Fabrication of a Bottom Electrode for a Nano-scale Beam Resonator Using Backside Exposure with a Self-aligned Metal Mask

Lee, Yong-Seok,Jang, Yun-Ho,Bang, Yong-Seung,Kim, Jung-Mu,Kim, Jong-Man,Kim, Yong-Kweon The Korean Institute of Electrical Engineers 2009 Journal of Electrical Engineering & Technology Vol.4 No.4

In this paper, we describe a self-aligned fabrication method for a nano-patterned bottom electrode using flood exposure from the backside. Misalignments between layers could cause the final devices to fail after the fabrication of the nano-scale bottom electrodes. A self-alignment was exploited to embed the bottom electrode inside the glass substrate. Aluminum patterns act as a dry etching mask to fabricate glass trenches as well as a self-aligned photomask during the flood exposure from the backside. The patterned photoresist (PR) has a negative sidewall slope using the flood exposure. The sidewall slopes of the glass trench and the patterned PR were $54.00^{\circ}$ and $63.47^{\circ}$, respectively. The negative sidewall enables an embedment of a gold layer inside $0.7{\mu}m$ wide glass trenches. Gold residues on the trench edges were removed by the additional flood exposure with wet etching. The sidewall slopes of the patterned PR are related to the slopes of the glass trenches. Nano-scale bottom electrodes inside the glass trenches will be used in beam resonators operating at high resonant frequencies.

TFT -LCD 구동 IC용 커패시터 내장형 DC-DC 변환기 설계

임규호,강형근,이재형,손기성,조기석,백승면,성관영,이용진,박무훈,하판봉,김영희,Lim Gyu-Ho,Kang Hyung-Geun,Lee Jae-Hyung,Sohn Ki-Sung,Cho Ki-Seok,Baek Seung-Myun,Sung Kwan-Young,Li Long-Zhen,Park Mu-Hun,Ha Pan-Bong,Kim Young-Hee 한국정보통신학회 2006 한국정보통신학회논문지 Vol.10 No.7

A non-overlap boosted-clock charge pump(NBCCP) with internal pumping capacitor, an advantageous circuit from a minimizing point of TFT-LCD driver IC module, is proposed in this paper. By using the non-overlap boosted-clock swinging in 2VDC voltage, the number of pumping stages is reduced to half and a back current of pumping charge from charge pumping node to input stage is also prevented compared with conventional cross-coupled charge pump with internal pumping capacitor. As a result, pumping current of the proposed NBCCP circuit is increased more than conventional cross-coupled charge pump, and a layout area is decreased. A proposed DC-DC converter for TFT-LCD driver IC is designed with $0.18{\mu}m$ triple-well CMOS process and a test chip is in the marking. 본 논문에서는 TFT-LCD 구동 IC 모듈의 소형화측면에서 유리한 DC-DC 변환기 회로인 펌핑 커패시터 내장형 비중첩 부스트-클락 전하펌프 (Non-overlap Boosted-Clock Charge Pump: NBCCP) 회로가 제안되었다 .2VDC 전압으로 스윙하는 비중첩 부스트-클럭의 사용으로 기존의 펌핑 커패시터 내장형 크로스-커플드 전하펌프에 비해 펌핑 단의 수를 반으로 줄일 수 있었고, 전하 펌핑 노드의 펌핑된 전하가 입력 단으로 역류되는 현상을 방지하였다 . 그 결과 제안된 펌핑 커패시터 내장형 비중첩 부스트-클럭 전하펌프 회로는 기존의 펌핑 커패시터 내장형 크로스-커플드 전하펌프에 비해 펌핑 전류가 증가하였고, 레이아웃 면적은 감소되었다. 제안된 TFT-LCD 구동 IC용 DC-DC 변환기 회로를 $0.18{\mu}m$ Triple-Well CMOS 공정을 사용하여 설계하고, 테스트 칩을 제작 중에 있다.

리튬이온셀 베터리의 전하 흐름 해석

宋武錫,강현선 홍익대학교 산업기술연구소 2001 産業技術 Vol.11 No.-

A numerical study for the electrolyte flow of Lithium/Thionyl Chloride Battery is performed and the applicability of the developed algorithm for a further study is examined. Conservatives forms of each related governing equation is solved by finite volume based numerical scheme and a few test cases studied with several known velocity profiles. Further modelings of various source terms are required.

리더십 행동의 규정요인 및 유효성 검토 : An Expectancy Theory Approach

임무경,김석일,박일호 한국스포츠리서치 2004 한국 스포츠 리서치 Vol.15 No.3

The purpose of this study was to examine the influence of the instrumentality perceptions (concerning the degree to which the leadership behavior is seen as leading to accomplish his own instructional objectives), extrinsic factors (characteristic of group, characteristics of followers, task uncertainty and favorableness for leader) and instrumentality perceptions (concerning the degree to which the leader is seen as leading to realize follower's objectives) on the leadership behavior (initiating structure and consideration), and the influence of the difference between two leadership measurements (leader's own and followers') on the effectiveness of sport clubs in community. The subjects were 54 leaders and 273 members of sport clubs in community. 1. The correlation between the instrumentality perceptions of Initiating structure and the actual leadership (initiating structure) were considerably high. 2. Significantly positive correlation between the instrumentality perceptions of leader by club members and the attitude toward the leadership of leader were found. 3. As to the effectiveness of clubs, coincidence clubs (leader's own evaluation and followers' on leadership) was higher than uncoincident clubs. These findings indicated that the leader's leadership behavior (initiating structure) could be predicated from the Expectancy Theory model and the difference between leader's own evaluation and that of club members' on leadership influenced on the effectiveness of sport clubs in community.

선박의 자세제어를 위한 발라스트수 이송 모델에 관한 연구

宋武錫 弘益大學校 産業技術硏究所 2004 産業技術 Vol.14 No.-

A formulation was reviewed to setup an experimental study aiming at investigation of the friction loss factor associated with the orifices connecting ballast tanks of ship. The shape and the relative position of the orifice to water level are to be varied with a given hydrostatic pressure condition and the flow rate will be measured. The flow coefficients obtained in this study can be effectively adopted for the prediction of the performance in ballasting and de-ballasting operation.

電力系統 解析에 相座標系의 適用에 관한 硏究

金武雄,서희석,申明澈 成均館大學校 科學技術硏究所 1989 論文集 Vol.40 No.1

In resent times, the analysis of power system by the method of phase coordinates which uses the phase quantites directly has been studied extensively instead of the method of symmetrical components. In this paper, the power system components are modelled in terms of the phase coordinates representation, and some results are obtained from the sample power systems based on this model. In addition, in order to demonstrate further effectiveness and reliablity of phase coordinate method, its results are compared with those from the method of symmetrical components. In simulation, simple models are used for the analysis of power system, but this method can be extended to any number of systems.

지지력 실험을 통한 지반강도정수의 추정에 관한 연구

송무효,홍석우 동의대학교 산업기술개발연구소 2001 産業技術硏究誌 Vol.15 No.-

기존의 얕은 기초의 지지력 이론은 지반이 동시파괴(전반전단파괴)를 일으킨다는 강소성을전제로 하고 있으며, 이론식 속의 지지력 계수(Nc, Nr, Nq)는 단지 지반의 내부마찰각(φ)만의 함수로 표현되어져 있다. 따라서 파괴의 진행성, 또는 재하폭에 따른 영향이 명확히 고려되어져 있지 않다. 이에 본 논문에서는 주문진사를 이용하여 중간·조밀의 모래지반을 성형하곡 재하폭(B)을 변화시켜 실험하였다. 실험결과로부터 조밀한 모래지반에서도 진행성 파괴(Progressive Failure)와 크기 효과(Scale Effect)가 나타남을 알 수 있었다. 본 연구에서는 이들 영향을 고려하기 위하여 이론과 실험에 의한 Nr의 비를 지지력계수비(Rr)라고 정의하였고, 모래지반의 내부마찰각을 추정하는 방법을 제안하였다. The theoretical bearing capacity equation of shallow foundation has been proposed under the state of a general shear failure and by using the rigid plastic theory. The bearing capacity factors(Nc, Nr, Nq) of theoretical equation are also decided by internal friction angle(φ) only of ground. Therefore, the effect of progressive failure and loading width are not considered in it. In this paper, the laboratory model tests are performed for medium and dense Joomunjin standard sand with variation of width of loading plate. From test results, the effect of progressive failure and loading width are analyzed. And, the ratio of bearing capacity factor(Rr) is defined, which can be calculated using theoretical value of Nr and experimental value(Nr') of Nr. By using ratio of bearing capacity factor(Rr), the internal friction angle of sand ground can be obtained from test results of bearing capacity.

針葉樹 幼苗의 모잘록병 發生에 미치는 環境要因의 影響

韓茂錫,尹貞求 충북대학교 농업과학기술연구소 1990 農業科學硏究 Vol.8 No.2

The pathogens causing damping-off of coniferous seedlings were isolated from diseased seedlings of the pine, larch and soil of seedlings bed. After isolating and identifying the causal fungi, ecological factors such as temperature affecting mycelial growth, pathogenicity and conidia germination were investigated. In addition, outbreak of damping-off by different growing stages were also investigated. The results obtained were as follows. 1. The causal pathogens identified were Fusarium moniliforme, F. acuminayum, F. graminearum, the unidentified Fusarium spp. and confirmed their pathogenicity on the seedlings of Pinus densiflora and Pinnus thunbergii. 2. Fusarium moniliforme showed the highest frequency among pathogens isolated from diseased seedings, whereas in the soil, F. acuminatum and F. sp. (8706) showed higher frequency than the others. 3. The optimum temperature for mycelial growth the Fusaria was 25℃~30℃, mycelial growth of every species was discontinued at 5℃, the optimum PH for mycelial growth was at 5.5 to 7.5. 4. Optimum temperature for the conidial germination was at 25℃. At 100% of relative humidity the conidial germination was above 94%, but decreasing trend was shown at less than 90%. 5. The percentage of the diseased seedlings in Pinus densiflora and Larx kaempferi by the fertilizer application were not remarkably different, but N fertilizer showed a positive correlation. 6. The outbreak percentage of diseased seedlings on Pinus densiflora and Larix kaempferi was a negative trend according to their age.

수중 유출유의 버블화 과정에 관한 연구

宋武錫 홍익대학교 산업기술연구소 1998 産業技術 Vol.8 No.-

Oil bubble formation during the underwater oil discharge is investigated experimentally. The focus is placed on the size of the bubbles formed with the variation of discharge speed and nozzle diameter. Basically three types of bubble plume are formed in which different bubble formations are revealed according to the Reynolds number based on the nozzle diameter. The trend is from well established single bubble train to complex bubble clouds composed of the droplets of various size as the Reynolds number increases. Once bubbles are formed each bubble or bubble groups rise toward the free surface with showing various inter-bubble interactions by which the rising speed of the discharged oil is affected.

IHOP실행계획의 전산화체계 구축

宋武錫,金庸燮,李大炯 弘益大學校 産業技術硏究所 2005 産業技術 Vol.15 No.-

Higher Productivity and less cost during the manufacturing process of ships are required to maintain international competitiveness of modern shipbuilding industries. The integrated hull/ outfitting/ painting scheduling(IHOP) process is a final point, where logistics are finally being integrated and upcoming schedules are made. Therefore, more profits are expected from IHOP by effective management. In this thesis, IHOP is proposed in order to solve how to choose block erection date withIHOP scheduling logic. Characteristics of erection process had the non-fixed elements, and it requires a lot of calculation. So IHOP, which demands less calculations and reflects more of the non-fixed elements, is the best profit solver in integrated schedule problem. It was applicable in diminution method of maximum load through load balancing measure. IHOP seeks for a gradual lowering of the maximum load, and consequently aims for load balancing. It was effective for not only decrease of complex group work, but also decrease of overtime work. The result of IHOP scheduling is highly advised to utilize fabrication, outfitting shops. A standardized operation and load of resource will eventually be applied in long-term time span point of view for this will make it easy to enable capacity planning and workforce planning. It is also expected to eliminate inefficiency in overtime work and efficiently utilize manpower in short-term.