniature air-bearing stage with slotless linear motor and high speed spindle with magnetic bearing also were designed.