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TiO₂ 씨앗층을 이용한 다양한 기판에서의 Co/Pd 층의 수직 자기 이방성에 대한 연구
강물빛(Mool-Bit Kang),윤정범(Jungbum Yoon),이정섭(Jeong-Seop Lee),유천열(Chun-Yeol You) 한국자기학회 2013 韓國磁氣學會誌 Vol.23 No.1
We investigate the perpendicular magnetic anisotropy in TiO₂/Co/Pd on GaAs(100), MgO(100), MgO(111), Si(100), and glass substrates. We find that the roughness of TiO₂ depends on the O₂ partial pressure in the magnetron sputtering process. The perpendicular magnetic anisotropies are found in all substrates with TiO₂ seed layer, and the perpendicular magnetic anisotropy of Co/Pd system is insensitive on the type of the substrate when the thickness of TiO₂ seed layer is thicker than 5 nm. However, MgO(111)substrate promotes TiO₂ rutile (111) structure, and it causes largest perpendicular magnetic anisotropy in TiO₂/Co/Pd(111) structures.