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Modi cation of the Development Parameter for a Chemically Ampli ed Resist Simulator
Eun-JungSeo,Heung-JinBak,Sang-KonKim,Young-SooSohn,Hye-KeunOh 한국물리학회 2002 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.40 No.4
It is necessary to have more appropriate resist parameters in order for a lithography simulator to predict real photoresist proles. These process parameters are usually obtained by ood exposure experiments without pattern masks. However, real processes are performed with pattern masks. Since the intensity on the wafer is dierent with and without a pattern, the development parameters must be modied in order to predict real processes. Especially, the development parameters, one example of the process parameters, are crucial to mimic real processes. It has been reported that the development parameters of a photoresist with or without underlying patterns are dierent. In this paper, we modied the ood exposure development parameters of a 248-nm chemically amplied resist (CAR) to get patterned development parameters and compared them with the simulation results. First, we obtained the development parameters by using a ood exposure experiment and applied them to our lithography simulator LUV. The simulated resist proles were then compared to SEM microphotographs. Second, we modied the development parameters for the simulated resist prole to match the SEM photographs. We also determined the relationship between the changes of the parameters and the pattern prole. We could see the eect of the modication in dierent line widths and sidewall angle.
박정서(Jungseo Park),염기태(Kitae Yeom),장진영(Jinyoung Jang),문석수(Seoksu Moon),배충식(Choongsik Bae),박정남(Jeongnam Park),김성근(Sungkun Kim) 한국자동차공학회 2006 한국자동차공학회 춘 추계 학술대회 논문집 Vol.- No.-
A de-icing method was investigated using by heater coil wire attached conventional 4-hole Top-feed type injector for LPG(liquefied petroleum gas) liquid injection. The heat loss on the nozzle tip of injector was evaluated by measuring the input power to the heater coil wire to keep the initial temperature of nozzle tip surface. Test was conducted for various conditions of injection duration, injection interval and fuel pressure. Unexpectedly, in according to the increase of injection rate, the heat loss of nozzle tip was decreased. Considering the total heat energy balance on nozzle tip can describe these phenomena. The heat loss of nozzle tip was increased as the injection frequency is increased, while slightly smaller heat loss is observed at higher injection pressure. These results could give the basic information about the required heat energy to maintain the nozzle tip temperature as initial condition.
모바일 기기를 활용한 조선 및 해양플랜트 스마트 제조 사례
박정서 ( Park Jungseo ) 텔코경영연구원 2023 텔코 저널 Vol.11 No.0
한국의 조선사들은 제조 경쟁력을 향상시키기 위해 다양한 스마트 제조 기술을 도입하고 있다. 이 중에서도 특히 모바일 기기를 활용한 스마트 제조에 대한 연구가 활발하다. 본 기고에서는 모바일과 관련된 스마트 제조에 대해 세 가지 모바일 솔루션 개발 사례를 소개하고자 한다. 첫째는 태블릿을 통해 실시간으로 도면 및 경량 3D모델을 가시화하는 솔루션을 개발한 사례이다. 둘째는 3D 활용 측면에서 증강현실 기술을 개발해 작업지시 및 검사에서 활용한 사례이다. 마지막 사례는 모바일 기기 활용 확산을 위해 보안과 안전을 강화함으로써 개인이 보유한 스마트폰으로 도면 및 모델을 보고 작업 실적까지 입력 가능한 솔루션을 개발한 사례이다. 이를 기반으로 넓고 위험한 조선소 야드 작업 환경에서도 실시간으로 최신의 정보를 보고 실시간 실적입력을 가능하게 함으로써 향후 스마트 제조 환경을 더욱 확산할 수 있도록 하였다. Many Korean shipbuilding companies are developing various smart manufacturing technologies to improve manufacturing competitiveness. Among them, researches on smart manufacturing technologies using mobile devices are particularly active. In this article, we would like to introduce three mobile solutions for smart manufacturing cases using mobile devices. The first is a case of developing a solution for visualizing drawings and lightweight 3D models in real time using mobile devices, especially tablets. The second is a case of developing augmented reality technology and using it in work order and inspection. The last case is a case of developing a solution that allows field workers to see drawings and 3D models and input working records with their own smart-phones with strengthening security and safety to spread the use of mobile devices. Based on this, even in a wide and hard shipyard yard working environment, the latest drawings and information can be shared in real time and real-time working result input is possible, so that the smart manufacturing environment can be further spread in the future.
THE CRASH BEHAVIOR ANALYSIS OF TRAIN VIRTUAL TESTING MODEL
Seungrok. Kim,Jungseo. Goo,Taesoo. Kwon,Kihwan. Kim 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
It is important to predict the collision behavior of a train consist to improve its crashworthiness. To analyze crash behavior of train, four kinds of methods are mainly used so far. The first is method using multibody dynamics to predict the gross motion of the train set. The second uses 3D FE model to apply the section analysis method in order. The third is used to deduce design specification and evaluate the crashworhiness of a train by using 1D model. The last is to constitute 2D model to check overriding and coupling devices. The train evaluation procedures are so complex that it is difficult to understand or deal with. In this study, VTM for railway train was introduced to simplify the procedures. VTM involves 3D models, 1D models and dynamic components such as suspension and coupling. The method using hybrid concept model makes it possible to do all the things that are mentioned above. To analyze crash behavior tendency of VTM, the model was simulated and the simulation results were discussed.
[가솔린엔진부문] 정적 연소기내의 스월 속도 변화에 따른 플라즈마 제트 점화의 연소특성
이주한(Juhan Lee),박정서(Jungseo Park),유호선(Hoseon Yoo),김문헌(Munheon Kim) 한국자동차공학회 2000 한국자동차공학회 춘 추계 학술대회 논문집 Vol.- No.-
This paper presents the evaluation of combustion caracteristics by means of single-hole plasma jet ignitions in comparison with conventional spark ignition in according to the variation of swirl velocity. Plasma jet plug designed. three types according to ejecting directions : center of chamber, positive and negative swirl flow direction. Experiments are conducted by LPG-air mixture in a constant volume cylindrical vessel. Not only the flame propagation is photographed at intervals, but the pressure variation in the combustion chamber is a]50 recorded throughout the entire combustion process. The results show that the plasma jet ignitions and spark ignition are enhance the overall combustion rate by increasing the swirl velocity. The dependence 'of the combustion enhancement rate on the swirl velocity leads to the fact that the plasma jet plug, which eject plasma jet to the center of combustion chamber is the most desirable ignitor than other plugs.
Top-Feed Type 인젝터의 LPG 액상분사 적용성
염기태(Kitae Yeom),박정서(Jungseo Park),장진영(Jinyoung Jang),문석수(Seoksu Moon),배충식(Choongsik Bae),박정남(Jeongnam Park),김성근(Sungkun Kim) 한국자동차공학회 2006 한국자동차공학회 춘 추계 학술대회 논문집 Vol.- No.-
The injection and spray characteristics of Top-feed type injector was investigated under liquid phase injection fueled with liquefied petroleum gas (LPG). Different pressures and temperatures of fuel injection system were tested to identify the injection characteristics after hot soaking. MIE-scattering technique was used for verification of successful liquid phase injection after hot soaking. In case of Bottom-feed type injector, the injection was accomplished at every experimental condition. In case of Top-feed type injector, when the pressure of LPG was over 12 bars, the injection was not executed. The effects of temperature of fuel on fuel injector were little. However, under the pressure were 12 bars, the liquid phase injection after hot soaking was accomplished.
김홍성(Hongsung Kim),박정서(Jungseo Park),김문헌(Munheon Kim) 한국자동차공학회 2002 한국자동차공학회 춘 추계 학술대회 논문집 Vol.2002 No.5_1
It was established to the system, which adapted combustion system not following spark ignition system without any ignition apparatus. It was heated and controlled inlet-air into conventional single cylinder engin. Adapting the method of increasing inlet-air heating temperature made possible enhanced the compression ignition cbaIacteristics of gasoline fuel injected to intake-port. It was established the compression ignition gasolin engin. So, the system was investigated the emission characteristics of compression ignition gasolin engine. The conclusions of combustion emission chracteristics are as followed.<br/> The gasoline compression ignition system made possible to run lean bum(over air-fuel ratio 30) the engine, and emission of carbon monoxide was emitted little about the changes of air-fuel ratio. Inlet-air heating temperature and the changes of engine speed were hardly got influenced. The emission of hydrocaIbon was increased as much as air-fuel ratio's increased<br/> But the ranges of changes was very narrow. It was emitted little only as much as 2 ppm and 4 ppm within the changes of inlet-air heating temperature and engine speed. The emission of nitrogen oxide was decreased greatly as much as air-fuel ratio was decreased. When air-fuel ratio was over 45, the emission of nitrogen oxide was emitted little in case that the changes of inlet-air heating temperature and engine speed.<br/> The achievements of gasoline compression ignition system could improved that the emission concentrations of carbon monoxide, hydrocarbon and nitrogen oxide were reduced greatly.