HfO₂-Si의 조성비에 따른 HfSiO_x의 IZO 기반 산화물 반도체에 대한 연구

조동규,이문석,Cho, Dong Kyu,Yi, Moonsuk 대한전자공학회 2013 전자공학회논문지 Vol.50 No.2

본 연구에서는 IZO를 활성층으로 하고 $HfSiO_x$를 절연층으로 한 TFT에 대하여 그 성능을 측정하였다. $HfSiO_x$는 $HfO_2$ target과 Si target을 co-sputtering 하여 증착하였으며 RF power를 달리 하여 네 가지의 $HfSiO_x$ 박막을 제작하였다. 공정의 간소화를 위해 게이트 전극을 제외한 모든 층들은 RF-magnetron sputtering system과 shadow mask만을 이용하여 증착하였으며 공정의 간소화를 위해 어떠한 열처리도 하지 않았다. 네 가지 $HfSiO_x$ 박막의 구조적 변화를 X-ray diffraction(XRD), atomic force microscopy(AFM)을 통해 분석하였고, 그 전기적 특성을 확인하였다. 박막 내 $HfO_2$와 Si의 조성비에 따라 그 특성이 현저히 차이가 남을 확인하였다. $HfO_2$(100W)-Si(100W)의 조건으로 증착한 $HfSiO_x$ 박막을 절연층으로 한 소자의 특성이 전류 점멸비 5.89E+05, 이동도 2.0[$cm^2/V{\cdot}s$], 문턱전압 -0.5[V], RMS 0.263[nm]로 가장 좋은 결과로 나타났다. 따라서 $HfSiO_x$ 박막 내의 적절한 $HfO_2$와 Si의 조성비가 계면의 질을 향상시킴은 물론, $HfO_2$자체의 trap이나 defect를 효과적으로 줄여 줌으로써 소자의 성능 향상에 중요한 요소라 판단된다. In this work, we investigated the enhanced performance of IZO-based TFTs with $HfSiO_x$ gate insulators. Four types of $HfSiO_x$ gate insulators using different diposition powers were deposited by co-sputtering $HfO_2$ and Si target. To simplify the processing sequences, all of the layers composing of TFTs were deposited by rf-magnetron sputtering method using patterned shadow-masks without any intentional heating of substrate and subsequent thermal annealing. The four different $HfSiO_x$ structural properties were investigated x-ray diffraction(XRD), atomic force microscopy(AFM) and also analyzed the electrical characteristics. There were some noticeable differences depending on the composition of the $HfO_2$ and Si combination. The TFT based on $HfSiO_x$ gate insulator with $HfO_2$(100W)-Si(100W) showed the best results with a field effect mobility of 2.0[$cm^2/V{\cdot}s$], a threshold voltage of -0.5[V], an on/off ratio of 5.89E+05 and RMS of 0.26[nm]. This show that the composition of the $HfO_2$ and Si is an important factor in an $HfSiO_x$ insulator. In addition, the effective bonding of $HfO_2$ and Si reduced the defects in the insulator bulk and also improved the interface quality between the channel and the gate insulator.

環境保全을 위한 國土計劃

趙東奎(Dong Kyu Cho) 성신여자대학교 한국지리연구소 1977 應用地理 Vol.- No.3

대상포진후 신경통 치료를 위한 지속적 경막외 차단후 발생한 경막외 혈종

조동규(Dong Kyu Cho),이강창(Kang Chang Lee),김태요 대한통증학회 1997 The Korean Journal of Pain Vol.10 No.1

A 67-year old man with a history of cardiac disease underwent epidural catheterization for pain control of postherpetic neuralgia. Patient had severe back pain and pus discharge at catheter insertion site after dischange from medical part. Patient received anticoagulant therapy with Aspirin® and. Coumadin® prescribed for 15 days in medical part. Magnetic resonance imaging(MRI) showed a diffuse T4-7 anterior epidural mass compressing the spinal cord. Emergency surgical exploration revealed a thoracic epidural hematoma without abcess fotmation. Operation was successful and patient recovered satisfactory without any sequelae.

연구논문 : 조직구성원의 직무만족과 조직몰입에 관한 연구

조동규 ( Dong Kyu Cho ),양재생 ( Jae Saeng Yang ),이만규 ( Man Kyu Lee ) 한국인적자원관리학회 2004 인적자원관리연구 Vol.10 No.-

HfO₂-Si의 조성비에 따른 HfSiO<SUB>x</SUB>의 IZO 기반 산화물 반도체에 대한 연구

조동규(Dong kyu Cho),이문석(Moonsuk Yi) 대한전자공학회 2013 전자공학회논문지 Vol.50 No.2

본 연구에서는 IZO를 활성층으로 하고 HfSiOx를 절연층으로 한 TFT에 대하여 그 성능을 측정하였다. HfSiOx는 HfO₂ target과 Si target을 co-sputtering 하여 증착하였으며 RF power를 달리 하여 네 가지의 HfSiOx 박막을 제작하였다. 공정의 간소화를 위해 게이트 전극을 제외한 모든 층들은 RF-magnetron sputtering system과 shadow mask만을 이용하여 증착하였으며 공정의 간소화를 위해 어떠한 열처리도 하지 않았다. 네 가지 HfSiOx 박막의 구조적 변화를 X-ray diffraction(XRD), atomic force microscopy(AFM)을 통해 분석하였고, 그 전기적 특성을 확인하였다. 박막 내 HfO₂와 Si의 조성비에 따라 그 특성이 현저히 차이가 남을 확인하였다. HfO₂(100W)-Si(100W)의 조건으로 증착한 HfSiOx 박막을 절연층으로 한 소자의 특성이 전류 점멸비 5.89E+05, 이동도 2.0[cm2/V.s], 문턱전압 -0.5[V], RMS 0.263[nm]로 가장 좋은 결과로 나타났다. 따라서 HfSiOx 박막 내의 적절한 HfO₂와 Si의 조성비가 계면의 질을 향상시킴은 물론, HfO₂자체의 trap이나 defect를 효과적으로 줄여 줌으로써 소자의 성능 향상에 중요한 요소라 판단된다. In this work, we investigated the enhanced performance of IZO-based TFTs with HfSiOx gate insulators. Four types of HfSiOx gate insulators using different diposition powers were deposited by co-sputtering HfO2 and Si target. To simplify the processing sequences, all of the layers composing of TFTs were deposited by rf-magnetron sputtering method using patterned shadow-masks without any intentional heating of substrate and subsequent thermal annealing. The four different HfSiOx structural properties were investigated x-ray diffraction(XRD), atomic force microscopy(AFM) and also analyzed the electrical characteristics. There were some noticeable differences depending on the composition of the HfO2 and Si combination. The TFT based on HfSiOx gate insulator with HfO2(100W)-Si(100W) showed the best results with a field effect mobility of 2.0[cm2/V·s], a threshold voltage of -0.5[V], an on/off ratio of 5.89E+05 and RMS of 0.26[nm]. This show that the composition of the HfO2 and Si is an important factor in an HfSiOx insulator. In addition, the effective bonding of HfO2 and Si reduced the defects in the insulator bulk and also improved the interface quality between the channel and the gate insulator.

청소년의 폐활량의 추정정상치

조동규 ( Dong Kyu Cho ),박희명 ( Hi Myung Park ) 대한결핵 및 호흡기학회 1979 Tuberculosis and Respiratory Diseases Vol.26 No.3

99mTc - DMSA와 99ㅡTc - DTPA의 상대적 신섭취율을 이용한 신기능의 평가

이규보(Kyu Bo Lee),이재태(Jae Tae Lee),조동규(Dong Kyu Cho),정병천(Byung Chun Chung),최정일(Chung Il Choi),김광원(Kwang Weon Kim),권태환(Tae Hwan Kwon) 대한핵의학회 1991 핵의학 분자영상 Vol.25 No.2

N/A Background: The evaluation of individual renal function is important to diagnosis and follow-up of various diseases. Ureteral catheterization of each kidney has been widely used for this purpose, but this method had some technical difficulty, frequent complications and much restriction in reapplication. Therefore we tried to applicate radiopharmaceuticals for the evaluation of individuai renal function. Methods: We measured 2 hour, 4 hour and 24 hour relative renal uptake of 99mTc-DMSA and relative glomerular filteration rate of 99mTc-DTPA with 59 patients with various renal diseases to determine their usefulness for assessment of individual renal function and to compare correlations between every renal uptake of Tc-DMSA and relative glornerular filteration rate. Results: The correlations between 2 hour-, 4 hour- and 24 hour- relative renal uptake of 99mTc-DMSA and relative glomerular filterat.ion rate of 99mTc-DTPA were R=0.9190 (p<0.001), R=O. 9229 (p<0.001) and R=0.9917 (p<0.001). In acute obstructive uropathy, the correlations at 2 hour and 4 houre were poor as R=0.1812 (p<0.05) and R=0.4923 (p<0.05), but the correlation at 24 hour was good as R=0.9942 (p<0.001). Conclusions: We concluded that relative renal uptake at 2 hour and 4 hour had good correlation with relative DTPA uptake ratio in the cases without chronic renal failure and obstructive uropathy. Delayed image with 24 hour relative renal uptake of 99mTc-DMSA had the best correlation with relative glomerular filteration rate of 99mTc-DTPA and that might be useful in evaluation of chronic renal disease in which showed increased beckground activity or acute obstructive uropathy.

방사성핵종 복막촬영술을 이용한 복수에 동반된 수흉의 감별진단

이규보(Kyu Bo Lee),이재태(Jae Tae Lee),황기석(Kee Suk Whang),조동규(Dong Kyu Cho),김광원(Gwang Weon Kim),정병천(Byung Cheon Chung),정준모(Joon Mo Chung) 대한핵의학회 1990 핵의학 분자영상 Vol.24 No.2

N/A Simultaneous presence of ascites and pleural effusion has been documented in patients with cirrhosisof the liver, renal disease, Meigs' syndrome and in patients undergoing peritoneal dialysis. Mechanisms proposed in the formation of pleural effusion in most of the above diseases are lymphatic drainage and diaphragmatic defect. But sometimes, hepatic hydrothoraxes in the absence of clinical ascites and pleural effusion secondary to pulmonary or cardiac disease are noted. It is not always possible to differentiate between pleural effusion caused by transdiaphragmatic migration of ascites and by other causes based soly on biochemical analysis. Authors performed radionuclide scintigraphy after intraperitoneal administration of Tc-99m-labeled colloid in 23 patients with both ascites and pleural effusion in order to discriminate causative mechanisms responsible for pleural effusion. Scintigraphy demonstrated the transdiaphtagmatic flow of fluid from the peritoneum to pleural cavities in 13 patients correctly. In contrast, in 5 patients with pleural effusion secondary to pulmonary, pleural and cardiac diseases, radiotracers fail to traverse the diaphragm and localize in the pleural space. Ascites draining to mediastinal lymph nodes and blocked passage of lymphatic drainage were also clarified, additionaly. Conclusively, radionuclide peritoneal scintigraphy is an accurate, rapid and easy diagnostic tool in patients with both ascites and pleural effusion. It enables the causes of pleural effusion to be elucidated, as well as providing valuable information required when determining the appropriate therapy.

복막투석환자에서의 개존된 Processue Vaginalis - 방사성핵종복막촬영술로 확진된 2예 -

이규보(Kyu Bo Lee),손상균(Sang Kyun Son),이재태(Jae Tae Lee),황기석(Kee Suk Whang),조동규(Dong Kyu Cho),고철우(Chul Woo Koh) 대한핵의학회 1989 핵의학 분자영상 Vol.23 No.2

Continuous ambulatory peritoneal dialysis (CAPD) is a well established method of treating end stage renal failure, and is commonly used as an alternative to hemodia]ysis. Several complications have been observed. These include catheter rnalfunction, abdominal and inguinal hernia, and peritonitis. A relatively frequent complication is swetling of externa] geniitalia, due to bowel fluid passing through a patent processus vaginalis. Special diagnostic procedures are necessary to dctermine the nature of the abnormality and to guide the surgical correction. We reported two cases of patent processus vaginalis in patient on CAPD proved by radionuclide peritonea1 scintiscan using Tc-99 m-tin colloid.

CAPD 환자의 출구 감염의 분류에 따른 치료경과

김용림(Yong Lim Kim),조동규(Dong Kyu Cho),김준철(Jun Chul Kim),백미영(Mi Young Baek),조영준(Young Jun Cho),박선희(Son Hee Park),이동욱(Dong Wook Lee) 대한신장학회 2000 Kidney Research and Clinical Practice Vol.19 No.2

N/A Exit-site infection(ESI) is a troublesome catheter related complication of CAPD that may lead to peri-tonitis and require catheter removal, ESI is variably defined and classified. The rate of ESI and the out-come of treatment are also variably reported in literature. We conducted a retrospective study of 58 episodes of ESI(40 patients) between August 1997 and February 1999, and evaluated the episodes and types of ESI, organism isolated from ESI and their sensitivity, outcome of ESI, number and reason for catheter loss, and the current modality. The mean age was 48.9±11.5 years(31-70) and the male to female ratio was 22:18. The mean dura-tion of CAPD before ESI was 34.1±29.6 months (1.5-114.2), and diabetic nephropathy was the cause of ESRD in 17.5% of cases. The types of catheter were two-cuff, coiled Tenckhoff in 17 patients, two- cuff, coiled swan-neck in 10 patients, two-cuff, straight swan-neck in 10 patients, and two-cuff, straight Tenckhoff in 3 patients. According to Twardowski's classification, acute infection in 33 patients and chronic infection in 25 patients were noted. Causative organisms of ESI were S. aureus, S. epidermidis, Pseudomonas, and E. cali in diminishing order of frequency. S. aureus was the most common organism in acute infection, and S. epidermidis was the most common organism in chronie infection. The mean duration of CAPD before ESI was 27.6±27.2 months in acute infection, and 42.8±30.8 in chronic infection (p<0.05). The duration of antibiotic treatment was 19.9±14.4 days in acute infection, and 42.7±27.2 days in chronic infection(p<0.05). In acute infection, peri-tonitis developed in 2 patients and 1 catheter was removed. In chronic infection, peritonitis developed in 1 patient and the catheter was removed. Three patients had the external cuff shaved due to persistent ESI which was unresponsive to antibiotics and local care. By the end of the study, 36 patients(90%) were still on CAPD, 2 patients(5%) had transferred to hemodialysis, and 2 patients(5%) had died. The cause of death was peritonitis in 1 patient, and cachexia in the other patient. In conclusion, exit-site infection responded rela-tively well to conservative treatment. However, exit- site infection is one of the major causes of catheter failure in CAPD. Therefore, careful exit-site care and examinations are needed.