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고진공 터보 분자펌프용 자기베어링 시스템의 디지털 선형 제어시스템
노승국,경진호,박종권,남우호,고득용,Ro, Seung-Kook,Kyung, Jin-Ho,Park, Jong-Kweon,Nam, Woo-Ho,Koh, Deug-Yong 한국진공학회 2010 Applied Science and Convergence Technology Vol.19 No.4
본 논문에서는 고진공용 터보분자펌프의 비접촉 고속회전을 위한 자기베어링 시스템의 디지털 제어시스템의 설계에 대하여 소개하였으며, 실례로 800 l/s급의 고진공 펌프에 대하여 축 유연모드의 후방향 위험속도를 넘는 최대 40,000 rpm까지의 회전실험 결과를 나타내었다. 제안된 제어시스템은 기본적으로 PID 기반의 직접궤환 제어기와 자이로스코픽 모멘트 효과를 제어하기 위한 교차궤환기, 유연모우드 감쇄를 위한 리드필터와 동기진동 저감을 위한 노치필터 등으로 구성되어 있으며, 이러한 제어기는 자기부상형 터보분자펌프 외에 고속 플라이휠과 같은 자기베어링에 적용될 수 있다. In this paper, a digital controller of magnetic bearing system for a high vacuum turbomolecular pump (TMP) is designed and examined. For stabilizing and providing damping in magnetic bearing, the digital PID controller is applied for each 5 control axes, and the inter-axis cross feedback controller is also applied to suppress low frequency vibration caused by gyroscopic moment of the rotor at high speed of rotation. The fabricated rotor-shaft has its first flexible natural frequency lower than maximum speed, about 614Hz, so the two lead filters are applied to increase damping of flexible mode. Notch filters with rotating frequency were selected to reduce vibration of the pump housing caused by unbalance load. The implemented controllers are verified by examination of frequency response and rotating test up to 40,000 rpm, which is higher than critical speed of backward flexible mode.
자기액튜에이터를 이용한 능동제어형 공기베어링 로터리 유닛 설계
노승국(Seung-Kook Ro),김경호(Gyungho Khim),박종권(Jong-Kweon Park) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
In this paper, we introduce an air bearing rotary unit with servo motor for precision control of rotation. For minimizing radial and axial rotational errors caused by manufacturing tolerances and process loads, a magnetic actuator for compensation of shaft position was designed. This magnetic actuator is designed with permanent magnets generating axial and redial bias fluxes with axially formulating flux paths. The bias forces can be adjusted by four electromagnets with radial poles and coils generating radial magnetic fluxes. By combinations of these PM (permanent magnetic) and EM (Electromagnetic) fluxes, the radial and axial forces are possible to control.
노승국(Seung-Kook Ro),박종권(Jong-Kweon Park),박현덕(Hyun-Duk Park) 한국생산제조학회 2010 한국공작기계학회 추계학술대회논문집 Vol.2010 No.-
This paper introduces recently designed desktop sized NC lathe system and its components. The machine is designed for precision turning of circular parts with 0.5 ~ 20 ㎜ in diameter and length less than 50 mm, with minimum space usage. In this study, it is aimed to achieve high accuracy of the movements and good rigidity of the machine with practical machine, and the components such as main machine structure, spindle and XZ stage were designed to support these performances. The manufactured system has been evaluated for its performances, and some machining examples are shown.
노승국(Seung-Kook Ro),박종권(Jong-Kweon Park) 한국생산제조학회 2009 한국공작기계학회 추계학술대회논문집 Vol.2009 No.-
In this paper, we report a novel surface motor stage supported air bearings and driven by electromagnetic linear motors to be used in a compact sized precision machine systems, such as micro-machine tools or measurement system with minimum height of the X-Y stage. By combining actuations of motors simultaneously, X and Y linear motions can be generated, and angular motion is also possible to control. To control planar motion, a grid encoder is used, and a programmable numerical controller is used to control this system. The thrust force and attraction force were calculated with magnetic circuit model. The designed prototype is 220 (L) × 220 (W) × 66 (H) ㎣ in total size with movement range with 20 ㎜ × 20 ㎜. The prototype was fabricated, and basic aspects such as vertical stiffness and thrust force were evaluated. For the positioning control, 20 ㎚ of positioning resolution was obtained for X and Y axis, and three motions could be controlled separately.
노승국(Seung-Kook Ro),김경호(Gyungho Khim),신우철(Woochul Shin),박종권(Jong-Kweon Park) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
This paper introduces a system to machine micro-sized pat-terns effectively on surface based on micro-milling process using tools with rotation and oscillation. A spindle supported by active magnetic bearings in radial directions were devel-oped and implemented for proposed system. The rotating axis of the tool can be moved faster than stage system up to 500 ㎐ of within air gap as amplitude. This can be applied for repeated patterns without movement of stages carrying workpiece or spindle which have usually slower response time. To review the effectiveness of proposed concept, we integrated the proposed micro-spindle with active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. A flat end mill with 0.8 ㎜ diameter rotating 100 krpm was induced to workpiece with 35 degrees of inclination angle while oscillated 200 ㎐ in radial direction. The results show machined pattern spacing 17 ㎛ and 35 ㎛.