무전해 도금법을 이용한 Sn-Cu 범프 형성에 관한 연구

문윤성,이재호,Moon, Yun-Sung,Lee, Jae-Ho 한국마이크로전자및패키징학회 2008 마이크로전자 및 패키징학회지 Vol.15 No.2

Sn-Cu계 솔더 범프에서 무전해도금법을 이용한 범프 형성에 대한 연구를 하였다. $20{\mu}m$ via에 전기도금법으로 구리를 채운 웨이퍼 위에 ball형태의 범프를 형성하기 위하여 구리와 주석을 도금하여 약 $10{\mu}m$높이의 범프를 형성하였다. 구리 범프 형성 시 via위에 선택적으로 도금하기 위하여 활성화 처리 후 산세처리를 실시하고 무전해 도금액에 안정제를 첨가하였다. 무전해도금법을 이용하여 주석 범프 형성 시 도금층이 구리 범프에 비해 표면의 균일도가 벌어지는 것으로 관찰되었지만 reflow공정을 실시한 후 ball 형태의 균일한 Sn-Cu 범프를 형성하였다. The electroless plating of copper and tin were investigated for the fabrication of Sn-Cu bump. Copper and tin were electroless plated in series on $20{\mu}m$ diameter copper via to form approximately $10{\mu}m$ height bump. In electroless copper plating, acid cleaning and stabilizer addition promoted the selectivity of bath on the copper via. In electroless tin plating, the coating thickness of tin was less uniform relative to that of electroless copper, however the size of Sn-Cu bump were uniform after reflow process.

악성종양에서의 혈청 비타민 B12 , Folate 및 Ferritin 의 진단적 의의

문윤성,박국태,윤세진,노흥규,김삼용 대한핵의학회 1986 핵의학 분자영상 Vol.20 No.1

전기도금방법을 이용한 Ni-Diamond 복합도금층 제조에 대한 연구

문윤성,이재호,오태성,변지영,Moon, Yun-Sung,Lee, Jae-Ho,Oh, Tae-Sung,Byun, Ji-Young 한국마이크로전자및패키징학회 2007 마이크로전자 및 패키징학회지 Vol.14 No.1

니켈-다이아몬드 복합 도금은 회전전극을 이용하여 미세 다이아몬드 입자가 공침된 니켈 복합도금층에 대하여 연구하였다. 복합층의 도금시에 인가한 전류밀도와 전류형태(직류, 펄스)가 도금층의 경도와 표면형상에 미치는 영향에 대하여 알아보았으며 첨가제의 영향에 대하여도 연구하였다. 표면조직을 FESEM을 이용하여 관찰하였으며 Micro Victors를 사용하여 도금층의 경도를 측정하였다. 복합도금층에 다이아몬드가 들어감에 따라 경도는 100%, 마찰저항은 27%까지 증가하였다. 또한 다이아몬드 함량이 20gpl 이상인 경우 경도값이 완만하게 증가하였다. The codeposition behavior of submicron sized diamond with nickel from nickel electrolytes has been investigated. Electroplating of diamond dispersed nickel composites was carried out on a rotating disk electrode (RDE). The effects of current type and current density on the electrodeposited Ni-diamond composite coating were investigated. The effects of surfactants on the composite coating were also investigated. The hardness of coating was measured with varying electroplating conditions using Micro Vickers. As diamond was incorporated into the coating, the hardness of coating as well as the wear resistance was improved. The hardness of the coating was increased as much as 100% and the wear resistance was improved as much as 27%. The hardness of composite coating layer increased slightly at the diamond content of above 20 gpl.

전이성간암의 임상적 고찰

이복희,문윤성,정성묵 충남대학교 의과대학 지역사회의학연구소 1982 충남의대잡지 Vol.9 No.2

Sixty seven patients with primary extrahepatic malignancy and documentation of the presence or absence of hepatic metastases were selected for study. Tie results were summerized as follow: 1. Twenty one of 67 patients were documented presence of hepatic metastasis. 2. Hepatomegaly on physical examination were detected in 71.4% of patient with hepatic metastasis. 3. Serum alkaline phosphatase elevation were observed in 38.1% of patient with metastasis and in 13.0% of patient without metastasis. 4. Abnormal value of serum AFP were revealed in 14.3% of patient with metastasis and in 4.3% of patient without metastasis 5. Patient with serum CEA value greater than 9.0ng/ml were calculated in 87.5% of metastasis and in 37.5% of non-metastasis.

고전류밀도 구리도금에서 첨가제에 따른 전기화학적 특성변화 연구

심진용,문윤성,이재호,Shim, Jin-Yong,Moon, Yun-Sung,Lee, Jae-Ho 한국마이크로전자및패키징학회 2011 마이크로전자 및 패키징학회지 Vol.18 No.2

구리의 전해정련공정에서의 최대 전류밀도는 350 A/$m^2$ 이며 생산성의 증가를 위해선 고전류밀도가 필요하다. 회전전극(RDE)을 이용하면 구리의 표면 확산층의 두께조절이 가능하게 되며 안정적인 1000 A/$m^2$의 고전류밀도 구리 도 금이 가능하게 된다. 회전 속도 400rpm조건에서 안정적인 고전류밀도 구리 도금이 가능하였다. 구리 전해정련 과정 중 구리표면의 전착특성 향상을 위해 첨가제는 thiourea와 glue가 사용된다. 고전류밀도 조건에서 첨가제의 거동을 알아보기 위 해 구리가 전착되는 영역에서 첨가제의 농도에 따른 potentiodynamic polarization 실험을 하였고, 1000 A/$m^2$ 조건에서 정전류 실험을 하였다. 동일한 선속도를 인가하기 위해 원통형 회전전극을 이용해 구리도금을 하였고, 도금층의 표면조도 측정에서 thiourea가 16 ppm 들어갔을 때 가장 낮은 조도와 안정적인 취성특성을 나타내었다. 첨가되는 glue의 양이 증가할 수록 표면 조도는 증가하였고, 구리도금층의 경도는 큰 차이가 없었다. 결정립 미세화제로 사용되는 thiourea의 첨가량의 증가에 따라 구리의 핵 성장은 미세해졌고, glue 첨가량의 증가에 따라서는 핵 성장이 영향을 받지 않았다. The maximum current density of copper electrorefining is 350 A/$m^2$ and the higher current density is required to promote the copper productivity. The 1000 A/$m^2$ high current density is possible when rotating disc electrode is employed to reduce diffusion thickness. The copper electroplating with 1000 A/$m^2$ is possible at 400 rpm. Thiourea and glue were used to improve the electrodeposition behaviors during copper electrorefining process. Potentiodynamic polarization tests were conducted to investigate the effects of additives on copper electrodeposition. Galvanostatic tests were also conducted at 1000 A/$m^2$. Copper were electroplated on cylindrical rotating electrodes to give the uniform flow on the electrode surface. The lowest surface roughness was obtained when 16 ppm thiourea was added to the electrolytes. The surface roughness was increased with glue concentration. The surface hardness was not influenced by addition of glue. The copper nuclei were getting smaller with thiourea concentration, however there is no glue effects on copper nucleation.

고전류밀도에서 첨가제에 따른 구리도급의 표면 특성 연구

심진용,문윤성,허기수,구연수,이재호,Shim, Jin-Yong,Moon, Yun-Sung,Hur, Ki-Su,Koo, Yeon-Soo,Lee, Jae-Ho 한국마이크로전자및패키징학회 2011 마이크로전자 및 패키징학회지 Vol.18 No.1

전류밀도는 전기도급법에서 생산성과 직접적인 연관이 있고, 생산성의 증가를 위해선 고전류밀도가 필요하다. 회전전극(RDE)의 회전 속도를 증가시키면 고유속을 얻을 수 있다. 유속 조절을 위해 회전전극과 원통형 회전 전극을 사용하였고, 전압과 전류의 관계를 알아보기 위해 정전류, 정전압 실험과 linear sweep voltammetry 실시하였다. 회전 전극의 회전 속도가 400 rpm이상 조건에서, 수소가 발생하지 않고 1000 A/$m^2$이상의 최대전류멸도가 가능하였다. $25^{\circ}C$와 $62^{\circ}C$ 조건에서 구리의 확산계수는 각각 $5.5{\times}10^6\;cm^2\;s^{-1}$와 $10.5{\times}10^6\;cm^2\;s^{-1}$로 계산되었다. 수소가 발생하지 않으면서 안정적으로 구리를 전착할 수 있는 조건은 -0.05 V (vs Ag/AgCl)이었다. 첨가제인 glue와 thiourea-를 넣음으로써 구리의 침상성장을 막을 수 있었다. 표면 거칠기는 UV-Vis Spectrophotometer를 아용하여 분석되었다. 600 nm 영역에서 반사도는 측정 되었고 표면 거철기가 개선될수록 표면 반사도가 증가하였다. The current density in copper electroplating is directly related with the productivity and then to increase the productivity, the increase in current density is required. To obtain the high mass flow rate, rotating disk electrode(RDE) was employed. High rotational speed in RDE can increase the mass flow rate and then high speed electroplating was possible using RDE to control mass flow. Two types of cathode were used. One is RDE and another is rotating cylindrical electrode(RCE). A constant-current, constant-voltage and linear sweep voltammetry were applied to investigate current and voltage relationship. The maximum current density without evolution of hydrogen gas was increased with rotational speed. Over 400 rpm, maximum current density was higher than 1000 A/$m^2$. The diffusion coefficients of copper calculated from the slope of the plots are $5.5{\times}10^6\;cm^2\;s^{-1}$ at $25^{\circ}C$ and $10.5{\times}10^6\;cm^2\;s^{-1}$ at $62^{\circ}C$. The stable voltage without evolution of hydrogen gas was -0.05 V(vs Ag/AgCl). Additives were added to prevent dendritic growth on cathode deposits. The surface roughness was analyzed with UV-Vis Spectrophotometer. The reflectance of the copper surface over 600 nm was measured and was related with the surface roughness. As the surface roughness improved, the reflectance was also increased.

듀얼 어텐션 네트워크를 이용한 다변량 시계열 데이터 이상 탐지 및 원인 분석 방법

유재진,백준걸,문윤성,박계순 대한산업공학회 2021 대한산업공학회 춘계학술대회논문집 Vol.2021 No.6

듀얼 어텐션 네트워크를 이용한 다변량 시계열 데이터 이상 탐지 및 원인 분석 방법

유재진,백준걸,문윤성,박계순 한국경영과학회 2021 한국경영과학회 학술대회논문집 Vol.2021 No.6

악성종양에서 혈청 비타민 B12 , 엽산 및 Ferritin 의 진단적 의의

김삼용,노흥규,이복희,문윤성,성인환 대한핵의학회 1987 핵의학 분자영상 Vol.21 No.1

In order to evaluate the clinical significances of the serum vitamin BM(12), folate and ferritin levels in patients with malignant tumors, the levels were measured in 10 normal control subjects, 70 patients with malignant tumors, 7 patients with liver cirrhosis and 25 patients with other benign diseases. The results are as follows: 1) In normal control subjects, mean serum values for vitamin B12, folate and ferritin level were 588.80± 131.58 pg/ml, 5.59±1.52 ng/ml and 89.22±42.78 ng/ml retrospectively. 2) There was no significant difference in serum levels between patients with benign diseases and normal control subjects. 3) The serum vitamin B_(12) and ferritin levels in patients with liver cirrhosis were significantly higher than in normal control, and the serum folate levels in these patients were lower than in normal control subjects. 4) The serum vitamin B12 and ferritin levels in patients with malignant tumors were significantly higher than in normal control subjects, and the serum folate levels in these pents were significantly lower than in normal control subjects. The above results suggest that the serum vitamin B_(12) and ferritin may be useful as tumor markers in patients with malignant tumors.

비갑상선 중증 질환에서 혈청 fT3와 rT3 의 변화에 관한 연구

이종화,노흥규,신영태,김주옥,유철재,문윤성 대한핵의학회 1985 핵의학 분자영상 Vol.19 No.1

Recently changes in thyroid physiology during acute and chronic medical illness were demonstrated. The serum fT₃, rT₃, T₄, T₃ fT₄ and TSH concentration were measured by radioimmunoassy method in 49 patients with critical illness and 10 normal subjects to assess the change of thyroid function in critical illness. The results were as follows; 1) The mean serum fT3 concentration was 6.68±1.05 pmol/ml in normal subjects while in patients with critical illness the serum fT3 concentration was significantly lowered to 1.55±1.15 pmol/ml (p〈0.001). 2) The mean serum rT3 concentration was 0.22±0.44 ng/ml in normal subjects and 0.42±0.37 ng/ml in patient with critical illness. The were was increment in critically ill patients as compared to normal subjects but no statistically significant difference (p〉0.05). 3) The mean serum T3 concentration was 1.24±0.25 ng/ml in normal subjects and 0.56±0.56 ng/ml in patients with criticial illness and there was significant difference in each other (p〈0.005). 4) The mean seT4, and TSH concentrations were 7.80±1.02 μg/dl, 1.26±0.39 ng/d1, 1.87±0.45 μU/ml in normal subjects respectively and 6.02±3.06 μg/dl, 1.46±0.80 ng/d1, 1.74±0.79 μU/ml in patients with critical illness and there wqs no significant difference between critically ill patients and normal subjects. 5) The ratio of mean serum concentration of fT₃ and rT₃ (fT₃/rT₃), 30.42±5.58 in normal subjects was significantly higher (p〈0.005) than the coresponding value, 6.39±6.76 in patients with critical illness. 6) The mean serum fT₃ concentration in expired cases (n=12) during admission was significant difference between expired and survived cases (p〈0.005). The mean serum rT3 concentration was 0.67±0.58 ng/ml in expired cases and 0.34±0.22 ng/ml in survived cases with significant difference (p〈0.005). Half of the cases who showed less than 3 μg/dl of serum T4 level were expired.