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열필라멘트 CVD에서 전압 인가에 의한 다이아몬드의 핵생성 촉진
최균,강석중,황농문,Choi, Kyoon,Kang, Suk-Joong L.,Hwang, Nong-M. 한국세라믹학회 1997 한국세라믹학회지 Vol.34 No.6
The effect of various processing parameters, in particular the substrate and filament temperature, on the nucleation of diamond has been studied for the hot filament CVD process with a negative bias on the substrate. As far as the substrate temperature was maintained around the critical temperature of 73$0^{\circ}C$, the nucleation of diamond increased with increasing filament temperature. The maximum nucleation density of ~ 2$\times$109/$\textrm{cm}^2$ was obtained under the condition of filament temperature of 230$0^{\circ}C$, substrate temperature of 75$0^{\circ}C$, bias voltage of 300V, methane concentration of 20%, and deposition time of 2 hours. This nucleation density is about the same as those obtained in previous investigations. For fixed substrate temperatures, the nucleation density varies up to about 103 times depending on experimental conditions. This result is different from that of Reinke, et al. When the substrate temperature was above 80$0^{\circ}C$, a silkworm~shaped carbon phase was co-deposited with hemispherical microcrystalline diamond, and its amount increased with increasing substrate temperature. The Raman spectrum of the silkworm-shaped carbon was the same as that of graphitic soot. The silkworm-shaped carbon was etched and disappeared under the same as that of graphitic soot. The silkworm-shaped carbon was etched and disappeared under the deposition condition of diamond, implying that it did not affect the nucleation of diamond.
습식 워터 젯 정밀 절삭 가공용 다이아몬드 오리피스 제조 및 응용
김연철,박희동,조재한,강석중,Kim, Youn-Chul,Park, Hee-Dong,Jho, Jae-Han,Kang, Suk-Joong L 한국분말야금학회 2008 한국분말재료학회지 (KPMI) Vol.15 No.6
High-pressure abrasive entrained jet have rapidly become important machining technology over the last two decades. However, suspension jet by high-pressure has been recently developed for packaging sawing. Ideally, diamond materials should be used for components in abrasive water-jet systems that are subject to high erosive conditions. Using the diamond orifices improve maintenance and extend wear part life. This paper gives insights to using an abrasive suspension jet with diamond orifice. The influences of orifice material and orifice design are evaluated.