Mo 화학기상증착에 있어서 불순물 농도에 미치는 증착조건의 영향

배상석,서성교,홍은식,김승모,조미정,한혜정,이두성,김세훈,민석홍 국립7개대학공동논문집간행위원회 2001 공업기술연구 Vol.1 No.-

The thermal decomposition process of Mo(CO)_6 on chemical vapor deposition was investigated by analyzing the effects of deposition temperature, pressure, and reaction gas on the phase change of deposited films. Mo_2C was deposited at or below 350℃ due to the incompleteness of thermal decomposition of Mo(CO)_6, but Mo films was successfully deposited at 400℃ or higher temperatures. The variation of deposition pressure did not change the dependence of decomposition process on deposition temperature. The activation energy of surface reaction was 5.8 ㎉/mole.

Mo/SiO₂/Si(100)기판 위에 MOCVD법으로 성장시킨 AIN박막이용 GHz대역의 FBAR제작에 관한 연구

양충모,김성권,차재상,박구만,Yang, Chung-Mo,Kim, Seong-Kweon,Cha, Jae-Sang,Park, Ku-Man 한국조명전기설비학회 2006 조명·전기설비학회논문지 Vol.20 No.4

본 논문에서는 $Mo/SiO_2/Si(100)$ 기판 위에 MOCVD(Metal-Organic-Chemical-Vapor Deposition)법을 이용하여 C축 방향으로 성장시킨 AIN(Aluminum Nitride) 박막을 이용하여 GHz대역 무선 통신에서 사용할 수 있는 FBAR(Film-Bulk-Acoustic Resonator)을 제작하였다. 제작된 공진부의 공진주파수와 반공진주파수는 각각 3.189[GHz]와 3.224[GHz]으로 측정되었으며, Q값(Quality Factor)과 유효한 전기기계 결합계수(${k_{eff}}^2$)는 각각 24.7과 2.65[%]로 평가되었다. AIN의 증착(Deposition) 조건은 $950[^{\circ}C]$의 기판표면(Substrate) 온도, 20Torr의 압력, 25000의 N/Al의 V/III비로 증착하였다. $4{\times}10^{-5}[\Omega{cm}]$의 Mo 하부전극 고유저항과 $Mo/SiO_2/Si(100)$ 기판 위에 AIN(0002) FWHM(Full-Width at Half-Maximum) 4를 갖는 C축 방향성의 AIN 박막을 성공적으로 성장시켰다. 따라서 증착된 AIN박막의 FWHM값은 GHz대역 무선 통신용 RF(Radio Frequency) 밴드 패스 필터 설계에 유용하게 사용될 것이다. In this paper, it is reported that film-bulk-acoustic resonator with high c-axis oriented AIN film on $Mo/SiO_2/Si(100)$ using metal-organic-chemical-vapor deposition was fabricated. The resonant frequency and anti-resonant frequency of the fabricated resonator were observed with 3.189[GHz] and 3.224[GHz], respectively. The quality factor and the effective electromechanical coupling coefficient(${k_{eff}}^2$) were measured with 24.7 and 2.65[%], respectively. The conditions of AIN deposition were substrate temperature of $950[^{\circ}C]$, pressure of 20Torr, and V-III ratio of 25000. A high c-axis oriented AIN film with $4{\times}10^{-5}[\Omega{cm}]$ resistivity of Mo bottom electrode and $4[^{\circ}]$ of AIN(0002) full-width at half-maximum(FWHM) on $Mo/SiO_2/Si(100)$ was grown successfully. The FWHM value of deposited AIN film is useful for the RF band pass filter specification for GHz-band wireless local area network.

SHS 공정에 의해 제조된 Mo_xW_1-xSi₂ 발열체의 열화메커니즘

이동원,이상헌,김용남,이성철,구상모,오종민,Lee, Dong-Won,Lee, Sang-Hun,Kim, Yong-Nam,Lee, Sung-Chul,Koo, Sang-Mo,Oh, Jong-Min 한국전기전자재료학회 2017 전기전자재료학회논문지 Vol.30 No.10

The degradation mechanism of $Mo_xW_{1-x}Si_2$ ultrahigh-temperature heating elements fabricated by self-propagating high-temperature synthesiswas investigated. The $Mo_xW_{1-x}Si_2$ specimens (with and without post-annealing) were subjected to ADTs (accelerated degradation tests) at temperatures up to $1,700^{\circ}C$ at heating rates of 3, 4, 5, 7, and $14^{\circ}C/min$. The surface loads of all the specimen heaters were increased with the increase in the target temperature. For the $Mo_xW_{1-x}Si_2$ specimens without annealing, many pores and secondary-phase particles were observed in the microstructure; the surface load increased to $23.9W/cm^2$ at $1,700^{\circ}C$, while the bending strength drastically reduced to 242 MPa. In contrast, the $Mo_xW_{1-x}Si_2$ specimens after post-annealing retained $single-Mo_xW_{1-x}Si_2$ phases and showed superior durability after the ADT. Consequently, it is thought that the formation of microcracks and coarse secondary phases during the ADT are the main causes for the degraded performance of the $Mo_xW_{1-x}Si_2$ heating elements without post-annealing.

Effect of post annealing on the microstructure, mechanical properties, and failure of Mo_xW_1-xSi₂ heaters produced by self-propagating high-temperature synthesis

Cho, Myung-Yeon,Lee, Sung-Chul,Park, Chulhwan,Lee, Daeseok,Koo, Sang-Mo,Moon, Kyoung-Sook,Lee, Dong-Won,Oh, Jong-Min Elsevier 2019 INTERMETALLICS Vol.110 No.-

<P><B>Abstract</B></P> <P>High-performance tungsten molybdenum disilicide (Mo<SUB>x</SUB>W<SUB>1-x</SUB>Si<SUB>2</SUB>) heating elements were prepared using a self-propagating high temperature synthesis process. The effect of post annealing on the degradation behavior of the alloy was experimentally investigated. Increasing the attrition milling time up to 20 min during powder preparation resulted in Mo<SUB>x</SUB>W<SUB>1-x</SUB>Si<SUB>2</SUB> heaters with the highest density, which increased the fracture strength compared to samples with shorter attrition times. Such samples were annealed and evaluated as heating elements using accelerated degradation tests and failure analysis in order to compare their structural characteristics and flexural strength with as-fabricated samples. The annealed Mo<SUB>x</SUB>W<SUB>1-x</SUB>Si<SUB>2</SUB> heater showed a relatively dense structure with few pores and no secondary phases, apart from a SiO<SUB>2</SUB> layer. This favorable structure prevented bubble formation, which can result in fracturing of the heater, as revealed by evaluation at high temperatures with various heating rates. The flexural strength of the annealed specimen was 2.5-times higher than that of the as-fabricated specimen, which was attributed to removal of secondary phases during annealing. Failure time and surface load analyses were used to investigate the fracture mechanism of the Mo<SUB>x</SUB>W<SUB>1-x</SUB>Si<SUB>2</SUB> heaters in detail at 1790 °C by quantifying bubble formation and the presence of secondary phases.</P> <P><B>Highlights</B></P> <P> <UL> <LI> Self-propagating high temperature synthesis of Mo<SUB>x</SUB>W<SUB>1-x</SUB>Si<SUB>2</SUB> heaters demonstrated. </LI> <LI> Post-annealed Mo<SUB>x</SUB>W<SUB>1-x</SUB>Si<SUB>2</SUB> heaters were highly dense, with good flexural strength. </LI> <LI> Bubble formation (the main cause of fracture) suppressed at ultra-high temperature (above 1700 °C). </LI> <LI> Surface load, failure time, and bubble formation used to study fracture mechanisms. </LI> </UL> </P>

해남 모이산 천열수 금은광상의 지구화학적 특성

문동혁,고상모,이길재,Moon, Dong-Hyeok,Koh, Sang-Mo,Lee, Gill-Jae 대한자원환경지질학회 2010 자원환경지질 Vol.43 No.5

전남 해남군 모이산 금광상에서 지구화학적 특성에 대한 연구를 수행하기 위하여 모이산 지표 및 갱내, 대산 지표에서 채취한 총 140개 시료에 대한 지구화학분석결과를 상관분석, 요인분석 그리고 군집분석 등 다변수 통계처리 하였다. 상관분석 결과, 금의 함량이 100 ppb 미만인 비광화대와 100 ppb 이상인 광화대에서 동시에 금과 높은 상관관계를 가지는 원소는 Ag, Cu, Bi, Te 등이며, 이는 연구지역에서 수반되는 함금 은 광석광물들(엘렉트럼, 실바나이트, 칼라버라이트 및 스퉤자이트)과 기타광석광물들(황동석, 텔룰로비스무타이트 및 비스무시나이트)의 산출과 일치된 결과로 인지된다. Mo은 비광화대(0.269)에서 보다 광화대(0.615)에서 상대적으로 높은 상관계수를 가지므로 금광화작용에 의해 그 함량이 강하게 지배되고 있는 것으로 해석된다. Mn, Cs, Fe, Se 등은 비광화대에서는 금과 정의 상관관계를 가지지만 광화대에서는 음의 상관관계를 가지므로 금광화작용 시 모암으로부터 용탈되는 원소군으로 해석된다. Sb은 광화대에서 금과 높은 상관성을 보이지만 비광화대에서는 음의 상관관계를 가지므로 금광화작용 시 부화되는 원소로 지시될 수 있다. 요인분석결과, 비광화대에서 금의 함량에 영향을 받는 요인군에 속하는 원소는 Se, Ag, Cs, Te 등이며 이들은 연구지역 내 비광화대에서 금의 존재 여부를 알려줄 수 있는 원소로 해석될 수 있다. 반면 광화대에서는 Mo과 Te 등이 강하게 금광화작용의 여부를 지시해 주며, 금과 함께 수반되는 은광화작용의 여부를 지시해 줄 수 있는 원소는 Sb과 Cu 등으로 해석된다. 군집분석 결과 비광화대에서 Cd-Zn-Pb-S, Bi-Fe-Cu-Mn, Se-Te-Au-Cs-Ag, As-Sb-Ba 등이 유사한 거동을 보이는 원소군으로 나타나는 반면, 광화대에서는 Cd-Zn-Mn-Pb, Fe-S-Se, As-Bi-Cs, Ag-Sb-Cu, Au-Te-Mo 등이 유사한 거동을 보여주는 원소군으로 나타난다. 이상과 같은 지구화학분석 자료의 다변수 통계처리를 이용하여 금광화대와 비광화대의 산출광물의 거동 및 지구화학적 특성 차이의 비교가 가능하므로 추후 이러한 방법이 이와 유사한 유형의 광상탐사에 유용한 방법으로 적용될 수 있을 것으로 기대된다. Geochemical characteristics of the Moisan epithermal gold-silver deposit with total 140 samples in Haenam area, Jeollanamdo were studied by using multivariate statistical analysis (correlation analysis, factor analysis and cluster analysis). The correlation analysis reveals that Ag, Cu, Bi, Te are highly correlated with Au in the both non-mineralized and mineralized zone. It is resulted from the presence of Au-Ag bearing minerals (electrum, sylvanite, calaverite and stuezite) and non Au-Ag containing minerals (chalcopyrite, tellurobismuthite and bismuthinite). Mo shows relatively much higher correlation at the mineralized zone (0.615) than non-mineralized zone (0.269) which implies Mo content is strongly affected by Au-mineralization. While Mn, Cs, Fe, Se correlated with Au at the nonmineralized zone, they have negative correlation at the mineralized zone. Therefore, they seem to be eluviated elements from the host rock during gold mineralization. Sb is enriched during the gold mineralization showing high correlation at the mineralized zone and negative correlation at the non-mineralized zone. According to the factor analysis, Se, Ag, Cs, Te are the indicators of gold mineralization presence due to the strong affection of gold content in the non-mineralized zone. In the mineralized zone, on the other hand, Mo, Te and Sb, Cu are the indicators of gold and silver mineralization, respectively. While the cluster analysis reveals that Cd-Zn-Pb-S, Bi-Fe-Cu-Mn, Se-Te-Au-Cs-Ag, As-Sb-Ba are the similar behavior elements groups in the non-mineralized zone, Cd-Zn-Mn-Pb, Fe-S-Se, As-Bi-Cs, Ag-Sb-Cu, Au-Te-Mo are the similar behavior elements groups in the mineralized zone. Using multivariate statistical analysis as mentioned above makes it possible to compare the behavior of presented minerals and difference of geochemical characteristics between mineralized and non-mineralized zone. Therefore, it will be expected a useful tool on the similar type of mining exploration.

N-Benzyl-4-methylbenzene-1, 2-diamine의 일산화질소 생성 및 NF-kB 활성화에 대한 억제 작용

신현모, 한상배, 김영수 충북대학교 동물의학연구소 2008 Journal of Biomedical and Translational Research Vol.9 No.1

본문참고

부산지역 고등학교 급식서비스에 대한 학생과 급식종사자의 평가

모성종,서재수,류은순 한국조리과학회 2005 한국식품조리과학회지 Vol.21 No.2

The purpose of this study was to evaluate the perception of students' and employees' perception with for their high school foodservicein Bustin area. For this purpose, questionnaires were distributed among the 324 students and 93 employees in 12 high schools in the Busan area. The students assessed the importance and performance of school foodservice as 4.00/5.00 and 2.97/5.00,, respectively, and the employees assessed the importance and performance of as 4.07/5.00 and 3.77/100, respectively. Tice importance mean scores of students wereshowed significantly (p<0.01) higher scores in internal environment factor and sanitation factor than those of employees, hut the performance mean scores of students wereshowed significantly (p<0.01) lower scores in all the factors than those of employees. The importance grid of students and employees showed that the items of the high with to the low with of consideration of preference in menu, appropriate the meal hours, rapidnessrapidity of service, and prompt dealing with complaints were high scores to the students, but low scoresto the employees. The performance grid of students and employees showed that the items of the low with students to the high with employeesfreslrness of food ingredients, offering the consistency of consistently good service, rapidnessrapidity of service, prompt dealing with complaints, communication between students and employees, and food cleanliness were low scores to the students, but high scores to the employees of dish. 'Therefore, it would seem to be desirable that the foodservice manager may be plans the strategies with the involvement of students in the process from planning the menu to proposinge of ideas for improvement.

베이커리 제품소비함수 추정

모수원,정승태,김영숙 목포대학교 기업경영연구소 2000 企業經營硏究 Vol.4 No.1

The aim of this paper is to model and estimate the consumption demand for bread and cakes. We employ Engle-Granger two-step cointegration technique techique, Johansen's multivariate cointegration methodology and GPH test, because the model must be stationary to get the accurate predicted values. The empirical results show that our model is stationary as well as mean -reverting. This paper also applies impulse-response functions, variance decompositions and historical decompositions to our model, indicating that the consumption demands for bread and cakes are enogenous to as well as predictable with the income variable.

골격성 Ⅱ급 1류 부정교합에서 Teusher 장치의 치료효과

모성서,손병화 대한치과교정학회 2003 대한치과교정학회지 Vol.33 No.4

골격성 Ⅱ급 1류 부정교합을 치료하는 방법으로 Activator, FR(Functional regulator), Headgear, Herbst 장치, Twin-block등의 많은 장치가 사용되어진다. 이러한 장치를 사용할 때 기대하는 가장 바람직한 효과는 상악골의 수평적, 수직적 성장의 억제와, 하악골의 성장이 촉진되어 바람직한 골격적 관계를 가지게 되고 이러한 토대 위에 치아들이 적절하게 배열되는 것일 것이다. Teuscher 장치는 Headgear의 상악골의 전하방 성장억제작용과 Activator의 하악골성장촉진 작용을 동시에 가질 수 있도록 고안된 장치로서 실제 임상 중에 이러한 효과가 잘 구현될 수 있는지를 평가하기 위하여 성장기 남녀 각각9명(평균연령 남자8세 11개월, 여자9세4개월)을 대상으로 Teuscher appliance를 평균남아는 평균 10개월, 여아는 평균 11개월간 사용하였으며 이를 대조군과 비교 연구를 시행하였고 그 결과는 다음과 같았다. 1. 상악골의 전방 성장을 효과적으로 억제하여 주었다. 2. 상악 dentoalveolar complex의 전하방 성장을 억제하여 주었다 3. 하악골의 전방 성장 촉진을 관찰하지 못하였다. 4. Overjet, overbite, molar key 개선에 효과적이었다. 5. 장치의 사용으로 상순의 돌출도의 개선과 안모가 향상되었다. Various methods have been used on patients with skeletal Class Ⅱ division 1 malocclusion. The activator, Fra¨nkel appliance, headgear, Herbst appliance, and Twin-block appliance are some examples. The ideal treatment effect using these appliances would be to inhibit horizontal and vertical growth of the maxilla while promoting mandibular growth and obtaining optimum dentition. The Teuscher appliance has a simultaneous combined headgear effect with maxillary growth inhibition and an activator effect with mandibular growth promotion. The purpose of this study was to examine how well these effects were clinically obtained and the results are as follows. 1. The forward growth of the maxilla was effectively inhibited. 2. The downward-forward growth of the maxillary dentoalveolar complex was inhibited. 3. Growth promotion of the mandible was not observed. 4. The overjet, overbite, molar key were effectively improved. 5. The protruded upper lip and facial profile were improved

Polyethylene terephthalate 纖維의 防汚加工에 關한 硏究

牟相榮,孟琦錫,李文洙 충남대학교 공업교육연구소 1981 論文集 Vol.4 No.1

Soil resistant properties imparted to polyethylene terephthalate fabric by silicone and fluorochemical resin treatment have been investigated. The percent soiling and the stiffness of PET fabric were measured by color and color difference meter and handle-o-meter in different concentration of resin emulsions. The resin thicknesses on the PET fabric were calculated in the different resin concentrations. Optimum concentrations of silicone resin emulsion and fluorochemical resin emulsion were 3% o. w. f. and 1% o. w. f. respectively. The fluorochemical resin emulsion was more effective than the silicone resin emulsion for wet and oil stain resistant. Thickness of coated resin wee favorable at above 3% silicone resin emulsions, however the thickness treated with 0.5% resin emulsion was not significantly different from those of the 2% treating in case of fluorochemical resin emulsions. Surfactants such as dispersing agent, softner and antistatic agent added to the emulsions proved to be ineffective but antistatic agent did have some effect at concentrations below 0.5% in case of dry soiling.