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Isaku Kanno,Hidetoshi Kotera,Kiyotaka Wasa,Ryouichi Takayama,Takeshi Kamada,Toshiyuki Matsunaga 한국물리학회 2003 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.42 No.IV
Compositional dependence of crystallographic structure of the epitaxial Pb(Zr,Ti)O3 (PZT) lms was investigated. The c-axis oriented PZT lms with Zr/Ti ratio ranging from 10/90 to 70/30 were epitaxially grown on (100)Pt/(100)MgO substrates using rf-sputtering. Four-circle x-ray diraction measurements revealed that the PZT lms exhibited anomalous crystalline structure which was considerably dierent from the phase diagram of bulk PZT. In particular, the PZT lms showed tetragonal structure even with the Zr/Ti composition above 53/47 and rhombohedral phase could not be identied even for the PZT lms of 70/30. The lattice constants of the PZT lms were independent of the lm thickness. The sputtering process accompanies non-thermal equilibrium reactions with the bombardment of the energetic sputtered particles to the growing lms and might induce isotropic internal stress across the lms. The anomalous crystalline characteristics are attributed to the sputter-induced stress of the PZT lms.