N₂와 NH₃ 반응성가스를 사용하여 마그네트론 스퍼터링법으로 제작한 AlN박막의 특성

한창석,Han, Chang-Suk 한국재료학회 2015 한국재료학회지 Vol.25 No.3

Aluminum nitride, a compound semiconductor, has a Wurtzite structure; good material properties such as high thermal conductivity, great electric conductivity, high dielectric breakdown strength, a wide energy band gap (6.2eV), a fast elastic wave speed; and excellent in thermal and chemical stability. Furthermore, the thermal expansion coefficient of the aluminum nitride is similar to those of Si and GaAs. Due to these characteristics, aluminum nitride can be applied to electric packaging components, dielectric materials, SAW (surface acoustic wave) devices, and photoelectric devices. In this study, we surveyed the crystallization and preferred orientation of AlN thin films with an X-ray diffractometer. To fabricate the AlN thin film, we used the magnetron sputtering method with $N_2$, NH3 and Ar. According to an increase in the partial pressures of $N_2$ and $NH_3$, Al was nitrified and deposited onto a substrate in a molecular form. When AlN was fabricated with $N_2$, it showed a c-axis orientation and tended toward a high orientation with an increase in the temperature. On the other hand, when AlN was fabricated with $NH_3$, it showed a-axis orientation. This result is coincident with the proposed mechanism. We fabricated AlN thin films with an a-axis orientation by controlling the sputtering electric power, $NH_3$ pressure, deposition speed, and substrate temperature. According to the proposed mechanism, we also fabricated AlN thin films which demonstrated high a-axis and c-axis orientations.

정적법을 이용한 Mg-Al계 합금과 순수 Ti의 고온 젖음현상 및 Al계면에서의 정합성에 미치는 영향

한창석,김우석 한국재료학회 2021 한국재료학회지 Vol.31 No.1

In this study, high temperature wetting analysis and AZ80/Ti interfacial structure observation are performed for the mixture of AZ80 and Ti, and the effect of Al on wetting in Mg alloy is examined. Both molten AZ80 and pure Mg have excellent wettability because the wet angle between molten droplets and the Ti substrate is about 10° from initial contact. Wetting angle decreases with time, and wetting phenomenon continues between droplets and substrate; the change in wetting angle does not show a significant difference when comparing AZ80-Ti and Mg-Ti. As a result of XRD of the lower surface of the AZ80-Ti sample, in addition to the Ti peak of the substrate, the peak of TiAl3, which is a Ti-Al intermetallic compound, is confirmed, and TiAl3 is generated in the Al enrichment region of the Ti substrate surface. EDS analysis is performed on the droplet tip portion of the sample section in which pure Mg droplets are dropped on the Ti substrate. Concentration of oxygen by the natural oxide film is not confirmed on the Ti surface, but oxygen is distributed at the tip of the droplet on the Mg side. Molten AZ80 and Ti-based compound phases are produced by thickening of Al in the vicinity of Ti after wetting is completed, and Al in the Mg alloy does not affect the wetting. The driving force of wetting progression is a thermite reaction that occurs between Mg and TiO2, and then Al in AZ80 thickens on the Ti substrate interface to form an intermetallic compound.

용융드래그방법을 이용한 마그네슘 합금 박판의 제조조건 확립

한창석,권용준,Han, Chang-Suk,Kwon, Yong-Jun 한국재료학회 2021 한국재료학회지 Vol.31 No.9

An investigation is performed to clarify the manufacturing conditions of pure magnesium and AZ31 magnesium alloy thin plate using the melt drag method. By the melt drag method, suitable for magnesium molten metal, pure magnesium can be produced as a continuous thin plate with a thickness of 1.4 mm to 2.4 mm in the range of 5 m/min to 20 m/min of roll speed, and the width of the thin plate to the nozzle outlet width. AZ31 magnesium alloy is able to produce a continuous sheet of thickness in the range of 5 m/min to 30 m/min in roll circumferential speed, with a thickness of 0.6 mm to 1.6 mm and a width of the sheet matching the nozzle outlet width. In the magnesium melt drag method, the faster the circumferential speed of the roll, the shorter the contact time between the molten metal and the roll, and it is found that the thickness of the produced thin plate becomes thinner. The effect of the circumferential roll speed on the thickness of the thin plate is evident in the low roll circumferential region, where the circumferential speed is 30 m/min or less. The AZ31 thin plate manufactured by the melt drag method has a finer grain size as the thickness of the thin plate decreases, but it is currently judged that this is not the effect of cooling by the roll.

플라즈마 스프레이방법을 이용하여 Ti 언더코트를 제작한 SUS316L강의 부식피로 특성

한창석,김우석,Han, Chang-Suk,Kim, Woo-Suk 한국재료학회 2021 한국재료학회지 Vol.31 No.3

In this study, using the plasma spray method, tensile and compression fatigue tests are performed in saline solution to examine the effect of Ti undercoat on corrosion fatigue behavior of alumina-coated specimens. The alumina-coated material using Ti in the undercoat shows better corrosion fatigue strength than the base material in the entire stress amplitude range. Fatigue cracking of UT specimens occurs in the recess formed by grit-blasting treatment and progresses toward the base metal. Subsequently, the undercoat is destroyed at a stage where the deformation of the undercoat cannot follow the crack opening displacement. The residual stress of the UT specimen has a tensile residual stress up to about 100 ㎛ below the surface of the base material; however, when the depth exceeds 100 ㎛, the residual stress becomes a compressive residual stress. In addition, the inside of the spray coating film is compressive residual stress, which contributes to improving the fatigue strength characteristics. A hardened layer due to grit-blasting treatment is formed near the surface of the UT specimen, contributing to the improvement of the fatigue strength characteristics. Since the natural potential of Ti spray coating film is slightly higher than that of the base material, it exhibits excellent corrosion resistance; however, when physiological saline intrudes, a galvanic battery is formed and the base material corrodes preferentially.

성형벨트를 부착시킨 장비를 이용하여 용융드래그방법으로 제작한 마그네슘 합금의 제작조건 확립

한창석,권용준,Han, Chang-Suk,Kwon, Yong-Jun 한국재료학회 2021 한국재료학회지 Vol.31 No.10

To improve the shortcomings and expand the advantages of the single-roll melt drag method, which is a type of continuous strip casting method, the melt drag method with a molding belt is applied to AZ31 magnesium alloy. By attaching the forming belt to the melt drag method, the cooling condition of the thin plate is improved, making it possible to manufacture thin plates even at high roll speed of 100 m/min or more. In addition, it is very effective for continuous production of thin plates to suppress oxidation of the molten metal on the roll contact surface by selecting the protective gas. As a result of investigating the relationship between the contact time between the molten metal and the roll and the thickness of the sheet, it is possible to estimate the thickness of the sheet from the experimental conditions. The relationship between the thin plate thickness and the grain size is one in which the thinner the thin plate is, the faster the cooling rate of the thin plate is, resulting in finer grain size. The contact state between the molten metal and the roll greatly affects the grain size, and the minimum average grain size is 72 ㎛. The thin plate produced using this experimental equipment can be rolled, and the rolled sample has no large cracks. The tensile test results show a tensile strength of 303 MPa.

COD-저항 곡선을 이용한 불안정 균열 성장의 예측

한창석,엄윤용,송지호 대한기계학회 1986 대한기계학회 춘추학술대회 Vol.- No.-

Al-Ni 전구체의 연소합성 발포에 의한 Al₃Ni 폼과 할로우 파이프의 복합구조체 제작 및 폼의 충진성과 기공상태 조사

한창석,진성윤,권혁구,Han, Chang-Suk,Jin, Sung-Yooun,Kwon, Hyuk-Ku 한국재료학회 2019 한국재료학회지 Vol.29 No.10

In order to develop a process for manufacturing a composite structure of an intermetallic compound foam and a hollow material, the firing and pore form of the Al-Ni precursor in a steel pipe are investigated. When the Al-Ni precursor is foamed in a hollow pipe, if the temperature distribution inside the precursor is uneven, the pore shape distribution becomes uneven. In free foaming, no anisotropy is observed in the foaming direction and the pore shape is isotropic. However, in the hollow pipe, the pipe expands in the pipe axis direction and fills the pipe. The interfacial adhesion between $Al_3Ni$ foam and steel pipe is excellent, and interfacial pore and reaction layer are not observed by SEM. In free foaming, the porosity is 90 %, but it decreases to about 80 % in the foam in the pipe. In the pipe foaming, most of the pore shape appears elongated in the pipe direction in the vicinity of the pipe, and this tendency is more remarkable when the inside pipe diameter is small. It can be seen that the pore size of the foam sample in the pipe is larger than that of free foam, because coarse pores remain after solidification of the foam because the shape of the foam is supported by the pipe. The vertical/horizontal length ratio expands along the pipe axis direction by foaming in the pipe, and therefore circularity is reduced.

Two-Facing-Targets (TFT) 스퍼터링장치를 이용하여 증착한 AlN박막의 잔류응력 측정

한창석,권용준 한국재료학회 2021 한국재료학회지 Vol.31 No.12

Aluminum nitride having a dense hexagonal structure is used as a high-temperature material because of its excellent heat resistance and high mechanical strength; its excellent piezoelectric properties are also attracting attention. The structure and residual stress of AlN thin films formed on glass substrate using TFT sputtering system are examined by XRD. The deposition conditions are nitrogen gas pressures of 1 × 102, 6 × 103, and 3 × 103, substrate temperature of 523 K, and sputtering time of 120 min. The structure of the AlN thin film is columnar, having a c-axis, i.e., a <00·1> orientation, which is the normal direction of the glass substrate. An X-ray stress measurement method for crystalline thin films with orientation properties such as columnar structure is proposed and applied to the residual stress measurement of AlN thin films with orientation <00·1>. Strength of diffraction lines other than 00·2 diffraction is very weak. As a result of stress measurement using AlN powder sample as a comparative standard sample, tensile residual stress is obtained when the nitrogen gas pressure is low, but the gas pressure increases as the residual stress is shifts toward compression. At low gas pressure, the unit cell expands due to the incorporation of excess nitrogen atoms.

L1₂형 금속간화합물 Ni₃Al중에 탄화물입자의 석출거동에 관한 연구

한창석,구경완,오동철,Han, Chang-Suk,Koo, Kyung-Wan,Oh, Dong-Cheol 한국재료학회 2006 한국재료학회지 Vol.16 No.4

Structural studies have been performed on precipitation hardening discovered in $L1_2-ordered\;Ni_3(Al,Cr)$ containing 0.2 to 3.0 mol% of carbon using transmission electron microscopy (TEM). Fine octahedral precipitates of $M_{23}C_6$ appeared in the matrix by aging at temperatures around 973 K after solution treatment at 1423 K. TEM examination revealed that the $M_{23}C_6$ phase and the matrix lattices have a cube-cube orientation relationship and keep partial atomic matching at the {111} interface. After prolonged aging or by aging at higher temperatures, the $M_{23}C_6$ precipitates then adopt a rod-like morphology elongated parallel to the <100> directions. Deformation at temperature below 973 K, typical Orowan loops were observed surrounding the $M_{23}C_6$ particles. At higher deformation temperatures, the Orowan loops disappeared and the morphology of dislocations at the particle-matrix interfaces suggested the existence of attractive interaction between dislocations and particles. The change of the interaction modes between dislocation and particles with increasing deformation temperature can be considered as a result of strain relaxation at the interface between matrix and particles.

B2형 금속간화합물 β-NiAl중에 α-Cr입자의 석출거동

한창석,김윤채 ( Chang Suck Han,Youn Che Kim ) 한국열처리공학회 1996 熱處理工學會誌 Vol.9 No.2

Microstructural control to produce multiphase structure has received much attention to improve the high temperature strength as well as low temperature ductility of intermetallics. Transmission electron microscopic investigation has been carried out concerning the effect of Cr-precipitation on the mechanical properties of B2-ordered NiAl containing 4 to 8 mold% of Cr. By aging at temperatures around 973K after solution annealing, fine spherical precipitates took place homogeneously in the NiAl matrix and the alloys hardened appreciably. Selected area electron diffraction(SAED) patterns have not revealed any additional extra-spots during aging, because the Cr-particles show cube-cube orientation relationship and keep a perfect coherency with the ordered matrix lattice. Dislocations were confirmed to bypass the particles during deformation. Although the dispersion of Cr-particles increased the yield strength of NiAl at intermediate temperature, the strength decreased appreciably at higher temperatures.